JP3039188B2 - Electronic component manufacturing method - Google Patents

Electronic component manufacturing method

Info

Publication number
JP3039188B2
JP3039188B2 JP5063674A JP6367493A JP3039188B2 JP 3039188 B2 JP3039188 B2 JP 3039188B2 JP 5063674 A JP5063674 A JP 5063674A JP 6367493 A JP6367493 A JP 6367493A JP 3039188 B2 JP3039188 B2 JP 3039188B2
Authority
JP
Japan
Prior art keywords
substrate
resin
electronic component
mold
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5063674A
Other languages
Japanese (ja)
Other versions
JPH06275670A (en
Inventor
賢秀 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP5063674A priority Critical patent/JP3039188B2/en
Publication of JPH06275670A publication Critical patent/JPH06275670A/en
Application granted granted Critical
Publication of JP3039188B2 publication Critical patent/JP3039188B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、基板に搭載されたチッ
プを樹脂封止して得られる電子部品の製造方法に関する
ものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an electronic component obtained by sealing a chip mounted on a substrate with a resin.

【0002】[0002]

【従来の技術】基板にチップを搭載した後、モールドプ
レス装置により、このチップを保護するモールド体を形
成して電子部品を得ることが行われる。次に図7を参照
しながら、モールド体の成形方法を説明する。チップ1
が搭載された基板2を上型3と下型4の間に密閉したう
えで、ヒータにより加熱されて樹脂収納孔5内で溶融し
た溶融樹脂6をプランジャ7により押し上げながら、ゲ
ート溝8を通して基板2側へ圧送し、チップ1を包囲す
るキャビティ9に圧入して充填する。次いでこの溶融樹
脂を固化させた後、上型3と下型4を開いて、キャビテ
ィ9内で固化した樹脂(すなわちモールド体)をエジェ
クタピン10により下方から突き上げ、基板2を取り出
す。11はキャビティ9の内圧を測定する感圧素子、1
2は突き上げ板、13は突き上げロッドである。
2. Description of the Related Art After a chip is mounted on a substrate, a mold press device is used to form a molded body for protecting the chip to obtain an electronic component. Next, a method of forming a mold body will be described with reference to FIG. Chip 1
Is sealed between the upper mold 3 and the lower mold 4, and the molten resin 6 heated in the resin housing hole 5 and melted in the resin housing hole 5 is pushed up by the plunger 7 while passing through the gate groove 8. Then, it is pressure-fed to the side 2 and filled into the cavity 9 surrounding the chip 1 by press-fitting. Next, after the molten resin is solidified, the upper mold 3 and the lower mold 4 are opened, and the resin (that is, a molded body) solidified in the cavity 9 is pushed up from below by the ejector pins 10 to take out the substrate 2. 11 is a pressure-sensitive element for measuring the internal pressure of the cavity 9;
2 is a push-up plate and 13 is a push-up rod.

【0003】図8は、上型3と下型4の間から取り出さ
れた基板2に付着する樹脂の残滓(ゲート溝8内で固化
した樹脂で、カル、コールドスラグ等と呼ばれている)
6aを基板2から剥離して分離する様子を示している。
図示するように基板2の中央には、チップ1が搭載され
ている。このチップ1の周囲には、回路パターン14が
形成されており、更にこの回路パターン14を被うレジ
スト膜15が塗布されている。16はチップ1と回路パ
ターン14を接続するワイヤである。なおチップがフリ
ップチップやタブ(TAB)法により造られたチップの
場合は、ワイヤ16は不要である。6bはキャビティ9
内で樹脂が固化して出来たモールド体であり、チップ1
やワイヤ16を被覆して保護する。
FIG. 8 shows a residue of resin adhering to the substrate 2 taken out from between the upper die 3 and the lower die 4 (resin solidified in the gate groove 8 and called a cull, a cold slag, or the like).
6A illustrates a state in which 6a is separated from the substrate 2 and separated.
As shown, a chip 1 is mounted at the center of the substrate 2. A circuit pattern 14 is formed around the chip 1, and a resist film 15 covering the circuit pattern 14 is applied. Reference numeral 16 denotes a wire connecting the chip 1 and the circuit pattern 14. When the chip is a flip chip or a chip manufactured by a tab (TAB) method, the wire 16 is unnecessary. 6b is the cavity 9
Molded body formed by solidification of resin inside
And the wire 16 is covered and protected.

