JPH0219620B2 - - Google Patents
Info
- Publication number
- JPH0219620B2 JPH0219620B2 JP16653983A JP16653983A JPH0219620B2 JP H0219620 B2 JPH0219620 B2 JP H0219620B2 JP 16653983 A JP16653983 A JP 16653983A JP 16653983 A JP16653983 A JP 16653983A JP H0219620 B2 JPH0219620 B2 JP H0219620B2
- Authority
- JP
- Japan
- Prior art keywords
- growth
- pattern
- growth layer
- substrate
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02625—Liquid deposition using melted materials
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16653983A JPS6058619A (ja) | 1983-09-12 | 1983-09-12 | 液相エピタキシヤル成長法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16653983A JPS6058619A (ja) | 1983-09-12 | 1983-09-12 | 液相エピタキシヤル成長法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6058619A JPS6058619A (ja) | 1985-04-04 |
| JPH0219620B2 true JPH0219620B2 (enrdf_load_stackoverflow) | 1990-05-02 |
Family
ID=15833154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16653983A Granted JPS6058619A (ja) | 1983-09-12 | 1983-09-12 | 液相エピタキシヤル成長法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6058619A (enrdf_load_stackoverflow) |
-
1983
- 1983-09-12 JP JP16653983A patent/JPS6058619A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6058619A (ja) | 1985-04-04 |
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