JPH02155563A - Continuous type vacuum brazing device - Google Patents

Continuous type vacuum brazing device

Info

Publication number
JPH02155563A
JPH02155563A JP30956688A JP30956688A JPH02155563A JP H02155563 A JPH02155563 A JP H02155563A JP 30956688 A JP30956688 A JP 30956688A JP 30956688 A JP30956688 A JP 30956688A JP H02155563 A JPH02155563 A JP H02155563A
Authority
JP
Japan
Prior art keywords
chamber
vacuum
vacuum brazing
furnace
carrier gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30956688A
Other languages
Japanese (ja)
Inventor
Atsushi Nakatsuka
篤 中塚
Takeo Kato
丈夫 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP30956688A priority Critical patent/JPH02155563A/en
Publication of JPH02155563A publication Critical patent/JPH02155563A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To eliminate the pollution due to org. solvents and to prevent the contamination from a vacuum brazing furnace having heaters in the furnace and brazing defect by connecting the vacuum brazing furnace via a shut off sluice valve. CONSTITUTION:The shut off sluice valve 6 is closed and an inlet sluice valve 4 of a degreasing chamber 1 is opened to insert the objects to be treated into the degreasing chamber 1. The inlet sluice valve 4 is closed and the inside of the degreasing chamber 1 is evacuated to a vacuum by a vacuum discharge route 3 after the insertion. While the evacuation is continued, a carrier gas is introduced from a carrier gas introducing route 2 into the degreasing chamber 1 and the objects to be treated are heated for the specified period of time by the heaters 5. The oil sticking to the objects to be treated evaporate when the objects are heated under the reduced pressure. The vapor of the oil is discharged together with the carrier gas from the degreasing chamber 1 and is trapped by an oil trap 3b in the discharge route 3. The shut off sluice valve 6 is thereafter opened and the degreased objects are sent into the vacuum brazing furnace 7 where the objects are brazed under heating by the heaters 11.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は連続式真空ろう付装置に関するものである。[Detailed description of the invention] (Industrial application field) This invention relates to a continuous vacuum brazing apparatus.

(従来の技術) 素材をプレス加工、切削加工等の加工をしてから組立て
て治具に固定される被処理物は、加工中に浦が付着する
ため、真空ろう付炉に挿入して、ろう付は処理をする前
には、付着した油を脱脂しななければならない。
(Conventional technology) Workpieces that are assembled and fixed to jigs after being processed by pressing, cutting, etc., are inserted into a vacuum brazing furnace, as ura will adhere to them during processing. Before proceeding with brazing, adhering oil must be removed.

そこで、従来の真空ろう付装置の第1の例は、真空ろう
付炉を単独に設け、そして、被処理物に付ηした油を打
機溶剤で洗浄して脱7TIJする洗浄工程設備を、真空
ろう付炉とは別個に設けていた。
Therefore, the first example of the conventional vacuum brazing apparatus is equipped with a vacuum brazing furnace independently, and cleaning process equipment for cleaning the oil applied to the workpiece with a batter solvent to remove 7TIJ. It was installed separately from the vacuum brazing furnace.

また、第2の例は、被処理物に付着したM+を弔に真空
中で加熱するものであった。
In the second example, M+ attached to the object to be processed was heated in a vacuum.

(発明が解決しようとする課届) 従来の連続式真空ろう付装置の第1の例は、上記のよう
に真空ろう付炉とは別個に、被処理物に付着した油を有
機溶剤で洗浄して脱油する洗浄工程設備が設けられてい
たので、そのままでは何機溶剤による公害が発生する。
(Category report to be solved by the invention) As mentioned above, the first example of a conventional continuous vacuum brazing apparatus uses an organic solvent to clean oil adhering to the workpiece separately from the vacuum brazing furnace. Cleaning process equipment was installed to deoil the oil, but if left as is, pollution would be caused by the solvent.

