JPH02196905A - 光学的薄膜体の膜厚測定方法 - Google Patents
光学的薄膜体の膜厚測定方法Info
- Publication number
- JPH02196905A JPH02196905A JP31085089A JP31085089A JPH02196905A JP H02196905 A JPH02196905 A JP H02196905A JP 31085089 A JP31085089 A JP 31085089A JP 31085089 A JP31085089 A JP 31085089A JP H02196905 A JPH02196905 A JP H02196905A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film body
- thickness
- optical thin
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 86
- 238000005259 measurement Methods 0.000 title description 6
- 230000003287 optical effect Effects 0.000 claims abstract description 63
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 19
- 239000012788 optical film Substances 0.000 claims description 6
- 101150077190 sinI gene Proteins 0.000 claims 2
- 239000012528 membrane Substances 0.000 description 38
- 239000010408 film Substances 0.000 description 22
- 229920000642 polymer Polymers 0.000 description 17
- 239000002904 solvent Substances 0.000 description 16
- 239000000203 mixture Substances 0.000 description 8
- 239000006082 mold release agent Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000000691 measurement method Methods 0.000 description 5
- 239000004593 Epoxy Substances 0.000 description 4
- 239000000020 Nitrocellulose Substances 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 4
- 229920001220 nitrocellulos Polymers 0.000 description 4
- 239000011877 solvent mixture Substances 0.000 description 4
- 238000002798 spectrophotometry method Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 230000003187 abdominal effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- 238000005375 photometry Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- -1 helium ions Chemical class 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 239000010695 polyglycol Substances 0.000 description 1
- 229920000151 polyglycol Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00634—Production of filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C41/04—Rotational or centrifugal casting, i.e. coating the inside of a mould by rotating the mould
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Polarising Elements (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Moulding By Coating Moulds (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/326,489 US4378953A (en) | 1981-12-02 | 1981-12-02 | Thin, optical membranes and methods and apparatus for making them |
| US326488 | 1981-12-02 | ||
| US06/326,488 US4453828A (en) | 1981-12-02 | 1981-12-02 | Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes |
| US326489 | 1981-12-02 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57210689A Division JPS58196501A (ja) | 1981-12-02 | 1982-12-02 | 光学的薄膜体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02196905A true JPH02196905A (ja) | 1990-08-03 |
| JPH0579922B2 JPH0579922B2 (enExample) | 1993-11-05 |
Family
ID=26985431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31085089A Granted JPH02196905A (ja) | 1981-12-02 | 1989-12-01 | 光学的薄膜体の膜厚測定方法 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0084221B1 (enExample) |
| JP (1) | JPH02196905A (enExample) |
| DE (2) | DE84221T1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0249476B1 (en) * | 1986-06-12 | 1994-08-10 | Mitsui Petrochemical Industries, Ltd. | Process for preparation of cellulose ester films |
| JP4398522B2 (ja) * | 1997-05-22 | 2010-01-13 | バスフ・ヒュエル・セル・ゲーエムベーハー | 燃料電池用高分子電解質膜の製造方法及び燃料電池 |
| DE102007043937B4 (de) * | 2006-09-13 | 2010-10-07 | Innovent E.V. | Verfahren zur Bestimmung der Dicke und des Brechungsindex von optisch transparenten Schichten auf optisch transparenten planparallelen Substraten |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533363A (en) * | 1976-06-30 | 1978-01-13 | Canon Inc | Measurement method and measurement device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2570273A (en) * | 1948-09-20 | 1951-10-09 | Paul L Pryor | Method of making optical pellicles |
| US2897544A (en) * | 1953-06-16 | 1959-08-04 | Mortimer M Marks | Machine for the continuous casting of films directly from solution |
| GB1089358A (en) * | 1965-11-03 | 1967-11-01 | Standard Telephones Cables Ltd | Method of making free thin films |
| DE2448294A1 (de) * | 1974-10-10 | 1976-04-22 | Bbc Brown Boveri & Cie | Verfahren und vorrichtung zur bestimmung von schichtdicke und brechungsindex von duennen durchsichtigen schichten |
-
1982
- 1982-12-02 EP EP82306422A patent/EP0084221B1/en not_active Expired
- 1982-12-02 DE DE1982306422 patent/DE84221T1/de active Pending
- 1982-12-02 DE DE8282306422T patent/DE3277551D1/de not_active Expired
-
1989
- 1989-12-01 JP JP31085089A patent/JPH02196905A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS533363A (en) * | 1976-06-30 | 1978-01-13 | Canon Inc | Measurement method and measurement device |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0084221B1 (en) | 1987-10-28 |
| JPH0579922B2 (enExample) | 1993-11-05 |
| DE84221T1 (de) | 1986-08-14 |
| EP0084221A1 (en) | 1983-07-27 |
| DE3277551D1 (en) | 1987-12-03 |
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