JPH0229259Y2 - - Google Patents
Info
- Publication number
- JPH0229259Y2 JPH0229259Y2 JP7614786U JP7614786U JPH0229259Y2 JP H0229259 Y2 JPH0229259 Y2 JP H0229259Y2 JP 7614786 U JP7614786 U JP 7614786U JP 7614786 U JP7614786 U JP 7614786U JP H0229259 Y2 JPH0229259 Y2 JP H0229259Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- stage
- exhaust
- chamber
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004891 communication Methods 0.000 claims description 14
- 238000005086 pumping Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 18
- 238000005192 partition Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7614786U JPH0229259Y2 (zh) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7614786U JPH0229259Y2 (zh) | 1986-05-20 | 1986-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62188567U JPS62188567U (zh) | 1987-12-01 |
| JPH0229259Y2 true JPH0229259Y2 (zh) | 1990-08-06 |
Family
ID=30922954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7614786U Expired JPH0229259Y2 (zh) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229259Y2 (zh) |
-
1986
- 1986-05-20 JP JP7614786U patent/JPH0229259Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62188567U (zh) | 1987-12-01 |
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