JPH02238957A - サーマルヘッド - Google Patents

サーマルヘッド

Info

Publication number
JPH02238957A
JPH02238957A JP1699390A JP1699390A JPH02238957A JP H02238957 A JPH02238957 A JP H02238957A JP 1699390 A JP1699390 A JP 1699390A JP 1699390 A JP1699390 A JP 1699390A JP H02238957 A JPH02238957 A JP H02238957A
Authority
JP
Japan
Prior art keywords
carbon
film
substrate
layer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1699390A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512152B2 (enExample
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP1699390A priority Critical patent/JPH02238957A/ja
Publication of JPH02238957A publication Critical patent/JPH02238957A/ja
Publication of JPH0512152B2 publication Critical patent/JPH0512152B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electronic Switches (AREA)
JP1699390A 1990-01-26 1990-01-26 サーマルヘッド Granted JPH02238957A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1699390A JPH02238957A (ja) 1990-01-26 1990-01-26 サーマルヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1699390A JPH02238957A (ja) 1990-01-26 1990-01-26 サーマルヘッド

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP22938687A Division JPS6379972A (ja) 1987-09-12 1987-09-12 炭素被膜

Publications (2)

Publication Number Publication Date
JPH02238957A true JPH02238957A (ja) 1990-09-21
JPH0512152B2 JPH0512152B2 (enExample) 1993-02-17

Family

ID=11931547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1699390A Granted JPH02238957A (ja) 1990-01-26 1990-01-26 サーマルヘッド

Country Status (1)

Country Link
JP (1) JPH02238957A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100404270C (zh) * 2005-05-31 2008-07-23 哈尔滨工业大学 热敏打印头的非晶金刚石耐磨保护层及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4978898A (enExample) * 1972-12-09 1974-07-30
JPS5511850A (en) * 1978-07-11 1980-01-28 Mitsubishi Electric Corp Thermal head
JPS55154189A (en) * 1979-05-18 1980-12-01 Mitsubishi Electric Corp Heat-sensitive head
JPS5842472A (ja) * 1981-09-07 1983-03-11 Semiconductor Energy Lab Co Ltd サ−マルヘツド

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4978898A (enExample) * 1972-12-09 1974-07-30
JPS5511850A (en) * 1978-07-11 1980-01-28 Mitsubishi Electric Corp Thermal head
JPS55154189A (en) * 1979-05-18 1980-12-01 Mitsubishi Electric Corp Heat-sensitive head
JPS5842472A (ja) * 1981-09-07 1983-03-11 Semiconductor Energy Lab Co Ltd サ−マルヘツド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100404270C (zh) * 2005-05-31 2008-07-23 哈尔滨工业大学 热敏打印头的非晶金刚石耐磨保护层及其制备方法

Also Published As

Publication number Publication date
JPH0512152B2 (enExample) 1993-02-17

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