JPH02202422A - Sealing device of resin - Google Patents

Sealing device of resin

Info

Publication number
JPH02202422A
JPH02202422A JP2168389A JP2168389A JPH02202422A JP H02202422 A JPH02202422 A JP H02202422A JP 2168389 A JP2168389 A JP 2168389A JP 2168389 A JP2168389 A JP 2168389A JP H02202422 A JPH02202422 A JP H02202422A
Authority
JP
Japan
Prior art keywords
mold
molded product
resin
cavity
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2168389A
Other languages
Japanese (ja)
Inventor
Takashi Ono
隆 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2168389A priority Critical patent/JPH02202422A/en
Publication of JPH02202422A publication Critical patent/JPH02202422A/en
Pending legal-status Critical Current

Links

Landscapes

  • Moulds For Moulding Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To constitute the above device so that reliability on a molded product is not spoiled, by a method wherein at the time of mold clamping, a material to be sealed is held within a mold so that the material does not abuts against an ejection mechanism and at the time of mold clamping, the material is ejected into a casting part of resin and the molded product is extruded from the casting part of the resin. CONSTITUTION:A material to be sealed is set onto a bottom force 2. In this instance, a knockout pin 8 is held already within a top force 1 with operation of a hydraulic press 20 and not ejected into a cavity 7. Then mold clamping is performed by raising the bottom force 2. Then casting of resin within the cavity 7 is performed. Then when a molded product is completed by performing molding cure of the resin, the bottom force 2 is lowered and mold breaking is started. Then since the knockout pin 8 is ejected into the cavity 7 with strong force and the molded product in the cavity 7 is pushed down strongly, the molded product in the cavity 7 is released smooth and arranged on the bottom force 2. Finally, the knockout pin 8 is held within the top force 1 and a procedure is performed until the knockout pin 8 arrives at a state where the same does not eject within the cavity 7.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は主に半導体樹脂封止に使用する樹脂封止装置
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a resin encapsulation device mainly used for resin encapsulation of semiconductors.

〔従来の技術〕[Conventional technology]

第4図〜第7図は従来のトランスファモールド装置によ
る樹脂封1動作を示す断面図である。
4 to 7 are cross-sectional views showing the operation of the resin seal 1 by a conventional transfer molding device.

以下、これらの図を参照しつつ、樹脂封止動作の説明を
する。
Hereinafter, the resin sealing operation will be explained with reference to these figures.

第4図は、樹脂封止材はブト時を示している。FIG. 4 shows the resin sealing material when it is not present.

同図において、1は上金型、2は図示しないh8圧ブレ
スにより上下動作可能な下金型であり、下金型2上に被
封止材3がセットされている。被封止材3は半導体装置
であり、フレーム3a、半導体チップ3b、インナーリ
ード3cから構成されており、このような被封止材3と
しては、例えば第8図で示寸ようなMP−3外形トラン
ジスタ30がある。なお、第8図で示したMP−3外形
トランジスタ30は、エポキシ樹脂11により既に樹脂
封止されている成形品を示している。なお、12は後述
するノックアウトビンの突き出しによる跡である。
In the figure, 1 is an upper mold, 2 is a lower mold that can be moved up and down by an h8 pressure press (not shown), and a material to be sealed 3 is set on the lower mold 2. The material to be sealed 3 is a semiconductor device, and is composed of a frame 3a, a semiconductor chip 3b, and an inner lead 3c.The material to be sealed 3 is, for example, an MP-3 as shown in FIG. There is an external transistor 30. Note that the MP-3 external transistor 30 shown in FIG. 8 is a molded product that has already been resin-sealed with the epoxy resin 11. Note that 12 is a mark caused by the knockout bottle, which will be described later.

上金型1は、リターンプレート4にバネ装着ビン5を介
して吊り下げられており、バネ装着ビン5に装着したバ
ネ6の弾力により、リターンプレート4と上金型1との
通常時の位置関係は第4図に示すように固定されている
。また、上金型1の下部には、樹脂注入部であるキャビ
ティ7が設けられている。
The upper mold 1 is suspended from the return plate 4 via a spring attachment pin 5, and the normal position of the return plate 4 and the upper mold 1 is maintained by the elasticity of the spring 6 attached to the spring attachment pin 5. The relationship is fixed as shown in FIG. Further, a cavity 7 which is a resin injection part is provided in the lower part of the upper mold 1.

