JPH0226161B2 - - Google Patents

Info

Publication number
JPH0226161B2
JPH0226161B2 JP2682784A JP2682784A JPH0226161B2 JP H0226161 B2 JPH0226161 B2 JP H0226161B2 JP 2682784 A JP2682784 A JP 2682784A JP 2682784 A JP2682784 A JP 2682784A JP H0226161 B2 JPH0226161 B2 JP H0226161B2
Authority
JP
Japan
Prior art keywords
signal
reflected
threshold value
detector
reference signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2682784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60170706A (ja
Inventor
Junpei Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP2682784A priority Critical patent/JPS60170706A/ja
Publication of JPS60170706A publication Critical patent/JPS60170706A/ja
Publication of JPH0226161B2 publication Critical patent/JPH0226161B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP2682784A 1984-02-15 1984-02-15 光学式表面変位検出回路 Granted JPS60170706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2682784A JPS60170706A (ja) 1984-02-15 1984-02-15 光学式表面変位検出回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2682784A JPS60170706A (ja) 1984-02-15 1984-02-15 光学式表面変位検出回路

Publications (2)

Publication Number Publication Date
JPS60170706A JPS60170706A (ja) 1985-09-04
JPH0226161B2 true JPH0226161B2 (it) 1990-06-07

Family

ID=12204100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2682784A Granted JPS60170706A (ja) 1984-02-15 1984-02-15 光学式表面変位検出回路

Country Status (1)

Country Link
JP (1) JPS60170706A (it)

Also Published As

Publication number Publication date
JPS60170706A (ja) 1985-09-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term