JPH0579922B2 - - Google Patents

Info

Publication number
JPH0579922B2
JPH0579922B2 JP1310850A JP31085089A JPH0579922B2 JP H0579922 B2 JPH0579922 B2 JP H0579922B2 JP 1310850 A JP1310850 A JP 1310850A JP 31085089 A JP31085089 A JP 31085089A JP H0579922 B2 JPH0579922 B2 JP H0579922B2
Authority
JP
Japan
Prior art keywords
thin film
thickness
membrane
film body
optical thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1310850A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02196905A (ja
Inventor
Uin Rei
Esu Haasheru Ronarudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Semiconductor Products Inc
Original Assignee
Advanced Semiconductor Products Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26985431&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH0579922(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from US06/326,489 external-priority patent/US4378953A/en
Priority claimed from US06/326,488 external-priority patent/US4453828A/en
Application filed by Advanced Semiconductor Products Inc filed Critical Advanced Semiconductor Products Inc
Publication of JPH02196905A publication Critical patent/JPH02196905A/ja
Publication of JPH0579922B2 publication Critical patent/JPH0579922B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00634—Production of filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
    • B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
    • B29C41/04—Rotational or centrifugal casting, i.e. coating the inside of a mould by rotating the mould

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Polarising Elements (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Moulding By Coating Moulds (AREA)
JP31085089A 1981-12-02 1989-12-01 光学的薄膜体の膜厚測定方法 Granted JPH02196905A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US06/326,489 US4378953A (en) 1981-12-02 1981-12-02 Thin, optical membranes and methods and apparatus for making them
US326488 1981-12-02
US06/326,488 US4453828A (en) 1981-12-02 1981-12-02 Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes
US326489 1981-12-02

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57210689A Division JPS58196501A (ja) 1981-12-02 1982-12-02 光学的薄膜体の製造方法

Publications (2)

Publication Number Publication Date
JPH02196905A JPH02196905A (ja) 1990-08-03
JPH0579922B2 true JPH0579922B2 (enExample) 1993-11-05

Family

ID=26985431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31085089A Granted JPH02196905A (ja) 1981-12-02 1989-12-01 光学的薄膜体の膜厚測定方法

Country Status (3)

Country Link
EP (1) EP0084221B1 (enExample)
JP (1) JPH02196905A (enExample)
DE (2) DE84221T1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0249476B1 (en) * 1986-06-12 1994-08-10 Mitsui Petrochemical Industries, Ltd. Process for preparation of cellulose ester films
JP4398522B2 (ja) * 1997-05-22 2010-01-13 バスフ・ヒュエル・セル・ゲーエムベーハー 燃料電池用高分子電解質膜の製造方法及び燃料電池
DE102007043937B4 (de) * 2006-09-13 2010-10-07 Innovent E.V. Verfahren zur Bestimmung der Dicke und des Brechungsindex von optisch transparenten Schichten auf optisch transparenten planparallelen Substraten

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2570273A (en) * 1948-09-20 1951-10-09 Paul L Pryor Method of making optical pellicles
US2897544A (en) * 1953-06-16 1959-08-04 Mortimer M Marks Machine for the continuous casting of films directly from solution
GB1089358A (en) * 1965-11-03 1967-11-01 Standard Telephones Cables Ltd Method of making free thin films
DE2448294A1 (de) * 1974-10-10 1976-04-22 Bbc Brown Boveri & Cie Verfahren und vorrichtung zur bestimmung von schichtdicke und brechungsindex von duennen durchsichtigen schichten
JPS533363A (en) * 1976-06-30 1978-01-13 Canon Inc Measurement method and measurement device

Also Published As

Publication number Publication date
EP0084221B1 (en) 1987-10-28
DE84221T1 (de) 1986-08-14
JPH02196905A (ja) 1990-08-03
EP0084221A1 (en) 1983-07-27
DE3277551D1 (en) 1987-12-03

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