JPH02311392A - 化合物半導体の結晶成長方法 - Google Patents
化合物半導体の結晶成長方法Info
- Publication number
- JPH02311392A JPH02311392A JP13325489A JP13325489A JPH02311392A JP H02311392 A JPH02311392 A JP H02311392A JP 13325489 A JP13325489 A JP 13325489A JP 13325489 A JP13325489 A JP 13325489A JP H02311392 A JPH02311392 A JP H02311392A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- chamber
- vapor pressure
- growth
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13325489A JPH02311392A (ja) | 1989-05-26 | 1989-05-26 | 化合物半導体の結晶成長方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13325489A JPH02311392A (ja) | 1989-05-26 | 1989-05-26 | 化合物半導体の結晶成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02311392A true JPH02311392A (ja) | 1990-12-26 |
| JPH0582357B2 JPH0582357B2 (enrdf_load_stackoverflow) | 1993-11-18 |
Family
ID=15100315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13325489A Granted JPH02311392A (ja) | 1989-05-26 | 1989-05-26 | 化合物半導体の結晶成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02311392A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5499600A (en) * | 1993-12-24 | 1996-03-19 | Stanley Electric Co., Ltd. | Methods for compound semiconductor crystal growth from solution |
-
1989
- 1989-05-26 JP JP13325489A patent/JPH02311392A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5499600A (en) * | 1993-12-24 | 1996-03-19 | Stanley Electric Co., Ltd. | Methods for compound semiconductor crystal growth from solution |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0582357B2 (enrdf_load_stackoverflow) | 1993-11-18 |
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