リターンプレート4下面から下方にかけて、各キャビテ
ィ7に対応する領域に1つずつノックアウトビン8が設
けられている。また、下方に上金型1の存在しないリタ
ーンプレート4の下面(通常、下金型2の4隅に対応し
たリターンプレート4の下面)から下方にかけて上金型
1の厚みより長いリターンビン9が設けられている。
One knockout bin 8 is provided in a region corresponding to each cavity 7 from the lower surface of the return plate 4 downward. In addition, a return bin 9 that is longer than the thickness of the upper mold 1 extends downward from the lower surface of the return plate 4 where the upper mold 1 is not present (usually the lower surface of the return plate 4 corresponding to the four corners of the lower mold 2). It is provided.

このような構成において、第4図で示した樹脂封止材3
のセット時は、上金型1.下金型2共に固定されおり、
この時、ノックアウトビン8は上金型1のキャビティ7
内に突出している。
In such a configuration, the resin sealing material 3 shown in FIG.
When setting the upper mold 1. The lower mold 2 is fixed together,
At this time, the knockout bin 8 is inserted into the cavity 7 of the upper mold 1.
protrudes inward.

この状態から下金型2を油圧プレスの駆動により上昇さ
せることで型締めが行われる。この型締めが完了する以
前に、リターンビン9の下面が下金型2に当たり、以降
、下金型2の上昇に伴いリターンビン9も上昇する。し
たがって、このリターンビン9に機械的連動したリター
ンプレート4及びノックアウトビン8も上昇する。
Mold clamping is performed by raising the lower mold 2 from this state by driving a hydraulic press. Before this mold clamping is completed, the lower surface of the return bin 9 hits the lower mold 2, and thereafter, as the lower mold 2 rises, the return bin 9 also rises. Therefore, the return plate 4 and the knockout bin 8, which are mechanically interlocked with the return bin 9, also rise.

そして、型締めが完了すると、第5図に示すように、ノ
ックアウトビン8はほとんど上金型1内に収納される状
態にまで上昇する。
When the mold clamping is completed, the knockout bin 8 is raised to a state where it is almost housed in the upper mold 1, as shown in FIG.

次に、第6図に示すように、キャビティ7内に加熱可塑
させたエポキシ樹脂11を充填し、熱と圧力によりモー
ルド硬化させて被封止材3を樹脂封止し成形品を製造す
る。
Next, as shown in FIG. 6, the cavity 7 is filled with a heat-plasticized epoxy resin 11, and the mold is cured by heat and pressure to seal the material 3 to be sealed with the resin to produce a molded product.

成形品製造後、再度油圧プレスを作動させ、下金型2を
下降させ型開きを始める。この下金型2の下降に伴い、
リターンビン9も下降する。そして、このリターンビン
9に機械的に連動したノックアウトビン8は下降しよう
とし、さらに、バネ6の復元力も加わるため、キャビテ
ィ7内の樹脂11を強く押し下げる。その結果、キャビ
ティ7内の成形品15がスムーズに離型され、第7図に
示すように、下金型2上に配置される。
After manufacturing the molded product, the hydraulic press is operated again, the lower mold 2 is lowered, and mold opening begins. As the lower mold 2 descends,
The return bin 9 also descends. The knockout bin 8 mechanically interlocked with the return bin 9 attempts to descend, and the restoring force of the spring 6 is also applied, so that the resin 11 in the cavity 7 is strongly pushed down. As a result, the molded product 15 in the cavity 7 is smoothly released from the mold and placed on the lower mold 2 as shown in FIG.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来のトランスファモールド装置は以上のように構成さ
れており、型締め時に下金型2の動きに連りjして、キ
ャピテイ7内に突き出したノックアウトビン8を上金型
1内に収納させていた。つまり、完全にノックアウトビ
ン8が上金型内に収納されるのは、型締め完了時であっ
た。
The conventional transfer molding device is constructed as described above, and the knockout bin 8 protruding into the cavity 7 is housed in the upper mold 1 as the lower mold 2 moves during mold clamping. Ta. In other words, the knockout bin 8 was completely housed in the upper mold when the mold clamping was completed.