そのため、公害防止設備が付随的に必要となり、設備費
がかなりかかった。また、洗浄工程設備の設置スペース
や運転作業員が必要になり、ランニングコスト低減への
障害となっていた。しかも、熱交換器のような複雑な形
状の被処理物では十分に脱脂か行なえないため、このよ
うな被処理物を真空ろう付炉に挿入すると、真空ろう付
炉の汚染及びろう付は不良が発生する等の問題があった
As a result, pollution prevention equipment was additionally required, and equipment costs were considerable. In addition, installation space for cleaning process equipment and operating personnel are required, which poses an obstacle to reducing running costs. Moreover, since it is not possible to sufficiently degrease a workpiece with a complex shape such as a heat exchanger, if such a workpiece is inserted into a vacuum brazing furnace, it may contaminate the vacuum brazing furnace and the brazing may be defective. There were problems such as the occurrence of

また、第2の例は、真空中で被処理物を加熱するだけで
は、被処理物から油脂類が離脱するのに長時間を要する
と共に、離脱した油脂類が真空ポンプまで到着してポン
プ油に混入すると、真空ポンプの性能を著しく劣化する
問題があった。
In addition, in the second example, simply heating the workpiece in a vacuum takes a long time for the oils and fats to separate from the workpiece, and the separated oils and fats reach the vacuum pump and become pump oil. There is a problem that if it gets mixed in, the performance of the vacuum pump will be significantly deteriorated.

この発明は、上記のような従来の問題を解決して、何機
溶剤による公害がなく、省設置スペースで、運転作業員
の削減がはかられ、真空ろう付炉の汚染及びろう付は不
良を防止すると共に、加熱時間を短時間にし、真空ポン
プの性能を劣化させない連続式真空ろう付装置を提供す
ることを目的としている。
This invention solves the above-mentioned conventional problems, eliminates pollution caused by solvents, saves installation space, reduces the number of operating personnel, and eliminates contamination of vacuum brazing furnaces and poor brazing. It is an object of the present invention to provide a continuous vacuum brazing device that prevents the above problems, shortens the heating time, and does not deteriorate the performance of the vacuum pump.

(課題を解決するための手段) L記目的を達成するために、この発明の連続式真空ろう
付装置は、室壁に、キャリアガス導入経路と、オイルト
ラップを経路中に有する真空排気経路とを接続し、室入
口に入口】仕切弁を設け、室内部に加熱器を備えた少な
くとも1つ以上の脱脂室と、同じく炉壁に、キャリアガ
ス導入経路と真空排気経路とを接続し、炉出口に出口仕
切弁を設け、炉内部に加熱器を備えた真空ろう付炉とを
遮断仕切弁を介して連接したことを特徴としている。
(Means for Solving the Problems) In order to achieve the object L, the continuous vacuum brazing apparatus of the present invention includes a carrier gas introduction path and a vacuum exhaust path having an oil trap in the path. At least one degreasing chamber equipped with a heater inside the chamber is provided with a gate valve, and a carrier gas introduction path and a vacuum exhaust path are also connected to the furnace wall. It is characterized in that an outlet gate valve is provided at the outlet, and it is connected to a vacuum brazing furnace equipped with a heater inside the furnace via a shutoff gate valve.

なお、脱脂室の入口には、真空排気経路を室壁に接続し
た少な(とも1つ以上の準備室を、脱脂室の入日仕切弁
を介して連接してもよい。また、真空ろうけ炉の出口に
は、真空排気経路を室壁に接続した少なくとも1つ以上
の取出室を、真空ろう付炉の出口仕切弁を介して連接し
てもよい。
The entrance of the degreasing chamber may be connected to at least one preparation chamber with a vacuum exhaust path connected to the chamber wall via the entrance gate valve of the degreasing chamber. At least one extraction chamber having a vacuum exhaust path connected to the chamber wall may be connected to the outlet of the furnace via an outlet gate valve of the vacuum brazing furnace.

