JPH0217626Y2 - - Google Patents
Info
- Publication number
- JPH0217626Y2 JPH0217626Y2 JP20284585U JP20284585U JPH0217626Y2 JP H0217626 Y2 JPH0217626 Y2 JP H0217626Y2 JP 20284585 U JP20284585 U JP 20284585U JP 20284585 U JP20284585 U JP 20284585U JP H0217626 Y2 JPH0217626 Y2 JP H0217626Y2
- Authority
- JP
- Japan
- Prior art keywords
- shielding
- shutter
- ventilation
- light source
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009423 ventilation Methods 0.000 claims description 33
- 238000001816 cooling Methods 0.000 claims description 7
- 230000005469 synchrotron radiation Effects 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 claims 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000003973 paint Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
Landscapes
- Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Printing Methods (AREA)
- Drying Of Solid Materials (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20284585U JPH0217626Y2 (en, 2012) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20284585U JPH0217626Y2 (en, 2012) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62109738U JPS62109738U (en, 2012) | 1987-07-13 |
| JPH0217626Y2 true JPH0217626Y2 (en, 2012) | 1990-05-17 |
Family
ID=31167611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20284585U Expired JPH0217626Y2 (en, 2012) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217626Y2 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007083234A (ja) * | 2006-11-08 | 2007-04-05 | Dainippon Screen Mfg Co Ltd | パターン形成装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02292949A (ja) * | 1989-05-02 | 1990-12-04 | Minolta Camera Co Ltd | 画像読取装置 |
| JPH0810396Y2 (ja) * | 1989-09-27 | 1996-03-29 | 富士通テン株式会社 | 紫外線照射装置 |
| JP3641320B2 (ja) * | 1996-05-28 | 2005-04-20 | サンエー技研株式会社 | 露光装置に用いられるシャッター装置 |
| JP5821520B2 (ja) * | 2011-10-24 | 2015-11-24 | ウシオ電機株式会社 | 紫外線照射装置 |
| JP6786887B2 (ja) * | 2016-06-03 | 2020-11-18 | コニカミノルタ株式会社 | 紫外線硬化膜の形成方法および紫外線照射装置 |
-
1985
- 1985-12-27 JP JP20284585U patent/JPH0217626Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007083234A (ja) * | 2006-11-08 | 2007-04-05 | Dainippon Screen Mfg Co Ltd | パターン形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62109738U (en, 2012) | 1987-07-13 |
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