このため、被封止材セット時から型締め完了時までの間
は、製造時に生じた被封止材の変形、油圧プレスのオン
、オフ時に生じる@動による被封止材のはずみ、あるい
は第9図に示すように、高温の下金型2の熱による被封
止材のソリ等により、まだ完全に上金型1に収納されて
いないノックアウトビン8が被封止材3に当たる可能性
が多分にある。
Therefore, from the time the material to be sealed is set until the mold clamping is completed, the material to be sealed is deformed during manufacturing, the momentum of the material due to the @ movement that occurs when the hydraulic press is turned on and off, or the As shown in Fig. 9, there is a possibility that the knockout bottle 8, which is not yet completely housed in the upper mold 1, will hit the material to be sealed 3 due to warping of the material to be sealed due to the heat of the high temperature lower mold 2. Most likely.

ノックアウトビン8が被封止材3に当たると、被封止材
3の半導体チップ3bの破壊、インナーリード3Cの変
形等の製品の特性を劣化させる現象が起こるため、樹脂
封止した成形品の信頼性を著しく低下させてしまう問題
点があった。
When the knockout bottle 8 hits the material 3 to be sealed, phenomena such as destruction of the semiconductor chip 3b of the material 3 to be sealed and deformation of the inner leads 3C occur, which deteriorate the characteristics of the product. There was a problem that the performance was significantly reduced.

この発明は上記のような問題点を解決するためになされ
たもので、成形品の信頼性を損ねることのない樹脂封止
装置を得ることを目的とする。
This invention was made to solve the above problems, and aims to provide a resin sealing device that does not impair the reliability of molded products.

〔課題を解決するための手段〕[Means to solve the problem]

この発明にか、かる樹脂封止装置は、樹脂注入部を有し
、該樹脂注入部において型締め時に被封止材の樹脂封止
を行い成形品を形成する成形金型と、前記成形金型内に
収納され、前記樹脂注入部に突き出し可能な突き出し機
構と、前記成形金型に型開きおよび型締め動作を行わせ
る第1の駆動手段と、前記第1の駆!ll装置と独立し
て動作可能で、前記突ぎ出し機構の前記樹脂注入部への
突き出し及び前記成形金型内への収納を行わせる第2の
駆動手段と、前記第1及び第2の駆動手段を制御し、成
形品形成前の前記成形金型の型締め時には、前記被封止
材が前記突き出し機構に当接しないように航記突き出し
機構を前記成形金型内に収納させるとともに、成形品形
成後の前記成形金型の型間ぎ時には、前記突き出し機構
を前記樹脂注入部へ突き出させて前記成形品を前記樹脂
注入部から押し出す制御手段とを備えている。
According to the present invention, the resin sealing device has a resin injection part, and a mold for forming a molded product by sealing a material to be sealed with resin during mold clamping in the resin injection part, and a mold for forming a molded product. an ejecting mechanism housed in a mold and capable of ejecting into the resin injection section; a first driving means for causing the molding die to perform mold opening and mold clamping operations; a second driving means operable independently of the ll device and causing the ejection mechanism to eject into the resin injection part and accommodate in the mold; and the first and second drives. When the molding die is clamped before forming a molded product, the ejecting mechanism is housed in the molding die so that the material to be sealed does not come into contact with the ejecting mechanism, and the ejecting mechanism is The molding apparatus further includes a control means for causing the ejecting mechanism to protrude into the resin injection part to extrude the molded product from the resin injection part when the molding die is separated from the mold after the product is formed.

