JPH0219958Y2 - - Google Patents

Info

Publication number
JPH0219958Y2
JPH0219958Y2 JP1985015897U JP1589785U JPH0219958Y2 JP H0219958 Y2 JPH0219958 Y2 JP H0219958Y2 JP 1985015897 U JP1985015897 U JP 1985015897U JP 1589785 U JP1589785 U JP 1589785U JP H0219958 Y2 JPH0219958 Y2 JP H0219958Y2
Authority
JP
Japan
Prior art keywords
lower base
upper support
wafer
boat
support part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985015897U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61134037U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985015897U priority Critical patent/JPH0219958Y2/ja
Publication of JPS61134037U publication Critical patent/JPS61134037U/ja
Application granted granted Critical
Publication of JPH0219958Y2 publication Critical patent/JPH0219958Y2/ja
Expired legal-status Critical Current

Links

JP1985015897U 1985-02-08 1985-02-08 Expired JPH0219958Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985015897U JPH0219958Y2 (enEXAMPLES) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985015897U JPH0219958Y2 (enEXAMPLES) 1985-02-08 1985-02-08

Publications (2)

Publication Number Publication Date
JPS61134037U JPS61134037U (enEXAMPLES) 1986-08-21
JPH0219958Y2 true JPH0219958Y2 (enEXAMPLES) 1990-05-31

Family

ID=30502160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985015897U Expired JPH0219958Y2 (enEXAMPLES) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPH0219958Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007039106A (ja) * 2005-08-04 2007-02-15 Sii Nanotechnology Inc 弾性材料を使用した薄板状小片ホルダ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863748U (ja) * 1981-10-22 1983-04-28 山形日本電気株式会社 プラズマ処理用ウエ−ハ装填ボ−ト

Also Published As

Publication number Publication date
JPS61134037U (enEXAMPLES) 1986-08-21

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