JPH02177330A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPH02177330A
JPH02177330A JP27986389A JP27986389A JPH02177330A JP H02177330 A JPH02177330 A JP H02177330A JP 27986389 A JP27986389 A JP 27986389A JP 27986389 A JP27986389 A JP 27986389A JP H02177330 A JPH02177330 A JP H02177330A
Authority
JP
Japan
Prior art keywords
film
groove
semiconductor layer
patterns
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27986389A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574220B2 (enrdf_load_stackoverflow
Inventor
Shuichi Kameyama
亀山　周一
Satoshi Shinozaki
篠崎　慧
Hiroshi Iwai
洋 岩井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP27986389A priority Critical patent/JPH02177330A/ja
Publication of JPH02177330A publication Critical patent/JPH02177330A/ja
Publication of JPH0574220B2 publication Critical patent/JPH0574220B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP27986389A 1989-10-30 1989-10-30 半導体装置の製造方法 Granted JPH02177330A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27986389A JPH02177330A (ja) 1989-10-30 1989-10-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27986389A JPH02177330A (ja) 1989-10-30 1989-10-30 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56212459A Division JPS58112342A (ja) 1981-08-21 1981-12-25 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPH02177330A true JPH02177330A (ja) 1990-07-10
JPH0574220B2 JPH0574220B2 (enrdf_load_stackoverflow) 1993-10-18

Family

ID=17616995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27986389A Granted JPH02177330A (ja) 1989-10-30 1989-10-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPH02177330A (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495283A (enrdf_load_stackoverflow) * 1972-04-28 1974-01-17
JPS5531616A (en) * 1978-08-26 1980-03-06 Iseki & Co Ltd Caterpillar
JPS56137653A (en) * 1980-03-29 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor integrated circuit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495283A (enrdf_load_stackoverflow) * 1972-04-28 1974-01-17
JPS5531616A (en) * 1978-08-26 1980-03-06 Iseki & Co Ltd Caterpillar
JPS56137653A (en) * 1980-03-29 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor integrated circuit

Also Published As

Publication number Publication date
JPH0574220B2 (enrdf_load_stackoverflow) 1993-10-18

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