JPH0220823Y2 - - Google Patents

Info

Publication number

JPH0220823Y2

JPH0220823Y2 JP1031486U JP1031486U JPH0220823Y2 JP H0220823 Y2 JPH0220823 Y2 JP H0220823Y2 JP 1031486 U JP1031486 U JP 1031486U JP 1031486 U JP1031486 U JP 1031486U JP H0220823 Y2 JPH0220823 Y2 JP H0220823Y2

Authority

JP

Japan

Prior art keywords

substrate

support

holder

support rod

center

Prior art date

1986-01-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
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• 239000000758 substrate Substances 0.000 claims description 66
• 239000007788 liquid Substances 0.000 claims description 25
• 239000007921 spray Substances 0.000 claims description 13
• 238000000034 method Methods 0.000 description 8
• 238000011161 development Methods 0.000 description 5
• 238000005530 etching Methods 0.000 description 5
• 238000009434 installation Methods 0.000 description 5
• 229920002120 photoresistant polymer Polymers 0.000 description 5
• 230000000694 effects Effects 0.000 description 4
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
• BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 3
• 238000004140 cleaning Methods 0.000 description 2
• 238000000576 coating method Methods 0.000 description 2
• 238000004891 communication Methods 0.000 description 2
• 238000005260 corrosion Methods 0.000 description 2
• 230000007797 corrosion Effects 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 230000002411 adverse Effects 0.000 description 1
• 229910052804 chromium Inorganic materials 0.000 description 1
• 239000011651 chromium Substances 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 230000008878 coupling Effects 0.000 description 1
• 238000010168 coupling process Methods 0.000 description 1
• 238000005859 coupling reaction Methods 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 239000000126 substance Substances 0.000 description 1