JPH0229195B2 - - Google Patents
Info
- Publication number
- JPH0229195B2 JPH0229195B2 JP58126916A JP12691683A JPH0229195B2 JP H0229195 B2 JPH0229195 B2 JP H0229195B2 JP 58126916 A JP58126916 A JP 58126916A JP 12691683 A JP12691683 A JP 12691683A JP H0229195 B2 JPH0229195 B2 JP H0229195B2
- Authority
- JP
- Japan
- Prior art keywords
- guide
- moving
- movable table
- fluid supply
- moving table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58126916A JPS6020513A (ja) | 1983-07-14 | 1983-07-14 | 移動テーブルの姿勢制御方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58126916A JPS6020513A (ja) | 1983-07-14 | 1983-07-14 | 移動テーブルの姿勢制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6020513A JPS6020513A (ja) | 1985-02-01 |
| JPH0229195B2 true JPH0229195B2 (cs) | 1990-06-28 |
Family
ID=14947064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58126916A Granted JPS6020513A (ja) | 1983-07-14 | 1983-07-14 | 移動テーブルの姿勢制御方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6020513A (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6320848A (ja) * | 1986-07-15 | 1988-01-28 | Canon Inc | 位置決め装置 |
| JP2631396B2 (ja) * | 1988-10-28 | 1997-07-16 | キヤノン株式会社 | 静圧気体軸受ｘｙステージ |
| JP3809268B2 (ja) | 1997-12-19 | 2006-08-16 | キヤノン株式会社 | デバイス製造方法 |
-
1983
- 1983-07-14 JP JP58126916A patent/JPS6020513A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6020513A (ja) | 1985-02-01 |
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