(作用) この発明においては、脱脂室の入口仕切弁を開き、被処
理物(図示せず)を脱脂室に挿入した後、入口仕切弁を
閉じ、脱脂室を真空排気経路で真空排気し、そして、真
空排気を続けながら、キャリアガス導入経路より脱脂室
にキャリアガスを導入し、加熱2にで被処理物を一定時
間加熱すると、被処理物に付着していた油は蒸発して、
キャリアガスと共に脱脂室より排気され、真空排気経路
中のオイルトラップでトラップされるようになる。その
後、遮断仕切弁を開いて、被処理物を真空ろう付炉に送
る。このとき、真空ろう付炉を真空排気経路を閉じ、真
空ろう付炉中にキャリアガスを導入すると、そのキャリ
アガスは、真空ろう付炉よより脱脂室に流れ、そして、
脱脂室の真空排気経路を通って排気され、真空ろう付炉
における浦の汚染が防止されるようになる。被処理物を
真空ろう付炉に送った後、遮断仕切弁を閉じ、そして、
真空ろう付炉を真空排気しながら、加熱器で被処理物を
加熱すると、被処理物はろう付されるようになる。
(Function) In this invention, the inlet gate valve of the degreasing chamber is opened, a workpiece (not shown) is inserted into the degreasing chamber, the inlet gate valve is closed, and the degreasing chamber is evacuated through the vacuum exhaust path. Then, while continuing vacuum evacuation, carrier gas is introduced into the degreasing chamber from the carrier gas introduction path, and when the object to be processed is heated for a certain period of time in heating 2, the oil attached to the object to be processed evaporates.
It is exhausted from the degreasing chamber along with the carrier gas, and is trapped in an oil trap in the vacuum exhaust path. Thereafter, the shutoff gate valve is opened and the workpiece is sent to the vacuum brazing furnace. At this time, when the vacuum exhaust path of the vacuum brazing furnace is closed and a carrier gas is introduced into the vacuum brazing furnace, the carrier gas flows from the vacuum brazing furnace to the degreasing chamber, and
It is evacuated through the vacuum exhaust path of the degreasing chamber, thereby preventing contamination of the ura in the vacuum brazing furnace. After sending the workpiece to the vacuum brazing furnace, close the shutoff gate valve, and
When the workpiece is heated with a heater while the vacuum brazing furnace is evacuated, the workpiece becomes brazed.

なお、脱脂室の入口に準備室を連接した場合には、被処
理物を準備室に入れてから、準備室を1空排気し、そし
て、準備室の真空排気後に、被処理物を準備室より脱脂
室に挿入する。また、真空ろう付炉の出口に取出室を連
接した場合には、取出室を真空排気してから、被処理物
を真空ろう付炉より取出室に挿入し、そして、その挿入
後に、取出室を大気圧に戻して、被処理物を取出室より
取出す。
In addition, when the preparation room is connected to the entrance of the degreasing chamber, the preparation chamber is evacuated after putting the object to be processed into the preparation chamber, and after the preparation chamber is evacuated, the object to be processed is transferred to the preparation chamber. Insert into the degreasing chamber. In addition, when the take-out chamber is connected to the outlet of the vacuum brazing furnace, the take-out chamber is evacuated, the workpiece is inserted into the take-out chamber from the vacuum brazing furnace, and after the insertion, the take-out chamber is is returned to atmospheric pressure and the object to be processed is taken out from the removal chamber.

(実施例) 以−ド、この発明の実施例について図面を参照しながら
説明する。
(Example) Hereinafter, an example of the present invention will be described with reference to the drawings.

第1図はこの発明の実施例を示しており、同図において
、脱脂室lの室壁1aにはキャリアガス導入経路2と真
空排気経路3とが接続され、キャリアガス導入経路2の
経路中には弁2aが設けられ、真空排気経路3の経路中
には弁3aとオイルトラップ3bとが設けられている。
FIG. 1 shows an embodiment of the present invention, in which a carrier gas introduction path 2 and a vacuum evacuation path 3 are connected to a chamber wall 1a of a degreasing chamber 1, and a carrier gas introduction path 2 is connected to a vacuum exhaust path 3. is provided with a valve 2a, and the vacuum exhaust path 3 is provided with a valve 3a and an oil trap 3b.

また、脱脂室Iの入口には入口仕切弁4が設けられ、脱
脂室1の内部には加熱器5が設けられている1、更に、
脱指掌lの出口には、遮断仕切弁6を介して、真空ろう
付炉7が連接されている。真空ろう付炉7の炉壁7aに
はキャリアガス導入経路8と真空排気経路9とが接続さ
れ、キャリアガス導入経路8のの経路中には弁8aが設
けられ、真空排気経路9の経路中には弁9aが設けられ
ている。また、真空ろう付炉7の出口には出口仕切弁1
0が設けられ、真空ろう付炉8の内部には加熱器11が
設けられている。
Further, an inlet gate valve 4 is provided at the entrance of the degreasing chamber I, and a heater 5 is provided inside the degreasing chamber 1.
A vacuum brazing furnace 7 is connected to the outlet of the de-finger palm l via a shutoff gate valve 6. A carrier gas introduction path 8 and a vacuum evacuation path 9 are connected to the furnace wall 7a of the vacuum brazing furnace 7, and a valve 8a is provided in the carrier gas introduction path 8, is provided with a valve 9a. In addition, an outlet gate valve 1 is provided at the outlet of the vacuum brazing furnace 7.
0 is provided, and a heater 11 is provided inside the vacuum brazing furnace 8.

