JPS631324U - - Google Patents

Info

Publication number
JPS631324U
JPS631324U JP9327286U JP9327286U JPS631324U JP S631324 U JPS631324 U JP S631324U JP 9327286 U JP9327286 U JP 9327286U JP 9327286 U JP9327286 U JP 9327286U JP S631324 U JPS631324 U JP S631324U
Authority
JP
Japan
Prior art keywords
boat
wafer boat
diffusion furnace
wafer
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9327286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220831Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986093272U priority Critical patent/JPH0220831Y2/ja
Publication of JPS631324U publication Critical patent/JPS631324U/ja
Application granted granted Critical
Publication of JPH0220831Y2 publication Critical patent/JPH0220831Y2/ja
Expired legal-status Critical Current

Links

JP1986093272U 1986-06-20 1986-06-20 Expired JPH0220831Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986093272U JPH0220831Y2 (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986093272U JPH0220831Y2 (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Publications (2)

Publication Number Publication Date
JPS631324U true JPS631324U (enrdf_load_stackoverflow) 1988-01-07
JPH0220831Y2 JPH0220831Y2 (enrdf_load_stackoverflow) 1990-06-06

Family

ID=30955717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986093272U Expired JPH0220831Y2 (enrdf_load_stackoverflow) 1986-06-20 1986-06-20

Country Status (1)

Country Link
JP (1) JPH0220831Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52143760A (en) * 1976-05-26 1977-11-30 Hitachi Ltd Quartz tube in heat treatment furnace

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52143760A (en) * 1976-05-26 1977-11-30 Hitachi Ltd Quartz tube in heat treatment furnace

Also Published As

Publication number Publication date
JPH0220831Y2 (enrdf_load_stackoverflow) 1990-06-06

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