JPH0226164B2 - - Google Patents

Info

Publication number
JPH0226164B2
JPH0226164B2 JP28460885A JP28460885A JPH0226164B2 JP H0226164 B2 JPH0226164 B2 JP H0226164B2 JP 28460885 A JP28460885 A JP 28460885A JP 28460885 A JP28460885 A JP 28460885A JP H0226164 B2 JPH0226164 B2 JP H0226164B2
Authority
JP
Japan
Prior art keywords
light
light beam
detection device
position detection
photoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28460885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62144014A (ja
Inventor
Juji Yuzunaka
Yoshiharu Kuwabara
Osamu Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP28460885A priority Critical patent/JPS62144014A/ja
Publication of JPS62144014A publication Critical patent/JPS62144014A/ja
Publication of JPH0226164B2 publication Critical patent/JPH0226164B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Automatic Focus Adjustment (AREA)
JP28460885A 1985-12-18 1985-12-18 光電式位置検出装置 Granted JPS62144014A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28460885A JPS62144014A (ja) 1985-12-18 1985-12-18 光電式位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28460885A JPS62144014A (ja) 1985-12-18 1985-12-18 光電式位置検出装置

Publications (2)

Publication Number Publication Date
JPS62144014A JPS62144014A (ja) 1987-06-27
JPH0226164B2 true JPH0226164B2 (de) 1990-06-07

Family

ID=17680657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28460885A Granted JPS62144014A (ja) 1985-12-18 1985-12-18 光電式位置検出装置

Country Status (1)

Country Link
JP (1) JPS62144014A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079369B2 (ja) * 1988-04-08 1995-02-01 三菱電機株式会社 膜厚測定装置
JPH02299418A (ja) * 1989-05-12 1990-12-11 Sumitomo Electric Ind Ltd Ｏｆケーブル線路
JPH0643683Y2 (ja) * 1989-10-12 1994-11-14 サンクス株式会社 エリアセンサ
JPH03196106A (ja) * 1989-12-26 1991-08-27 Olympus Optical Co Ltd カメラの焦点検出装置
JP3414439B2 (ja) * 1993-06-07 2003-06-09 オリンパス光学工業株式会社 距離測定装置
JP2011141142A (ja) * 2010-01-05 2011-07-21 Sharp Corp 測距センサおよび電子機器
EP3396308B1 (de) 2015-12-25 2022-02-02 Keyence Corporation Konfokaler verdrängungszähler

Also Published As

Publication number Publication date
JPS62144014A (ja) 1987-06-27

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