JPH023148Y2 - - Google Patents
Info
- Publication number
- JPH023148Y2 JPH023148Y2 JP2132983U JP2132983U JPH023148Y2 JP H023148 Y2 JPH023148 Y2 JP H023148Y2 JP 2132983 U JP2132983 U JP 2132983U JP 2132983 U JP2132983 U JP 2132983U JP H023148 Y2 JPH023148 Y2 JP H023148Y2
- Authority
- JP
- Japan
- Prior art keywords
- meshing
- light
- transmitted light
- image
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 22
- 238000003384 imaging method Methods 0.000 claims description 13
- 238000007689 inspection Methods 0.000 claims description 9
- 230000013011 mating Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2132983U JPS59128547U (ja) | 1983-02-16 | 1983-02-16 | メツシング検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2132983U JPS59128547U (ja) | 1983-02-16 | 1983-02-16 | メツシング検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59128547U JPS59128547U (ja) | 1984-08-29 |
| JPH023148Y2 true JPH023148Y2 (ko) | 1990-01-25 |
Family
ID=30152455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2132983U Granted JPS59128547U (ja) | 1983-02-16 | 1983-02-16 | メツシング検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59128547U (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430516Y2 (ko) * | 1985-09-21 | 1992-07-23 |
-
1983
- 1983-02-16 JP JP2132983U patent/JPS59128547U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59128547U (ja) | 1984-08-29 |
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