JPH0227432B2 - - Google Patents

Info

Publication number
JPH0227432B2
JPH0227432B2 JP59274500A JP27450084A JPH0227432B2 JP H0227432 B2 JPH0227432 B2 JP H0227432B2 JP 59274500 A JP59274500 A JP 59274500A JP 27450084 A JP27450084 A JP 27450084A JP H0227432 B2 JPH0227432 B2 JP H0227432B2
Authority
JP
Japan
Prior art keywords
ionization
filament
evaporation source
repeller
vapor flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59274500A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61157676A (ja
Inventor
Akira Doyataka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP59274500A priority Critical patent/JPS61157676A/ja
Publication of JPS61157676A publication Critical patent/JPS61157676A/ja
Publication of JPH0227432B2 publication Critical patent/JPH0227432B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Microwave Tubes (AREA)
JP59274500A 1984-12-28 1984-12-28 イオン化機構 Granted JPS61157676A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59274500A JPS61157676A (ja) 1984-12-28 1984-12-28 イオン化機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59274500A JPS61157676A (ja) 1984-12-28 1984-12-28 イオン化機構

Publications (2)

Publication Number Publication Date
JPS61157676A JPS61157676A (ja) 1986-07-17
JPH0227432B2 true JPH0227432B2 (enrdf_load_stackoverflow) 1990-06-18

Family

ID=17542553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59274500A Granted JPS61157676A (ja) 1984-12-28 1984-12-28 イオン化機構

Country Status (1)

Country Link
JP (1) JPS61157676A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2719528B2 (ja) * 1988-07-14 1998-02-25 東京エレクトロン株式会社 イオン注入装置
JP2011041947A (ja) * 2003-11-25 2011-03-03 Panasonic Electric Works Co Ltd 改質方法および改質装置
JP4416632B2 (ja) 2004-12-03 2010-02-17 キヤノン株式会社 ガスクラスターイオンビーム照射装置およびガスクラスターのイオン化方法

Also Published As

Publication number Publication date
JPS61157676A (ja) 1986-07-17

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