したがって、上記のような装置を用いて、油の付着した
被処理物を脱脂する場合には、遮断仕切弁6を閉じて、
脱脂室lの入口仕切弁4を開き、被処理物(図示せず)
を脱脂室lに挿入する。挿入後、入口仕切弁4を閉じ、
脱脂室1を真空排気経路3で真空排気し、そして、真空
排気を続けながら、キャリアガス導入経路2より脱脂室
1にキャリアガスを導入すると共に、加熱器5で被処理
物を一定時間加熱する2、被処理物を減圧下で加熱する
と、被処理物に付着していた油は蒸発して、キャリアガ
スと共に脱脂室lより排気され、真空iJF、気経路3
中のオイルトラップ3bでトラップされるようになる。
Therefore, when degreasing a workpiece covered with oil using the above-mentioned apparatus, the shutoff gate valve 6 is closed.
Open the inlet gate valve 4 of the degreasing chamber l and remove the object to be treated (not shown).
Insert into the degreasing chamber l. After insertion, close the inlet gate valve 4,
The degreasing chamber 1 is evacuated through the evacuation route 3, and while continuing the evacuation, a carrier gas is introduced into the degreasing chamber 1 through the carrier gas introduction route 2, and the object to be processed is heated for a certain period of time with the heater 5. 2. When the object to be processed is heated under reduced pressure, the oil adhering to the object to be processed evaporates and is exhausted together with the carrier gas from the degreasing chamber 1.
The oil is trapped in the oil trap 3b inside.

その後、遮断仕切弁6を開いて、付着していた浦の脱脂
された被処理物は、脱脂室1より真空ろう付炉7に送ら
れる。このとき、真空ろう付炉7の真空排気経路9中の
弁9aを閉じて、キャリアガス導入経路9中の弁9aを
開き、真空ろう付炉7中にキャリアガスを導入すると、
そのキャリアガスは、真空ろう付炉7より脱脂室lに流
れ、そして真空排気経路3を通って排気される。そのた
め、真空ろう付炉7における油の汚染が防止されるよう
になる。被処理物を真空ろう付炉8に送った後、遮断仕
切弁6を閉じ、そして、真空排気経路9中の弁9aを開
き、加熱器11で被処理物を加熱しながら、ろう付する
Thereafter, the shutoff gate valve 6 is opened, and the degreased workpiece that has adhered thereto is sent from the degreasing chamber 1 to the vacuum brazing furnace 7. At this time, when the valve 9a in the vacuum exhaust path 9 of the vacuum brazing furnace 7 is closed and the valve 9a in the carrier gas introduction path 9 is opened to introduce the carrier gas into the vacuum brazing furnace 7,
The carrier gas flows from the vacuum brazing furnace 7 to the degreasing chamber 1, and is exhausted through the vacuum exhaust path 3. Therefore, oil contamination in the vacuum brazing furnace 7 is prevented. After the workpiece is sent to the vacuum brazing furnace 8, the shutoff gate valve 6 is closed, the valve 9a in the evacuation path 9 is opened, and the workpiece is brazed while being heated by the heater 11.

なお、ト記実施例では、脱脂室1と真空ろう付炉7とを
連接したものを示しているが、これに限定されることな
く、第2図に示すように、真空ろう付炉7の出口側に取
出室21を、出口仕切弁lOを介して連接してもよい。
In the above embodiment, the degreasing chamber 1 and the vacuum brazing furnace 7 are connected, but the present invention is not limited to this, and as shown in FIG. The extraction chamber 21 may be connected to the outlet side via an outlet gate valve IO.