【0004】図示するように、カル6aを時計方向に回
転させることにより、基板2から剥離して分離する。と
ころがカル6aはレジスト膜15にしっかり密着して固
化しているため、レジスト膜15や回路パターン14が
カル6aと一体となって剥離されやすい問題点があっ
た。
As shown in the figure, the cull 6a is separated from the substrate 2 by rotating the cull 6a clockwise. However, since the cull 6a is firmly adhered to the resist film 15 and solidified, there is a problem that the resist film 15 and the circuit pattern 14 are easily peeled off integrally with the cull 6a.

【0005】このような問題点を解決する方法として、
特開平4−184944号公報に開示された手段が提案
されている。このものは、特にその第1図(a)(b)
に記載されているように、溶融樹脂の通路であるゲート
に封鎖片を設けている。そしてこの封鎖片の上面を迂回
させて溶融樹脂をキャビティに圧入して、溶融樹脂を硬
化させた後、封鎖片を上昇させることにより、封鎖片の
上面に残存する樹脂を樹脂基板から分離するようにして
いる。
As a method for solving such a problem,
The means disclosed in Japanese Patent Application Laid-Open No. 4-184944 has been proposed. This is especially shown in FIGS. 1 (a) and 1 (b).
As described in (1), a sealing piece is provided at a gate which is a passage of the molten resin. Then, the molten resin is pressed into the cavity by bypassing the upper surface of the sealing piece, and after the molten resin is cured, the sealing piece is raised, so that the resin remaining on the upper surface of the sealing piece is separated from the resin substrate. I have to.

【0006】[0006]

【発明が解決しようとする課題】しかしながら上記のよ
うな構成では、封鎖片や、この封鎖片を上下動させるた
めの駆動機構を設けねばならず、更には封鎖片の上面に
残存する樹脂の回収手段を別途設けねばならないため、
構造や装置の運転が複雑となり、また封鎖片を上下動さ
せるための時間を要するため生産能率が低下するという
問題点があった。
However, in the above-mentioned structure, it is necessary to provide a sealing piece and a drive mechanism for moving the sealing piece up and down, and to collect the resin remaining on the upper surface of the sealing piece. Since a means must be provided separately,
There were problems that the structure and the operation of the apparatus became complicated, and that the production efficiency was lowered due to the time required to move the sealing piece up and down.

【0007】そこで本発明は、基板の回路パターンを傷
めることなく、簡単にカルを基板から分離することがで
きる電子部品の製造方法を提供することを目的とする。
Accordingly, an object of the present invention is to provide a method of manufacturing an electronic component that can easily separate a cull from a substrate without damaging a circuit pattern of the substrate.

【0008】[0008]

【課題を解決するための手段】このために本発明は、チ
ップが搭載された基板をモールドプレス装置の上型と下
型の間にセットし、ゲート溝からキャビティの内部に溶
融樹脂を圧入してこのチップを保護するモールド体を形
成した後、上型と下型を分離して前記基板を上型と下型
の間から取り出し、次にゲート溝の内部で硬化した樹脂
の先端の首細部を切断装置により基板と一緒に打抜くこ
とにより、基板の周縁部を前記ゲート溝の内部で硬化し
た樹脂と一緒に除去して電子部品を得るようにしてい
る。
According to the present invention, a substrate on which a chip is mounted is set between an upper die and a lower die of a mold press device, and molten resin is pressed into a cavity from a gate groove. After forming a mold body for protecting the lever, the upper mold and the lower mold are separated, the substrate is taken out from between the upper mold and the lower mold, and then the resin cured inside the gate groove is formed.
The edge of the substrate is punched together with the substrate by a cutting device, so that the peripheral portion of the substrate is hardened inside the gate groove.
They are removed together with the resin to obtain electronic components.

