JPH0229269Y2 - - Google Patents

Info

Publication number
JPH0229269Y2
JPH0229269Y2 JP1983169910U JP16991083U JPH0229269Y2 JP H0229269 Y2 JPH0229269 Y2 JP H0229269Y2 JP 1983169910 U JP1983169910 U JP 1983169910U JP 16991083 U JP16991083 U JP 16991083U JP H0229269 Y2 JPH0229269 Y2 JP H0229269Y2
Authority
JP
Japan
Prior art keywords
spacer
spacers
outer cylinder
base
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983169910U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6077795U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983169910U priority Critical patent/JPS6077795U/ja
Publication of JPS6077795U publication Critical patent/JPS6077795U/ja
Application granted granted Critical
Publication of JPH0229269Y2 publication Critical patent/JPH0229269Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1983169910U 1983-10-31 1983-10-31 タ−ボ分子ポンプ Granted JPS6077795U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983169910U JPS6077795U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983169910U JPS6077795U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6077795U JPS6077795U (ja) 1985-05-30
JPH0229269Y2 true JPH0229269Y2 (enrdf_load_stackoverflow) 1990-08-06

Family

ID=30371068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983169910U Granted JPS6077795U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6077795U (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
JP2000064986A (ja) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd ターボ分子ポンプ
JP6586275B2 (ja) * 2015-01-30 2019-10-02 エドワーズ株式会社 真空ポンプ
JP7668612B2 (ja) * 2018-08-08 2025-04-25 エドワーズ株式会社 真空ポンプ
JP7596936B2 (ja) * 2021-06-02 2024-12-10 株式会社島津製作所 真空ポンプおよびリークディテクタ
JP7490615B2 (ja) 2021-06-14 2024-05-27 株式会社東芝 ディスク装置およびディスク装置の製造方法

Also Published As

Publication number Publication date
JPS6077795U (ja) 1985-05-30

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