第2図において、22は真空排気経路、22aは弁、2
3は出口仕切弁である。また、第3図に示すように脱脂
室Iの入口側に、もう1つの脱脂室31を連接してもよ
い。第3図において、32は真空排気経路、32aは弁
、32bはオイルトラップ、33は・キャリアガス導入
経路、33aは弁、34は加熱器、35は入口仕切弁で
ある。更に、第4図に示すように、脱脂室lの入口側に
準備室4Iを、入口仕切弁4を介して連接してもよい。
In FIG. 2, 22 is a vacuum exhaust path, 22a is a valve, 2
3 is an outlet gate valve. Further, as shown in FIG. 3, another degreasing chamber 31 may be connected to the entrance side of the degreasing chamber I. In FIG. 3, 32 is a vacuum exhaust path, 32a is a valve, 32b is an oil trap, 33 is a carrier gas introduction path, 33a is a valve, 34 is a heater, and 35 is an inlet gate valve. Furthermore, as shown in FIG. 4, a preparation chamber 4I may be connected to the entrance side of the degreasing chamber 1 via an inlet gate valve 4.

準備室41を連接すれば、その準備室41を真空排気又
は大気圧に戻すことにより、脱脂室lを常に減圧してお
くことができ、被処理物の処理効率を向上させることが
できるようになる。第4図において、42は真空排気経
路、42aは弁、43は入口仕切弁である。更にそのう
え、第5図に示すように、脱脂室lの入口側に、もう1
つの脱脂室31を連接すると共に、真空ろう付炉7の出
口側に取出室21を連接(7てちよい。取出室21を連
接すれば、その取出室21を1空排気又は大気圧に戻す
ことにより、真空ろう付炉7を常に減圧しておくことが
でき、被処理物の処理効率を向トさせることができるよ
うになる。第5図において、32は真空排気経路、32
aは弁、32bはオイルトラップ、33はキャリアガス
導入経路、33aは弁、34は加熱器、35は入口仕切
弁、22は真空排気経路、22aは弁、23は出口仕切
弁である。また、第6図に示すように、脱脂室lの入口
側に準備室41を連接し、真空ろう付炉7の出口側に取
出室21を連接してもよい。準備室41と取出室21と
を連接すれば、準備室41と取出室21とを真空排気又
は大気圧に戻すことにより、脱脂室lと真空ろう付炉7
とを常に減圧しておくことができ、被処理物の処理効率
を向上させることができるようになる。第6図において
、42は真空排気経路、42aはブf、43は入口仕切
弁であり、22は真空排気経路、22aは弁、23は出
口仕切弁である。史に、第7図に示すように、脱脂室l
の入口側にもう1つの脱脂室31と準備室41とを連接
し、真空ろう付炉7の出口側に取出室21を連接しても
よい。第7図において、32は真空排気経路、12aは
弁、32bはオイルトラップ、33はキャリアガス導入
経路、33aは弁、34は加熱器、35は入口仕切弁、
42は真空排気経路、42aは弁、43は入口仕切弁で
あり、22は真空排気経路、22aは弁、23は出口仕
切弁である。
By connecting the preparation chambers 41, the degreasing chamber 1 can be constantly kept at a reduced pressure by evacuating the preparation chamber 41 or returning it to atmospheric pressure, thereby improving the processing efficiency of the objects to be processed. Become. In FIG. 4, 42 is a vacuum exhaust path, 42a is a valve, and 43 is an inlet gate valve. Furthermore, as shown in Fig. 5, there is another one on the entrance side of the degreasing chamber l.
Two degreasing chambers 31 are connected, and a take-out chamber 21 is connected to the outlet side of the vacuum brazing furnace 7. As a result, the pressure in the vacuum brazing furnace 7 can be kept reduced at all times, and the processing efficiency of the workpiece can be improved.In FIG.
32 is a valve, 32b is an oil trap, 33 is a carrier gas introduction path, 33a is a valve, 34 is a heater, 35 is an inlet gate valve, 22 is a vacuum exhaust path, 22a is a valve, and 23 is an outlet gate valve. Further, as shown in FIG. 6, the preparation chamber 41 may be connected to the entrance side of the degreasing chamber 1, and the extraction chamber 21 may be connected to the exit side of the vacuum brazing furnace 7. If the preparation chamber 41 and the extraction chamber 21 are connected, the preparation chamber 41 and the extraction chamber 21 can be evacuated or returned to atmospheric pressure, and the degreasing chamber 1 and the vacuum brazing furnace 7 can be connected.
can be kept under reduced pressure at all times, making it possible to improve the processing efficiency of the objects to be processed. In FIG. 6, 42 is an evacuation route, 42a is a valve f, 43 is an inlet gate valve, 22 is an evacuation route, 22a is a valve, and 23 is an outlet gate valve. Historically, as shown in Figure 7, the degreasing chamber l
Another degreasing chamber 31 and the preparation chamber 41 may be connected to the inlet side of the vacuum brazing furnace 7, and the extraction chamber 21 may be connected to the outlet side of the vacuum brazing furnace 7. In FIG. 7, 32 is a vacuum exhaust path, 12a is a valve, 32b is an oil trap, 33 is a carrier gas introduction path, 33a is a valve, 34 is a heater, 35 is an inlet gate valve,
42 is an evacuation route, 42a is a valve, 43 is an inlet gate valve, 22 is an evacuation route, 22a is a valve, and 23 is an outlet gate valve.

