JPH0220831Y2 - - Google Patents

Info

Publication number
JPH0220831Y2
JPH0220831Y2 JP1986093272U JP9327286U JPH0220831Y2 JP H0220831 Y2 JPH0220831 Y2 JP H0220831Y2 JP 1986093272 U JP1986093272 U JP 1986093272U JP 9327286 U JP9327286 U JP 9327286U JP H0220831 Y2 JPH0220831 Y2 JP H0220831Y2
Authority
JP
Japan
Prior art keywords
boat
wafer
diffusion
wafers
wafer boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986093272U
Other languages
English (en)
Japanese (ja)
Other versions
JPS631324U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986093272U priority Critical patent/JPH0220831Y2/ja
Publication of JPS631324U publication Critical patent/JPS631324U/ja
Application granted granted Critical
Publication of JPH0220831Y2 publication Critical patent/JPH0220831Y2/ja
Expired legal-status Critical Current

Links

JP1986093272U 1986-06-20 1986-06-20 Expired JPH0220831Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986093272U JPH0220831Y2 (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986093272U JPH0220831Y2 (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Publications (2)

Publication Number Publication Date
JPS631324U JPS631324U (enrdf_load_stackoverflow) 1988-01-07
JPH0220831Y2 true JPH0220831Y2 (enrdf_load_stackoverflow) 1990-06-06

Family

ID=30955717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986093272U Expired JPH0220831Y2 (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Country Status (1)

Country Link
JP (1) JPH0220831Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52143760A (en) * 1976-05-26 1977-11-30 Hitachi Ltd Quartz tube in heat treatment furnace

Also Published As

Publication number Publication date
JPS631324U (enrdf_load_stackoverflow) 1988-01-07

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