【0009】[0009]

【作用】上記構成によれば、チップを保護するモールド
体を形成した後、リブと基板を一緒に切断することによ
り電子部品が得られるが、この場合、リブを基板と一緒
に切断することによりカルは基板から分離されるので、
基板の回路パターンを損傷することはない。
According to the above construction, an electronic component can be obtained by cutting a rib and a substrate together after forming a molded body for protecting a chip. In this case, the rib is cut together with the substrate. Cull is separated from the substrate,
It does not damage the circuit pattern of the substrate.

【0010】[0010]

【実施例】以下、図面を参照しながら本発明の実施例を
説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0011】図1は本発明に係る電子部品の製造方法で
製造された電子部品の斜視図である。この電子部品21
は、基板22の上面に搭載されたチップ23をモールド
体24により樹脂封止して形成されている。モールド体
24は、その四隅にテーパ状のリブ25,26,27,
28を一体的に有している。29はチップ23の電極と
基板22の電極を接続するワイヤである。次に、この電
子部品21を製造するためのモールドプレス装置の説明
を行う。
FIG. 1 is a perspective view of an electronic component manufactured by the method for manufacturing an electronic component according to the present invention. This electronic component 21
Is formed by sealing a chip 23 mounted on the upper surface of the substrate 22 with a mold body 24 with resin. The mold body 24 has tapered ribs 25, 26, 27,
28 are integrally provided. Reference numeral 29 denotes a wire connecting the electrode of the chip 23 and the electrode of the substrate 22. Next, a mold press device for manufacturing the electronic component 21 will be described.

【0012】図2はモールドプレス装置の上型31と下
型32の斜視図である。上型31の下面には、4角形の
キャビティ33と、円孔34と、キャビティ33と円孔
34を連通させるゲート溝35が形成されている。また
キャビティ33の四隅には小溝36,37,38,39
が外方へ延出するように形成されており、そのうちの一
つの小溝36はゲート溝35に接続するサブゲート溝と
なっている。このキャビティ33内で硬化した樹脂が上
記モールド体24となり、また小溝36〜39内で硬化
した樹脂が上記リブ25〜28となる。
FIG. 2 is a perspective view of the upper die 31 and the lower die 32 of the mold press device. A rectangular cavity 33, a circular hole 34, and a gate groove 35 for communicating the cavity 33 with the circular hole 34 are formed on the lower surface of the upper die 31. Small grooves 36, 37, 38, 39 are provided at the four corners of the cavity 33.
Are formed so as to extend outward, and one of the small grooves 36 is a sub-gate groove connected to the gate groove 35. The resin cured in the cavity 33 becomes the mold body 24, and the resin cured in the small grooves 36 to 39 becomes the ribs 25 to 28.

【0013】下型32の上面の上記キャビティ33に対
応する位置には4角形の孔部41が形成されており、ま
た上記円孔34に対応する箇所には樹脂を収納するため
の樹脂収納孔42が円孔状に形成されている。モールド
プレスを行う際には、チップ23が搭載された基板22
を上型31と下型32の間にセットする。
A rectangular hole 41 is formed on the upper surface of the lower mold 32 at a position corresponding to the cavity 33, and a resin storage hole for storing resin is formed at a position corresponding to the circular hole 34. 42 is formed in a circular hole shape. When performing the mold press, the substrate 22 on which the chip 23 is mounted is mounted.
Is set between the upper mold 31 and the lower mold 32.

【0014】図3はモールドプレス中の上型31と下型
32の断面図である。下型32の孔部41の下方にはエ
ジェクタピン43が配設されており、このエジェクタピ
ン43は図示しない上下動手段に駆動されて上下動作を
する。また樹脂収納部42には樹脂44が収納されてい
る。この樹脂44はヒータ(図外)に加熱されて溶融す
る。樹脂収納部42の内部にはプランジャ45が収納さ
れている。46はプランジャ45の支持ピンである。本
実施例の基板22はプリント基板であって、その下面に
はバンプ30が突設されており、このバンプ30と上記
ワイヤ29は電気的に接続されている。図示するよう
に、上記ゲート溝35と上記サブゲート溝36の接続部
はテーパ状の首細部40になっている。
FIG. 3 is a cross-sectional view of the upper mold 31 and the lower mold 32 during a mold press. An ejector pin 43 is disposed below the hole 41 of the lower die 32, and the ejector pin 43 is driven by a vertical moving means (not shown) to perform a vertical operation. A resin 44 is stored in the resin storage section 42. This resin 44 is heated and melted by a heater (not shown). A plunger 45 is housed inside the resin housing 42. 46 is a support pin of the plunger 45. The substrate 22 of this embodiment is a printed circuit board, and a bump 30 is provided on the lower surface thereof, and the bump 30 and the wire 29 are electrically connected. As shown, the connection between the gate groove 35 and the sub-gate groove 36 has a tapered neck detail 40.

