JPH0222417Y2 - - Google Patents
Info
- Publication number
- JPH0222417Y2 JPH0222417Y2 JP15020683U JP15020683U JPH0222417Y2 JP H0222417 Y2 JPH0222417 Y2 JP H0222417Y2 JP 15020683 U JP15020683 U JP 15020683U JP 15020683 U JP15020683 U JP 15020683U JP H0222417 Y2 JPH0222417 Y2 JP H0222417Y2
- Authority
- JP
- Japan
- Prior art keywords
- floor
- base block
- floor slab
- slab
- bolts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 10
- 238000002955 isolation Methods 0.000 claims description 6
- 238000004378 air conditioning Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Floor Finish (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15020683U JPS6057642U (ja) | 1983-09-27 | 1983-09-27 | クリ−ンル−ム用防振床 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15020683U JPS6057642U (ja) | 1983-09-27 | 1983-09-27 | クリ−ンル−ム用防振床 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6057642U JPS6057642U (ja) | 1985-04-22 |
| JPH0222417Y2 true JPH0222417Y2 (ko) | 1990-06-18 |
Family
ID=30333210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15020683U Granted JPS6057642U (ja) | 1983-09-27 | 1983-09-27 | クリ−ンル−ム用防振床 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6057642U (ko) |
-
1983
- 1983-09-27 JP JP15020683U patent/JPS6057642U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6057642U (ja) | 1985-04-22 |
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