JPH022839B2 - - Google Patents

Info

Publication number
JPH022839B2
JPH022839B2 JP59166842A JP16684284A JPH022839B2 JP H022839 B2 JPH022839 B2 JP H022839B2 JP 59166842 A JP59166842 A JP 59166842A JP 16684284 A JP16684284 A JP 16684284A JP H022839 B2 JPH022839 B2 JP H022839B2
Authority
JP
Japan
Prior art keywords
carbon
silicon single
crucible
single crystal
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59166842A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144791A (ja
Inventor
Mitsuhiro Yamato
Nagateru Uyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP16684284A priority Critical patent/JPS6144791A/ja
Publication of JPS6144791A publication Critical patent/JPS6144791A/ja
Publication of JPH022839B2 publication Critical patent/JPH022839B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16684284A 1984-08-09 1984-08-09 シリコン単結晶引上装置の炭素ルツボ Granted JPS6144791A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16684284A JPS6144791A (ja) 1984-08-09 1984-08-09 シリコン単結晶引上装置の炭素ルツボ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16684284A JPS6144791A (ja) 1984-08-09 1984-08-09 シリコン単結晶引上装置の炭素ルツボ

Publications (2)

Publication Number Publication Date
JPS6144791A JPS6144791A (ja) 1986-03-04
JPH022839B2 true JPH022839B2 (enrdf_load_stackoverflow) 1990-01-19

Family

ID=15838658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16684284A Granted JPS6144791A (ja) 1984-08-09 1984-08-09 シリコン単結晶引上装置の炭素ルツボ

Country Status (1)

Country Link
JP (1) JPS6144791A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4962414B2 (ja) * 2008-05-28 2012-06-27 富士電機株式会社 パワー電子機器
JP4918130B2 (ja) 2009-12-11 2012-04-18 シルトロニック・ジャパン株式会社 黒鉛ルツボ及びシリコン単結晶製造装置
CN102206855A (zh) * 2010-03-29 2011-10-05 上海杰姆斯电子材料有限公司 直拉单晶炉石墨坩埚

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140392A (ja) * 1982-02-16 1983-08-20 Komatsu Denshi Kinzoku Kk シリコン単結晶引上方法およびその装置

Also Published As

Publication number Publication date
JPS6144791A (ja) 1986-03-04

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