【0015】次にモールドプレス装置の動作を説明す
る。図3に示すように、基板22を下型32の上面に載
置し、上型31を下降させて下型32の上面に接地させ
る。この状態でチップ23はキャビティ33内に位置
し、またバンプ30は孔部41内に位置する。
Next, the operation of the mold press will be described. As shown in FIG. 3, the substrate 22 is placed on the upper surface of the lower die 32, and the upper die 31 is lowered to be grounded on the upper surface of the lower die 32. In this state, the chip 23 is located in the cavity 33, and the bump 30 is located in the hole 41.

【0016】次にヒータにより樹脂44を加熱して溶融
させ、プランジャ45を上昇させる。すると溶融した樹
脂44はゲート溝35およびサブゲート溝36を通過し
てキャビティ33内に圧入される。
Next, the resin 44 is heated and melted by the heater, and the plunger 45 is raised. Then, the melted resin 44 passes through the gate groove 35 and the sub-gate groove 36 and is pressed into the cavity 33.

【0017】次に溶融した樹脂44を硬化させた後、上
型31を上昇させて下型32から分離し、エジェクタピ
ン43により基板22の下面を突き上げて、下型32か
ら取り出す。
Next, after the molten resin 44 is cured, the upper die 31 is lifted and separated from the lower die 32, and the lower surface of the substrate 22 is pushed up by the ejector pins 43 and taken out from the lower die 32.

【0018】図4はこのようにしてモールドプレス装置
から取り出された電子部品の中途品47を示している。
図中、44aは樹脂収納部42内で硬化した樹脂、44
bはゲート溝35で硬化した帯状の樹脂、44cは首細
部40で硬化したくびれ部である。上述したように、樹
脂収納部42やゲート溝35内で硬化した樹脂44の残
滓であるこれらの樹脂44a,44bは、カルやコール
ドスラグ等と呼ばれている。リブ25はサブゲート溝で
ある小溝36で硬化した樹脂であり、樹脂(カル)44
bと一体である。なお本実施例では、一枚の基板22に
1個のチップ23を搭載しているが、大形若しくは長形
の基板に複数個のチップ23を搭載し、同時に複数個の
チップ23をモールドプレスする多面取りでもよいもの
である。
FIG. 4 shows a semi-finished product 47 of the electronic component thus taken out of the mold press.
In the drawing, reference numeral 44a denotes a resin cured in the resin storage portion 42;
b is a band-shaped resin cured in the gate groove 35, and 44c is a constricted portion cured in the neck detail 40. As described above, these resins 44a and 44b, which are residues of the resin 44 cured in the resin storage portion 42 and the gate groove 35, are called cull and cold slag. The rib 25 is a sub-gate groove
The resin cured in a certain small groove 36, and a resin (cal) 44
It is integral with b. In this embodiment, one chip 23 is mounted on one substrate 22. However, a plurality of chips 23 are mounted on a large or long substrate, and the plurality of chips 23 are simultaneously molded. It may be a multi-faceted process.

