JPH0232742B2 - - Google Patents

Info

Publication number
JPH0232742B2
JPH0232742B2 JP57086332A JP8633282A JPH0232742B2 JP H0232742 B2 JPH0232742 B2 JP H0232742B2 JP 57086332 A JP57086332 A JP 57086332A JP 8633282 A JP8633282 A JP 8633282A JP H0232742 B2 JPH0232742 B2 JP H0232742B2
Authority
JP
Japan
Prior art keywords
sample
stage
field
image
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57086332A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58204457A (ja
Inventor
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57086332A priority Critical patent/JPS58204457A/ja
Publication of JPS58204457A publication Critical patent/JPS58204457A/ja
Publication of JPH0232742B2 publication Critical patent/JPH0232742B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57086332A 1982-05-21 1982-05-21 電子顕微鏡における視野移動装置 Granted JPS58204457A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57086332A JPS58204457A (ja) 1982-05-21 1982-05-21 電子顕微鏡における視野移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57086332A JPS58204457A (ja) 1982-05-21 1982-05-21 電子顕微鏡における視野移動装置

Publications (2)

Publication Number Publication Date
JPS58204457A JPS58204457A (ja) 1983-11-29
JPH0232742B2 true JPH0232742B2 (enrdf_load_stackoverflow) 1990-07-23

Family

ID=13883877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57086332A Granted JPS58204457A (ja) 1982-05-21 1982-05-21 電子顕微鏡における視野移動装置

Country Status (1)

Country Link
JP (1) JPS58204457A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320847B2 (enrdf_load_stackoverflow) * 1972-07-20 1978-06-29

Also Published As

Publication number Publication date
JPS58204457A (ja) 1983-11-29

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