JPH02297198A - 配線パターン欠陥検出方法及び装置 - Google Patents

配線パターン欠陥検出方法及び装置

Info

Publication number
JPH02297198A
JPH02297198A JP2093036A JP9303690A JPH02297198A JP H02297198 A JPH02297198 A JP H02297198A JP 2093036 A JP2093036 A JP 2093036A JP 9303690 A JP9303690 A JP 9303690A JP H02297198 A JPH02297198 A JP H02297198A
Authority
JP
Japan
Prior art keywords
pattern
data
wiring pattern
defect
connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2093036A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580028B2 (enrdf_load_stackoverflow
Inventor
Takanori Ninomiya
隆典 二宮
Yasuo Nakagawa
中川　泰夫
Hirotani Saitou
斎藤　啓谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2093036A priority Critical patent/JPH02297198A/ja
Publication of JPH02297198A publication Critical patent/JPH02297198A/ja
Publication of JPH0580028B2 publication Critical patent/JPH0580028B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2093036A 1990-04-10 1990-04-10 配線パターン欠陥検出方法及び装置 Granted JPH02297198A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2093036A JPH02297198A (ja) 1990-04-10 1990-04-10 配線パターン欠陥検出方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2093036A JPH02297198A (ja) 1990-04-10 1990-04-10 配線パターン欠陥検出方法及び装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP1127793A Division JPH0235576A (ja) 1989-05-23 1989-05-23 配線パターン欠陥検出方法及び装置

Publications (2)

Publication Number Publication Date
JPH02297198A true JPH02297198A (ja) 1990-12-07
JPH0580028B2 JPH0580028B2 (enrdf_load_stackoverflow) 1993-11-05

Family

ID=14071270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2093036A Granted JPH02297198A (ja) 1990-04-10 1990-04-10 配線パターン欠陥検出方法及び装置

Country Status (1)

Country Link
JP (1) JPH02297198A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001075800A1 (fr) * 2000-03-30 2001-10-11 Kokusai Gijutsu Kaihatsu Kabushiki Kaisha Dispositif d'inspection de motif

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192945A (ja) * 1983-04-15 1984-11-01 Hitachi Ltd 配線パターン欠陥検出方法及びその装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192945A (ja) * 1983-04-15 1984-11-01 Hitachi Ltd 配線パターン欠陥検出方法及びその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001075800A1 (fr) * 2000-03-30 2001-10-11 Kokusai Gijutsu Kaihatsu Kabushiki Kaisha Dispositif d'inspection de motif

Also Published As

Publication number Publication date
JPH0580028B2 (enrdf_load_stackoverflow) 1993-11-05

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