〔作用〕[Effect]

この発明における制御手段は、第1及び第2の駆動手段
を制御し、成形品形成前の前記成形金型の型締め時には
、前記被封止材が前記突き出し機構に当接しないように
前記突き出し機構を前記成形金型内に収納させるととも
に、成形品形成後の前記成形金型の型聞き時には、前記
突き出し機構を前記樹脂注入部への突き出させて前記成
形品を前記樹脂注入部から押し出すため、成形品形成前
の型締め時に突出し機構が被封止材に当接することはな
い。
The control means in this invention controls the first and second drive means, and when clamping the molding die before forming a molded product, the control means controls the ejection so that the material to be sealed does not come into contact with the ejection mechanism. A mechanism is housed in the molding die, and when the molding die is pressed after forming a molded product, the ejecting mechanism is caused to protrude into the resin injection part to push out the molded product from the resin injection part. , the protrusion mechanism does not come into contact with the material to be sealed during mold clamping before forming the molded product.

〔実施例〕〔Example〕

第1図はこの発明の一実施例であるトランスファモール
ド装置を示す断面図である。同図に示すように、リター
ンプレート4は従来より短くなったリターンビン9を介
して第2の油圧プレス20により、その上昇、下降が駆
動される。この第2の油圧プレス20は、下金型2を駆
動している第1の油圧プレス(図示せず)とは独立して
制御することができる。なお、他の構成は従来と同じで
あるため説明は省略する。
FIG. 1 is a sectional view showing a transfer molding apparatus which is an embodiment of the present invention. As shown in the figure, the return plate 4 is raised and lowered by a second hydraulic press 20 via a return bin 9 which is shorter than the conventional one. This second hydraulic press 20 can be controlled independently of the first hydraulic press (not shown) that drives the lower mold 2. Note that the other configurations are the same as the conventional one, so explanations will be omitted.

第2図は第1図で示したトランスファモールド装置によ
る樹脂封止動作を示すフローチャートである。なお、第
1の油圧プレス及び第2の油圧プレス20の制御は図示
しない制御装置によって行われる。
FIG. 2 is a flowchart showing the resin sealing operation by the transfer molding apparatus shown in FIG. Note that the first hydraulic press and the second hydraulic press 20 are controlled by a control device (not shown).

まず、ステップS1において、被封止材3を下金型2上
にセットする。このとき、既に、第2の油圧プレス20
の稼動によりノックアウトビン8は第1図に示すように
、上金型1内に収納されており、キャビティ7内に突出
していない。
First, in step S1, the material to be sealed 3 is set on the lower mold 2. At this time, the second hydraulic press 20
As a result of the operation, the knockout bin 8 is housed in the upper mold 1 and does not protrude into the cavity 7, as shown in FIG.

次に、ステップS2において、第1の油圧プレスの稼動
により、図示しない圧力スイッチで型締め完了がW1認
されるまで、下金型2を上昇させて型締めを行う。この
とぎ、既に、第2の油圧プレス20の稼動によりノック
アウトビン8は第1図に示すように、上金型1内に収納
されているため、被封止材3にソリが生じていても、第
3図に示すようにノックアウトビン8が半導体チップ3
b。
Next, in step S2, the lower mold 2 is raised and clamped by operating the first hydraulic press until completion of mold clamping is confirmed W1 by a pressure switch (not shown). At this point, the knockout bin 8 is already housed in the upper mold 1 due to the operation of the second hydraulic press 20, as shown in FIG. , as shown in FIG.
b.

インナーリード3Cに当たることなく、型締めが行われ
、型締め完了時にソリが矯正される。
The mold is clamped without hitting the inner lead 3C, and the warp is corrected upon completion of mold clamping.

そして、ステップS3において、キャビティ7内への樹
脂注入が行われる。樹脂注入後、注入圧力を圧力スイッ
チにより検知し、キャビティ7内の圧力を一定圧力下に
管理する。そして、この管理はタイマー設定時間経過後
に解かれる。
Then, in step S3, resin is injected into the cavity 7. After the resin is injected, the injection pressure is detected by a pressure switch, and the pressure inside the cavity 7 is controlled to a constant pressure. Then, this management is released after the timer setting time has elapsed.

