JPH0227015B2 - - Google Patents
Info
- Publication number
- JPH0227015B2 JPH0227015B2 JP27755985A JP27755985A JPH0227015B2 JP H0227015 B2 JPH0227015 B2 JP H0227015B2 JP 27755985 A JP27755985 A JP 27755985A JP 27755985 A JP27755985 A JP 27755985A JP H0227015 B2 JPH0227015 B2 JP H0227015B2
- Authority
- JP
- Japan
- Prior art keywords
- door
- clean air
- main body
- air
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27755985A JPS62136248A (ja) | 1985-12-10 | 1985-12-10 | 無塵恒温槽 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27755985A JPS62136248A (ja) | 1985-12-10 | 1985-12-10 | 無塵恒温槽 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62136248A JPS62136248A (ja) | 1987-06-19 |
| JPH0227015B2 true JPH0227015B2 (https=) | 1990-06-14 |
Family
ID=17585208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27755985A Granted JPS62136248A (ja) | 1985-12-10 | 1985-12-10 | 無塵恒温槽 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62136248A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2644534B2 (ja) * | 1988-07-19 | 1997-08-25 | タバイエスペック株式会社 | 恒温器 |
| JP2535236Y2 (ja) * | 1989-10-24 | 1997-05-07 | 株式会社高見沢サイバネティックス | 恒温槽 |
-
1985
- 1985-12-10 JP JP27755985A patent/JPS62136248A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62136248A (ja) | 1987-06-19 |
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