(発明の効果) この発明は、上記のような構成をしているので、有機溶
剤による公害がなく、省設置スペースで、洗浄工程の運
転作業員の削減がはかられ、真空ろう付炉の汚染及びろ
う付は不良を防止することのでき、更に、予備加熱のエ
ネルギーを利用して脱脂をするので、省エネルギー化が
なされ、総合的にランニングコストの低減化がはかられ
、更にその上、真空ポンプの性能を劣化させない等の効
果をもっている。
(Effects of the Invention) Since the present invention has the above-described configuration, there is no pollution caused by organic solvents, the installation space is saved, the number of operating personnel in the cleaning process can be reduced, and the vacuum brazing furnace can be used. Contamination and brazing can prevent defects, and since preheating energy is used to degrease, energy is saved and running costs are reduced overall. It has the effect of not degrading the performance of the vacuum pump.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の実施例を示す説明図である。 第3図、第4図、第5図、第6図及び第7図はこの発明
のその他の実施例を示す説明図である。 図中、 1 ・ ae 2 ・ 3 ・ 3b・ 5・ 6 ・ 7 ・ 8 ・ 9 ・ 10・ 11・ 21・ 22# 31・ 32・ 2b 33・ 34・ 41・・・・・・、?!備室 42・・・・・・真空排気経路 なお、図中、同一符号は同−又は相当部分を示している
。 特許出願人 日本真空技術株式会社 脱脂室 室壁 キャリアガス導入経路 真空排気経路 オイルトラップ 入口仕切弁 加熱器 遮断仕切弁 真空ろう付炉 キャリアガス導入経路 真空排気経路 出口仕切弁 加熱器 取出室 真空排気経路 脱脂室 真空排気経路 オイルトラップ キャリアガス導入経路 加熱器 第1図 第2図 第3図 第6図 第7図 第4図 テ へ 手 続 補 正 書 (方式) %式% 発明の名称 連続式真空ろう付装置 3、補正をする者 事件との関係 特許出願人 住 所 神奈川県茅ケ崎市萩園2500番地名 称 日
本真空技術株式会社 代表者   高 村 甚 平 :゛<パ;4 。 〕 補正命令の日付 平成 1年 3月28日(全送日) 補正の対象 明細書のr図面の簡単な説明」の欄 補正の内容 明細書第11頁第18行の[第3図] [第2図、Jを加入する。 ゛ の萌に
FIG. 1 is an explanatory diagram showing an embodiment of the present invention. FIG. 3, FIG. 4, FIG. 5, FIG. 6, and FIG. 7 are explanatory diagrams showing other embodiments of the present invention. In the figure, 1, ae, 2, 3, 3b, 5, 6, 7, 8, 9, 10, 11, 21, 22# 31, 32, 2b 33, 34, 41...? ! Preparation room 42... Vacuum exhaust route In the drawings, the same reference numerals indicate the same or corresponding parts. Patent applicant: Japan Vacuum Technology Co., Ltd. Degreasing chamber Chamber wall Carrier gas introduction route Vacuum exhaust route Oil trap inlet gate valve Heater shutoff gate valve Vacuum brazing furnace Carrier gas introduction route Vacuum exhaust route Outlet gate valve Heater Take-out chamber Vacuum exhaust route Degreasing chamber Vacuum exhaust route Oil trap Carrier gas introduction route Heater Fig. 1 Fig. 2 Fig. 3 Fig. 6 Fig. 7 Fig. 4 Procedure amendment (method) % formula % Name of invention Continuous vacuum brazing Device 3, relationship with the case of the person making the amendment Patent applicant address: 2500 Hagizono, Chigasaki City, Kanagawa Prefecture Name: Japan Vacuum Technology Co., Ltd. Representative Jinpei Takamura:゛<P;4. ] Date of the amendment order March 28, 1999 (all sending dates) Column "Brief explanation of drawings" of the specification subject to amendment Contents of the amendment [Figure 3] on page 11, line 18 of the specification Figure 2, add J. To the Moe of ゛

Claims (1)

【特許請求の範囲】 1、室壁に、キャリアガス導入経路と、オイルトラップ
を経路中に有する真空排気経路とを接続し、室入口に入
口仕切弁を設け、室内部に加熱器を備えた少なくとも1
つ以上の脱脂室と、同じく炉壁に、キャリアガス導入経
路と真空排気経路とを接続し、炉出口に出口仕切弁を設
け、炉内部に加熱器を備えた真空ろう付炉とを遮断仕切
弁を介して連接したことを特徴とする連続式真空ろう付
装置。 2、脱脂室の入口に、真空排気経路を室壁に接続した少
なくとも1つ以上の準備室を、脱脂室の入口仕切弁を介
して連接したことを特徴とする請求項1記載の連続式真
空ろう付装置。 3、真空ろう付炉の出口に、真空排気経路を室壁に接続
した少なくとも1つ以上の取出室を、真空ろう付炉の出
口仕切弁を介して連接したことを特徴とする請求項1又
2記載の連続式真空ろう付装置。
[Claims] 1. A carrier gas introduction path and a vacuum exhaust path having an oil trap in the path are connected to the chamber wall, an inlet gate valve is provided at the chamber entrance, and a heater is provided inside the chamber. at least 1
The two or more degreasing chambers are connected to the furnace wall with a carrier gas introduction path and a vacuum exhaust path, and an outlet gate valve is installed at the furnace outlet to isolate the vacuum brazing furnace equipped with a heater inside the furnace. A continuous vacuum brazing device characterized by being connected via a valve. 2. The continuous vacuum according to claim 1, characterized in that at least one preparation chamber having a vacuum exhaust path connected to the chamber wall is connected to the entrance of the degreasing chamber via an inlet gate valve of the degreasing chamber. Brazing equipment. 3. At least one extraction chamber having a vacuum exhaust path connected to the chamber wall is connected to the outlet of the vacuum brazing furnace via an outlet gate valve of the vacuum brazing furnace. 2. The continuous vacuum brazing apparatus according to 2.
JP30956688A 1988-12-07 1988-12-07 Continuous type vacuum brazing device Pending JPH02155563A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30956688A JPH02155563A (en) 1988-12-07 1988-12-07 Continuous type vacuum brazing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30956688A JPH02155563A (en) 1988-12-07 1988-12-07 Continuous type vacuum brazing device

Publications (1)

Publication Number Publication Date
JPH02155563A true JPH02155563A (en) 1990-06-14

Family

ID=17994567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30956688A Pending JPH02155563A (en) 1988-12-07 1988-12-07 Continuous type vacuum brazing device

Country Status (1)

Country Link
JP (1) JPH02155563A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04262865A (en) * 1991-01-22 1992-09-18 Kenji Kondo Soldering device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532368A (en) * 1976-06-29 1978-01-11 Chugai Ro Kogyo Kaisha Ltd Continuous aluminum vacuum brazing furnace
JPS54118358A (en) * 1978-03-07 1979-09-13 Toyo Radiator Kk Production of aluminum heat exchanger
JPS55149774A (en) * 1980-04-28 1980-11-21 Toyo Radiator Kk Production of heat exchanger made of aluminum
JPS63199071A (en) * 1987-02-14 1988-08-17 Ulvac Corp Vacuum brazing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532368A (en) * 1976-06-29 1978-01-11 Chugai Ro Kogyo Kaisha Ltd Continuous aluminum vacuum brazing furnace
JPS54118358A (en) * 1978-03-07 1979-09-13 Toyo Radiator Kk Production of aluminum heat exchanger
JPS55149774A (en) * 1980-04-28 1980-11-21 Toyo Radiator Kk Production of heat exchanger made of aluminum
JPS63199071A (en) * 1987-02-14 1988-08-17 Ulvac Corp Vacuum brazing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04262865A (en) * 1991-01-22 1992-09-18 Kenji Kondo Soldering device

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