その後、さらに一定時間が経過してPs−ビティ7内で
樹脂がモールド硬化して成形品が完成づ゛ると、ステッ
プS4で第1の油圧プレスによりπ金型2を下降させ、
型聞きを開始させる。この型開きのltl 9Mのタイ
ミングに同]v1シて第2の油圧プレス20を稼動させ
、リターンプレート4も下降させる。これに伴い、リタ
ーンプレー1・4と機械的連動されたノックアウトビン
8には下降しようとする力が働く。そして、バネ6の復
元力も加わることから、ノックアウトビン8は強い力で
キャビティ7内に突き出す。その結果、ノックアウトビ
ン8はキャビティ7内の成形品を強く押し下げるため、
キャビティ7内の成形品がスムーズに離型され、下金型
2上に配置される。
After that, after a certain period of time has elapsed and the resin hardens in the mold in the Ps-bitty 7 and the molded product is completed, in step S4 the π mold 2 is lowered by the first hydraulic press,
Start pattern listening. At the timing of this mold opening ltl 9M, the second hydraulic press 20 is operated and the return plate 4 is also lowered. Accordingly, a force is applied to the knockout bin 8, which is mechanically interlocked with the return plays 1 and 4, to try to lower it. Since the restoring force of the spring 6 is also added, the knockout bottle 8 is pushed into the cavity 7 with a strong force. As a result, the knockout bin 8 strongly pushes down the molded product in the cavity 7,
The molded product in the cavity 7 is smoothly released and placed on the lower mold 2.

1d後に、ステップS5で第2の油圧プレス20を稼動
させ、リターンプレート4を上昇させる。
After 1d, the second hydraulic press 20 is operated in step S5, and the return plate 4 is raised.

この上昇は、リターンプレート4に機械的連動したノッ
クアウトビン8が上金型1内に収納され、キS+ビティ
7内に突き出さない状態に達するまで行われる。
This elevation is continued until the knockout bin 8 mechanically interlocked with the return plate 4 is housed in the upper mold 1 and does not protrude into the hole 7.

このように、下金型2の上界、下降による型締め、型開
き動作と、リターンプレート4の上昇。
In this way, the upper limit of the lower mold 2, the mold clamping by lowering, the mold opening operation, and the raising of the return plate 4.

■降によるノックアウトビン8のキャビティ7への突き
出し、上金型1への収納動作とを別々の駆動装置く第1
の油1モプレス、第2の油圧プレス20)により行い、
型開き時のみノックアウトビン8のキャビティ7への突
き出しを行うように制御装置により制御したため、型締
め時にソリ等の生じた被封止材3がキャビティ7内のノ
ックアウトビン8に当たる可能性は全くなくなる。
■The operation of ejecting the knockout bin 8 into the cavity 7 due to falling and storing the knockout bin 8 into the upper mold 1 is performed by a separate drive device.
oil 1 mopress, second hydraulic press 20),
Since the control device controlled the knockout bin 8 to be ejected into the cavity 7 only when the mold is opened, there is no possibility that the material to be sealed 3 that has warped or the like will hit the knockout bin 8 in the cavity 7 when the mold is closed. .

その結果、型締め時に被封止材3の特性を劣化させる現
象が生じないため、樹脂封止した成形品の信頼性を損ね
ることはなくなる。
As a result, a phenomenon that deteriorates the characteristics of the material to be sealed 3 during mold clamping does not occur, so that the reliability of the resin-sealed molded product is not impaired.

なお、この実施例では、被封止材として半導体装置を例
に挙げたが、これに限定されず、型締め時にノックアウ
トビンに当たると信頼性を損ねる恐れのあるすべての被
封止材に適用できる。
In this example, a semiconductor device was used as an example of the material to be sealed, but the present invention is not limited to this, and can be applied to any material to be sealed that may impair reliability if it hits a knockout bottle during mold clamping. .

(発明の効果) 以上説明したように、この発明によれば、制御手段によ
り第1及び第2の駆動手段を制御し、成形品形成前の前
記成形金型の型締め時には、前記被封止材が前記突き出
し機構に当接しないように前記突き出し機構を前記成形
金型内に収納させるとともに、成形品形成後の前記成形
金型の型開き時には、前記突き出し機構を前記樹脂注入
部への突き出させて前記成形品を前記樹脂注入部から押
し出すため、成形品の信頼性を損ねることはない。
(Effects of the Invention) As explained above, according to the present invention, the first and second driving means are controlled by the control means, and when the molding die is clamped before forming the molded product, the sealed The ejecting mechanism is housed in the molding die so that the material does not come into contact with the ejecting mechanism, and when the molding die is opened after forming the molded product, the ejecting mechanism is ejected into the resin injection part. Since the molded product is extruded from the resin injection part in this manner, the reliability of the molded product is not impaired.

【図面の簡単な説明】 第1図はこの発明の一実施例であるトランスファモール
ド装置を示寸断面図、第2図は第1図で示したトランス
ファモールド装置の樹脂封止動作を示すフローチャート
、第3図は第1図で示したトランスファモールド装置の
効果を示す断面図、第4図〜第7図は従来のトランスフ
ァモールド装置の樹脂封止方法を示す断面図、第8図は
成形品の一例を示す斜視図、第9図は従来のトランスフ
ァモールド装置の問題点を指摘した断面図である。 図において、1は上金型、2は下金型、3は被封止材、
4はリターンプレート、7はキャビティ、8はノックア
ウトビン、20は第2の油圧プレスである。 なお、各図中同一符号は同一または相当部分を示す。
[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a sectional view showing a transfer molding device according to an embodiment of the present invention, and FIG. 2 is a flowchart showing the resin sealing operation of the transfer molding device shown in FIG. 1. Fig. 3 is a sectional view showing the effect of the transfer molding device shown in Fig. 1, Figs. FIG. 9 is a perspective view showing an example, and a sectional view showing problems of a conventional transfer molding device. In the figure, 1 is an upper mold, 2 is a lower mold, 3 is a material to be sealed,
4 is a return plate, 7 is a cavity, 8 is a knockout bin, and 20 is a second hydraulic press. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

【特許請求の範囲】[Claims] (1)樹脂注入部を有し、該樹脂注入部において型締め
時に被封止材の樹脂封止を行い成形品を形成する成形金
型と、 前記成形金型内に収納され、前記樹脂注入部に突き出し
可能な突き出し機構と、 前記成形金型に型開きおよび型締め動作を行わせる第1
の駆動手段と、 前記第1の駆動装置と独立して動作可能で、前記突き出
し機構の前記樹脂注入部への突き出し及び前記成形金型
内への収納を行わせる第2の駆動手段と、 前記第1及び第2の駆動手段を制御し、成形品形成前の
前記成形金型の型締め時には、前記被封止材が前記突き
出し機構に当接しないように前記突き出し機構を前記成
形金型内に収納させるとともに、成形品形成後の前記成
形金型の型開き時には、前記突き出し機構を前記樹脂注
入部へ突き出させて前記成形品を前記樹脂注入部から押
し出す制御手段とを備えた樹脂封止装置。
(1) A molding die having a resin injection part, in which a material to be sealed is sealed with resin during mold clamping to form a molded product; a first ejecting mechanism that allows the mold to eject into the mold;
a second driving means that is operable independently of the first driving device and causes the ejecting mechanism to eject into the resin injection part and to be accommodated in the molding die; The first and second driving means are controlled, and when the mold is clamped before forming a molded product, the ejecting mechanism is moved into the mold so that the material to be sealed does not come into contact with the ejecting mechanism. and a control means for causing the ejecting mechanism to protrude into the resin injection part to push out the molded product from the resin injection part when the mold is opened after forming the molded product. Device.
JP2168389A 1989-01-31 1989-01-31 Sealing device of resin Pending JPH02202422A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2168389A JPH02202422A (en) 1989-01-31 1989-01-31 Sealing device of resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2168389A JPH02202422A (en) 1989-01-31 1989-01-31 Sealing device of resin

Publications (1)

Publication Number Publication Date
JPH02202422A true JPH02202422A (en) 1990-08-10

Family

ID=12061862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2168389A Pending JPH02202422A (en) 1989-01-31 1989-01-31 Sealing device of resin

Country Status (1)

Country Link
JP (1) JPH02202422A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06315956A (en) * 1993-05-06 1994-11-15 Nec Corp Resin sealing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06315956A (en) * 1993-05-06 1994-11-15 Nec Corp Resin sealing device

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