JPH0229234Y2 - - Google Patents

Info

Publication number

JPH0229234Y2

JPH0229234Y2 JP1985004636U JP463685U JPH0229234Y2 JP H0229234 Y2 JPH0229234 Y2 JP H0229234Y2 JP 1985004636 U JP1985004636 U JP 1985004636U JP 463685 U JP463685 U JP 463685U JP H0229234 Y2 JPH0229234 Y2 JP H0229234Y2

Authority

JP

Japan

Prior art keywords

sub

chamber

fitting

press

recess

Prior art date

1985-01-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
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• 239000000470 constituent Substances 0.000 claims description 23
• 239000000919 ceramic Substances 0.000 claims description 5
• 229910052751 metal Inorganic materials 0.000 claims description 5
• 239000002184 metal Substances 0.000 claims description 5
• 238000007789 sealing Methods 0.000 description 6
• 230000000694 effects Effects 0.000 description 3
• 229910000838 Al alloy Inorganic materials 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 229910052799 carbon Inorganic materials 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 238000003754 machining Methods 0.000 description 1
• 230000002093 peripheral effect Effects 0.000 description 1