JPH0224381B2 - - Google Patents
Info
- Publication number
- JPH0224381B2 JPH0224381B2 JP10719184A JP10719184A JPH0224381B2 JP H0224381 B2 JPH0224381 B2 JP H0224381B2 JP 10719184 A JP10719184 A JP 10719184A JP 10719184 A JP10719184 A JP 10719184A JP H0224381 B2 JPH0224381 B2 JP H0224381B2
- Authority
- JP
- Japan
- Prior art keywords
- adhesive tape
- protective film
- peeling
- article
- holding table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002390 adhesive tape Substances 0.000 claims description 42
- 230000001681 protective effect Effects 0.000 claims description 36
- 238000004804 winding Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000002313 adhesive film Substances 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10719184A JPS60250642A (ja) | 1984-05-25 | 1984-05-25 | 保護フイルムの剥離方法 |
| GB08416030A GB2157193B (en) | 1984-04-10 | 1984-06-22 | Process for peeling protective film off a thin article |
| US06/626,083 US4631103A (en) | 1984-04-10 | 1984-06-29 | Process for peeling protective film off a thin article |
| DE3425192A DE3425192C2 (de) | 1984-04-10 | 1984-07-09 | Verfahren und Vorrichtung zum Abziehen eines Schutzfilms von einem dünnen Gegenstand |
| FR8410999A FR2562528B1 (fr) | 1984-04-10 | 1984-07-11 | Procede pour decoller un film protecteur d'un objet mince et appareil pour sa mise en oeuvre |
| US06/900,952 US4732642A (en) | 1984-04-10 | 1986-08-27 | Apparatus for peeling protective film off a thin article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10719184A JPS60250642A (ja) | 1984-05-25 | 1984-05-25 | 保護フイルムの剥離方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60250642A JPS60250642A (ja) | 1985-12-11 |
| JPH0224381B2 true JPH0224381B2 (enrdf_load_stackoverflow) | 1990-05-29 |
Family
ID=14452775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10719184A Granted JPS60250642A (ja) | 1984-04-10 | 1984-05-25 | 保護フイルムの剥離方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60250642A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0281456A (ja) * | 1988-09-16 | 1990-03-22 | Nitto Denko Corp | 保護フィルムの剥離方法 |
| US6149758A (en) * | 1997-06-20 | 2000-11-21 | Lintec Corporation | Sheet removing apparatus and method |
| KR100518296B1 (ko) * | 1998-09-30 | 2005-11-25 | 삼성전자주식회사 | 분리형 보호시트 이송유닛을 가지는 본딩장치 |
| JP5113621B2 (ja) * | 2008-05-14 | 2013-01-09 | リンテック株式会社 | シート剥離装置及び剥離方法 |
-
1984
- 1984-05-25 JP JP10719184A patent/JPS60250642A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60250642A (ja) | 1985-12-11 |
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