JPH0232092B2 - - Google Patents

Info

Publication number
JPH0232092B2
JPH0232092B2 JP60050605A JP5060585A JPH0232092B2 JP H0232092 B2 JPH0232092 B2 JP H0232092B2 JP 60050605 A JP60050605 A JP 60050605A JP 5060585 A JP5060585 A JP 5060585A JP H0232092 B2 JPH0232092 B2 JP H0232092B2
Authority
JP
Japan
Prior art keywords
suction
port
collar
control valve
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60050605A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61214937A (ja
Inventor
Yoshinori Shimamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP5060585A priority Critical patent/JPS61214937A/ja
Publication of JPS61214937A publication Critical patent/JPS61214937A/ja
Publication of JPH0232092B2 publication Critical patent/JPH0232092B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Jigs For Machine Tools (AREA)
JP5060585A 1985-03-15 1985-03-15 吸着保持装置 Granted JPS61214937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5060585A JPS61214937A (ja) 1985-03-15 1985-03-15 吸着保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5060585A JPS61214937A (ja) 1985-03-15 1985-03-15 吸着保持装置

Publications (2)

Publication Number Publication Date
JPS61214937A JPS61214937A (ja) 1986-09-24
JPH0232092B2 true JPH0232092B2 (cs) 1990-07-18

Family

ID=12863596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5060585A Granted JPS61214937A (ja) 1985-03-15 1985-03-15 吸着保持装置

Country Status (1)

Country Link
JP (1) JPS61214937A (cs)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206643A (ja) * 1988-02-13 1989-08-18 Shinkawa Ltd 基板吸着構造
CN103904011B (zh) * 2012-12-28 2016-12-28 上海微电子装备有限公司 翘曲硅片吸附装置及其吸附方法
US10192770B2 (en) 2014-10-03 2019-01-29 Applied Materials, Inc. Spring-loaded pins for susceptor assembly and processing methods using same
CN106252791B (zh) * 2015-06-12 2019-02-19 睿励科学仪器（上海）有限公司 硅片吸盘
US12183618B2 (en) 2020-10-01 2024-12-31 Applied Materials, Inc. Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
USD980884S1 (en) 2021-03-02 2023-03-14 Applied Materials, Inc. Lift pin

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS432692Y1 (cs) * 1964-12-23 1968-02-03
JPS50125895U (cs) * 1974-03-29 1975-10-15
JPS5646529A (en) * 1979-09-21 1981-04-27 Citizen Watch Co Ltd Wafer chuck

Also Published As

Publication number Publication date
JPS61214937A (ja) 1986-09-24

Similar Documents

Publication Publication Date Title
KR102043120B1 (ko) 반도체 다이의 픽업 장치 및 픽업 방법
JPH0232092B2 (cs)
US4576407A (en) Robot hand for lifting apertured panel
CN115083986B (zh) 一种具有End effect的SCARA机器人手臂
EP0597424B1 (en) Flow control device
JPH0567551A (ja) ウエハチヤツク
US20230178394A1 (en) Chip peeling apparatus and chip peeling method using the same
JP2002137183A (ja) 吸着パッド
JP2554972Y2 (ja) 圧力制御弁
KR200287037Y1 (ko) 진공척
CN211569380U (zh) 真空吸附模块
KR100280381B1 (ko) 웨이퍼 유동 방지 시스템
JPS6362346A (ja) 吸着テ−ブル
JPH0530030Y2 (cs)
JPH03272156A (ja) 半導体ウエハの保持装置
JPH0331082Y2 (cs)
KR200184161Y1 (ko) 웨이퍼 이동용 트위저
KR20000028197A (ko) 웨이퍼의 진공 흡착기
JPH0575554B2 (cs)
JPH06226674A (ja) 真空吸着ハンド
JPH07214451A (ja) ワーク吸着装置
JPH0325481Y2 (cs)
JPH0445780Y2 (cs)
JP2684050B2 (ja) 制御器
JPH04300168A (ja) 真空吸着装置