JPH0225496B2 - - Google Patents
Info
- Publication number
- JPH0225496B2 JPH0225496B2 JP56078736A JP7873681A JPH0225496B2 JP H0225496 B2 JPH0225496 B2 JP H0225496B2 JP 56078736 A JP56078736 A JP 56078736A JP 7873681 A JP7873681 A JP 7873681A JP H0225496 B2 JPH0225496 B2 JP H0225496B2
- Authority
- JP
- Japan
- Prior art keywords
- silicone rubber
- pattern
- ionizing radiation
- silicone
- groups
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/34—Imagewise removal by selective transfer, e.g. peeling away
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7873681A JPS57195251A (en) | 1981-05-26 | 1981-05-26 | Formation of picture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7873681A JPS57195251A (en) | 1981-05-26 | 1981-05-26 | Formation of picture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57195251A JPS57195251A (en) | 1982-11-30 |
| JPH0225496B2 true JPH0225496B2 (enExample) | 1990-06-04 |
Family
ID=13670165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7873681A Granted JPS57195251A (en) | 1981-05-26 | 1981-05-26 | Formation of picture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57195251A (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5146443B2 (enExample) * | 1973-11-19 | 1976-12-09 |
-
1981
- 1981-05-26 JP JP7873681A patent/JPS57195251A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57195251A (en) | 1982-11-30 |
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