JPH0217638B2 - - Google Patents
Info
- Publication number
- JPH0217638B2 JPH0217638B2 JP24592287A JP24592287A JPH0217638B2 JP H0217638 B2 JPH0217638 B2 JP H0217638B2 JP 24592287 A JP24592287 A JP 24592287A JP 24592287 A JP24592287 A JP 24592287A JP H0217638 B2 JPH0217638 B2 JP H0217638B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- electrolyte
- electrode device
- liquid flow
- insoluble electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003792 electrolyte Substances 0.000 claims description 37
- 239000007788 liquid Substances 0.000 claims description 30
- 230000001105 regulatory effect Effects 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 description 24
- 239000002184 metal Substances 0.000 description 24
- 239000008151 electrolyte solution Substances 0.000 description 16
- 238000004381 surface treatment Methods 0.000 description 9
- 238000011282 treatment Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910003446 platinum oxide Inorganic materials 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62245922A JPH0192399A (ja) | 1987-10-01 | 1987-10-01 | 不溶性電極装置 |
| DE3889187T DE3889187T2 (de) | 1987-10-01 | 1988-09-29 | Unlösliche Elektrode. |
| EP88309071A EP0310401B1 (en) | 1987-10-01 | 1988-09-29 | Insoluble electrode device |
| CA000579061A CA1331582C (en) | 1987-10-01 | 1988-09-30 | Insoluble electrode device |
| KR1019880012864A KR930008929B1 (ko) | 1987-10-01 | 1988-09-30 | 불용성 전극장치 |
| US07/465,516 US4964965A (en) | 1987-10-01 | 1990-01-16 | Insoluble electrode device for treatment of metallic material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62245922A JPH0192399A (ja) | 1987-10-01 | 1987-10-01 | 不溶性電極装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0192399A JPH0192399A (ja) | 1989-04-11 |
| JPH0217638B2 true JPH0217638B2 (enExample) | 1990-04-23 |
Family
ID=17140840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62245922A Granted JPH0192399A (ja) | 1987-10-01 | 1987-10-01 | 不溶性電極装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192399A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5236566A (en) * | 1991-09-24 | 1993-08-17 | Nippon Steel Corporation | Vertical type stream plating apparatus |
| KR20140087649A (ko) * | 2012-12-31 | 2014-07-09 | 삼성전기주식회사 | 인쇄회로기판용 도금장치 |
| CN112899743B (zh) * | 2021-01-19 | 2021-09-21 | 鑫巨(深圳)半导体科技有限公司 | 一种电镀装置及电镀方法 |
-
1987
- 1987-10-01 JP JP62245922A patent/JPH0192399A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0192399A (ja) | 1989-04-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |