JPH0220213Y2 - - Google Patents

Info

Publication number
JPH0220213Y2
JPH0220213Y2 JP1984155471U JP15547184U JPH0220213Y2 JP H0220213 Y2 JPH0220213 Y2 JP H0220213Y2 JP 1984155471 U JP1984155471 U JP 1984155471U JP 15547184 U JP15547184 U JP 15547184U JP H0220213 Y2 JPH0220213 Y2 JP H0220213Y2
Authority
JP
Japan
Prior art keywords
reaction tube
tube
reaction
gas
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984155471U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6173670U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984155471U priority Critical patent/JPH0220213Y2/ja
Publication of JPS6173670U publication Critical patent/JPS6173670U/ja
Application granted granted Critical
Publication of JPH0220213Y2 publication Critical patent/JPH0220213Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1984155471U 1984-10-15 1984-10-15 Expired JPH0220213Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984155471U JPH0220213Y2 (enExample) 1984-10-15 1984-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984155471U JPH0220213Y2 (enExample) 1984-10-15 1984-10-15

Publications (2)

Publication Number Publication Date
JPS6173670U JPS6173670U (enExample) 1986-05-19
JPH0220213Y2 true JPH0220213Y2 (enExample) 1990-06-01

Family

ID=30713482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984155471U Expired JPH0220213Y2 (enExample) 1984-10-15 1984-10-15

Country Status (1)

Country Link
JP (1) JPH0220213Y2 (enExample)

Also Published As

Publication number Publication date
JPS6173670U (enExample) 1986-05-19

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