【0019】図5は、上記中途品47の切断装置50を
示している。図中、51は昇降ブロックであり、その下
面にパンチ52が設けられている。53はダイである。
図4に示す中途品47をダイ53上に載置し、昇降ブロ
ック51を下降させることにより、ゲート溝35の内部
で硬化した樹脂(カル)44bの先端の首細部を基板2
2と一緒に打抜く。本実施例では、樹脂(カル)44b
とモールド体24から突出するリブ25の境界の首細部
44cを打抜かれる。勿論、上型に小溝36〜39がな
く、ゲート溝35からキャビティ33に直接溶融樹脂を
圧入するもので、したがってモールド体24から突出す
るリブ25〜28ないものでもよい。 このように、基板
22の周縁部は、樹脂がゲート溝35の内部で硬化して
形成されたカル(樹脂44a、44b)と一緒に打抜か
れて除去される。この場合、首細部44cから切断する
ことにより、容易に切断を行える。22aは打抜かれて
分離した基板22の周縁部の破片である。図4において
破線aはこの切断装置による切断線を示しており、また
図1は切断して得られた電子部品21を示している。こ
のような方法によれば、基板22の打抜きとカル(樹脂
44a,44b)の分離を同一切断工程で同時に行える
利点がある。
FIG. 5 shows a cutting device 50 for the intermediate product 47. In the drawing, reference numeral 51 denotes an elevating block, on which a punch 52 is provided on its lower surface. 53 is a die.
The middle parts 47 shown in FIG. 4 is placed on the die 53, by lowering the lifting block 51, the inside of the gate trench 35
In the cured resin substrate neck thin section of the distal end of the (local) 44b 2
Punch together with 2. In the present embodiment, the resin (cal) 44b
Neck detail at the boundary of the rib 25 protruding from the mold body 24
44c is punched. Of course, there are small grooves 36-39 on the upper mold.
And the molten resin is directly injected into the cavity 33 from the gate groove 35.
Press-fit and therefore project from mold body 24
The ribs 25 to 28 may not be provided. Thus, the substrate
The resin is cured inside the gate groove 35 at the peripheral portion of 22.
Punched together with the formed cull (resins 44a, 44b)
Removed. In this case, cut from the neck detail 44c
Thereby, cutting can be easily performed. Reference numeral 22a denotes a fragment of the peripheral portion of the substrate 22 that has been punched and separated. In FIG. 4, a broken line a indicates a cutting line by this cutting device, and FIG. 1 shows an electronic component 21 obtained by cutting. According to such a method, there is an advantage that the punching of the substrate 22 and the separation of the culls (resins 44a and 44b) can be performed simultaneously in the same cutting step.

【0020】図1および図4において、リブ26,2
7,28は外観上のバランスを確保するために形成され
たものであり、したがって小孔37〜39を無くしてこ
れらのリブ26,27,28を形成しないようにしても
よい。また上記実施例では、モールド体24の角部にリ
ブ25〜28を形成しているが、図6に示すようにモー
ルド体24の辺に形成してもよいものであり(勿論この
場合、上型31の小溝36〜39の形成位置も変わ
る)、リブ25〜28の形成位置は任意に設定できる。
1 and 4, the ribs 26, 2
7 and 28 are formed in order to secure a balance in appearance. Therefore, the ribs 26, 27 and 28 may not be formed by eliminating the small holes 37 to 39. Further, in the above embodiment, the ribs 25 to 28 are formed at the corners of the mold body 24, but they may be formed on the sides of the mold body 24 as shown in FIG. The formation positions of the small grooves 36 to 39 of the mold 31 also change), and the formation positions of the ribs 25 to 28 can be set arbitrarily.

【0021】[0021]

【発明の効果】以上説明したように本発明の電子部品の
製造方法によれば、基板に形成された回路パターンを損
傷することなくカルを基板から分離でき、しかも基板の
打抜きと同時にカルの切断分離を行えるので生産能率上
もきわめて有利である。
As described above, according to the method for manufacturing an electronic component of the present invention, the cull can be separated from the substrate without damaging the circuit pattern formed on the substrate, and the cull can be cut off simultaneously with the punching of the substrate. Since separation can be performed, it is extremely advantageous in terms of production efficiency.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例の電子部品の斜視図FIG. 1 is a perspective view of an electronic component according to an embodiment of the present invention.

【図2】本発明の一実施例のモールドプレス装置の上型
と下型の斜視図
FIG. 2 is a perspective view of an upper mold and a lower mold of a mold press device according to one embodiment of the present invention.

【図3】本発明の一実施例のモールドプレス装置の断面
FIG. 3 is a sectional view of a mold press apparatus according to one embodiment of the present invention.

