JPH0231126U - - Google Patents

Info

Publication number
JPH0231126U
JPH0231126U JP10901988U JP10901988U JPH0231126U JP H0231126 U JPH0231126 U JP H0231126U JP 10901988 U JP10901988 U JP 10901988U JP 10901988 U JP10901988 U JP 10901988U JP H0231126 U JPH0231126 U JP H0231126U
Authority
JP
Japan
Prior art keywords
electrode
gas injection
lower ring
upper gas
shaped cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10901988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10901988U priority Critical patent/JPH0231126U/ja
Publication of JPH0231126U publication Critical patent/JPH0231126U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP10901988U 1988-08-18 1988-08-18 Pending JPH0231126U (US07847105-20101207-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10901988U JPH0231126U (US07847105-20101207-C00016.png) 1988-08-18 1988-08-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10901988U JPH0231126U (US07847105-20101207-C00016.png) 1988-08-18 1988-08-18

Publications (1)

Publication Number Publication Date
JPH0231126U true JPH0231126U (US07847105-20101207-C00016.png) 1990-02-27

Family

ID=31344892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10901988U Pending JPH0231126U (US07847105-20101207-C00016.png) 1988-08-18 1988-08-18

Country Status (1)

Country Link
JP (1) JPH0231126U (US07847105-20101207-C00016.png)

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