【図4】本発明の一実施例の中途品の斜視図FIG. 4 is a perspective view of an intermediate product according to an embodiment of the present invention.

【図5】本発明の一実施例の切断装置の側面図FIG. 5 is a side view of a cutting device according to an embodiment of the present invention.

【図6】本発明の他の実施例の電子部品の斜視図FIG. 6 is a perspective view of an electronic component according to another embodiment of the present invention.

【図7】従来のモールドプレス装置の断面図FIG. 7 is a cross-sectional view of a conventional mold press device.

【図8】従来のカルを分離中の電子部品と基板の側面図FIG. 8 is a side view of a conventional electronic component and a substrate during separation of a cull.

【符号の説明】[Explanation of symbols]

21 電子部品 22 基板 23 チップ 24 モールド体 25 リブ 26 リブ 27 リブ 28 リブ 31 上型 32 下型 33 キャビティ 35 ゲート溝 36 サブゲート溝 50 切断装置 DESCRIPTION OF SYMBOLS 21 Electronic component 22 Substrate 23 Chip 24 Mold body 25 Rib 26 Rib 27 Rib 28 Rib 31 Upper die 32 Lower die 33 Cavity 35 Gate groove 36 Sub gate groove 50 Cutting device

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 チップが搭載された基板をモールドプレ
ス装置の上型と下型の間にセットし、ゲート溝からキャ
ビティの内部に溶融樹脂を圧入してこのチップを保護す
るモールド体を形成した後、上型と下型を分離して前記
基板を上型と下型の間から取り出し、次にゲート溝の内
部で硬化した樹脂の先端の首細部を切断装置により基板
一緒に打抜くことにより、基板の周縁部を前記ゲート
溝の内部で硬化した樹脂と一緒に除去して電子部品を得
ることを特徴とする電子部品の製造方法。
1. A substrate on which a chip is mounted is set between an upper die and a lower die of a mold press device, and a molten resin is pressed into a cavity from a gate groove to form a mold body for protecting the chip. after the substrate by the upper and lower molds was separated off from between the upper and lower molds of the substrate, then cutting apparatus neck detail of the tip of the cured resin within the gate trench
By punching with the gate of the peripheral portion of the substrate
A method for manufacturing an electronic component , comprising removing the resin together with the cured resin inside the groove to obtain an electronic component.
【請求項2】 前記ゲート溝に接続されたサブゲート溝2. A sub-gate groove connected to the gate groove.
があり、このサブゲート溝の内部で樹脂が硬化したことThat the resin has hardened inside the sub-gate groove
により形成されたモールド体から突出するリブと前記ゲRibs projecting from the mold body formed by
ート溝の内部で硬化した樹脂の境界である前記首細部をThe neck detail, which is the boundary of the cured resin inside the
前記切断装置により基板と一緒に打ち抜くことを特徴とPunching together with the substrate by the cutting device;
する請求項1記載の電子部品の製造方法。The method for manufacturing an electronic component according to claim 1.
JP5063674A 1993-03-23 1993-03-23 Electronic component manufacturing method Expired - Fee Related JP3039188B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5063674A JP3039188B2 (en) 1993-03-23 1993-03-23 Electronic component manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5063674A JP3039188B2 (en) 1993-03-23 1993-03-23 Electronic component manufacturing method

Publications (2)

Publication Number Publication Date
JPH06275670A JPH06275670A (en) 1994-09-30
JP3039188B2 true JP3039188B2 (en) 2000-05-08

Family

ID=13236147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5063674A Expired - Fee Related JP3039188B2 (en) 1993-03-23 1993-03-23 Electronic component manufacturing method

Country Status (1)

Country Link
JP (1) JP3039188B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5428123B2 (en) * 2006-08-16 2014-02-26 富士通セミコンダクター株式会社 Semiconductor device and manufacturing method thereof
IT201700000191A1 (en) 2017-01-02 2018-07-02 Amx Automatrix S R L PRESS AND METHOD OF SINTERIZATION OF ELECTRONIC COMPONENTS ON A SUBSTRATE

Also Published As

Publication number Publication date
JPH06275670A (en) 1994-09-30

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