JP2686798B2 - Continuous vacuum brazing device - Google Patents

Continuous vacuum brazing device

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Publication number
JP2686798B2
JP2686798B2 JP63309567A JP30956788A JP2686798B2 JP 2686798 B2 JP2686798 B2 JP 2686798B2 JP 63309567 A JP63309567 A JP 63309567A JP 30956788 A JP30956788 A JP 30956788A JP 2686798 B2 JP2686798 B2 JP 2686798B2
Authority
JP
Japan
Prior art keywords
chamber
vacuum
vacuum brazing
exhaust path
brazing furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63309567A
Other languages
Japanese (ja)
Other versions
JPH02155564A (en
Inventor
篤 中塚
丈夫 加藤
Original Assignee
日本真空技術株式会社
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Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP63309567A priority Critical patent/JP2686798B2/en
Publication of JPH02155564A publication Critical patent/JPH02155564A/en
Application granted granted Critical
Publication of JP2686798B2 publication Critical patent/JP2686798B2/en
Anticipated expiration legal-status Critical
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Description

【発明の詳細な説明】 (産業上の利用分野) この発明は連続式真空ろう付装置に関するものであ
る。
The present invention relates to a continuous vacuum brazing apparatus.

(従来の技術) 素材をプレス加工、切削加工等の加工をしてから組立
てて治具に固定される被処理物は、加工中に油が付着す
るため、真空ろう付炉に挿入して、ろう付け処理をする
前には、付着した油を脱脂しなければならない。
(Prior art) The object to be processed, which is assembled and fixed to the jig after the material is pressed, cut, etc., has oil adhering during processing, so insert it into a vacuum brazing furnace. The applied oil must be degreased before brazing.

そこで、従来の真空ろう付装置の第1の例は、真空ろ
う付炉を単独に設け、そして、被処理物に付着した油を
有機溶剤で洗浄して脱油する洗浄工程設備を、真空ろう
付炉とは別個に設けていた。
Therefore, the first example of the conventional vacuum brazing apparatus is that a vacuum brazing furnace is separately provided, and the cleaning process equipment for cleaning the oil adhering to the object to be processed with an organic solvent to remove oil is used as the vacuum brazing apparatus. It was provided separately from the furnace.

また、第2の例は、被処理物に付着した油を単独に真
空中で加熱するものであった。
Further, in the second example, the oil adhering to the object to be treated is independently heated in vacuum.

(発明が解決しようとする課題) 従来の連続式真空ろう付装置の第1の例は、上記のよ
うに真空ろう付炉とは別個に、被処理物に付着した油を
有機溶剤で洗浄して脱油する洗浄工程設備が設けられて
いたので、そのままでは有機溶剤による公害が発生す
る。そのため、公害防止設備が付随的に必要となり、設
備費がかなりかかった。また、洗浄工程設備の設置スペ
ースや運転作業員が必要になり、ランニングコスト低減
への障害となっていた。しかも、熱交換器のような複雑
な形状の被処理物では十分に脱脂が行なえないため、こ
のような被処理物を真空ろう付炉に挿入すると、真空ろ
う付炉の汚染及びろう付け不良が発生する等の問題があ
った。
(Problem to be Solved by the Invention) A first example of a conventional continuous vacuum brazing apparatus is to wash oil adhered to an object with an organic solvent separately from the vacuum brazing furnace as described above. Since there was a cleaning process facility that deoils the oil, pollution with organic solvents would occur as it is. Therefore, pollution control equipment was required incidentally, and the equipment cost was considerably high. In addition, the installation space for the cleaning process equipment and operating personnel are required, which has been an obstacle to reducing the running cost. Moreover, since a workpiece having a complicated shape such as a heat exchanger cannot be sufficiently degreased, if such a workpiece is inserted into a vacuum brazing furnace, contamination of the vacuum brazing furnace and defective brazing will occur. There was a problem such as occurrence.

また、第2の例は、真空中で被処理物を加熱するだけ
では、被処理物から油脂類が離脱するのに長時間を要す
ると共に、離脱した油脂類が真空ポンプまで到着してポ
ンプ油に混入すると、真空ポンプの性能を著しく劣化さ
せる問題があった。
In the second example, it takes a long time for oils and fats to separate from the object to be processed only by heating the object to be processed in a vacuum, and the separated oils and fats reach the vacuum pump to pump oil. If it is mixed in with, there is a problem that the performance of the vacuum pump is significantly deteriorated.

この発明は、上記のような従来の問題を解決して、有
機溶剤による公害がなく、省設置スペースで、運転作業
員の削減がはかられ、真空ろう付炉の汚染及びろう付け
不良を防止すると共に、加熱時間を短時間にし、真空ポ
ンプの性能を劣化させない連続式真空ろう付装置を提供
することを目的としている。
The present invention solves the above-mentioned conventional problems, does not cause pollution by organic solvents, saves installation space, reduces the number of operating workers, and prevents contamination and defective brazing of a vacuum brazing furnace. In addition, it is an object of the present invention to provide a continuous vacuum brazing device that shortens the heating time and does not deteriorate the performance of the vacuum pump.

(課題を解決するための手段) 上記目的を達成するために、この発明の連続式真空ろ
う付装置は、室壁に、キャリアガス導入経路とオイルト
ラップを経路中に有する真空排気経路とを接続し、室入
口に入口仕切弁を設け、室内部に加熱器を備えた少なく
とも1つ以上の脱脂室と、同じく室壁にキャリアガス導
入経路と真空排気経路とを接続し、室内部に加熱器を備
えた少なくとも1つ以上の予備加熱室とを第1の遮断仕
切弁を介して連接すると共に、前記予備加熱室と、炉壁
にキャリアガス導入経路と真空排気経路とを接続した真
空ろう付炉とを第2の遮断仕切弁を介して連接したこと
を特徴としている。
(Means for Solving the Problem) In order to achieve the above object, in the continuous vacuum brazing apparatus of the present invention, a carrier gas introduction path and a vacuum exhaust path having an oil trap in the path are connected to a chamber wall. Then, an inlet sluice valve is provided at the chamber inlet, at least one degreasing chamber having a heater inside the chamber, and a carrier gas introduction path and a vacuum exhaust path are also connected to the chamber wall and the heater inside the room. Vacuum brazing in which at least one or more preheating chambers provided with are connected through a first shut-off sluice valve, and the preheating chamber is connected to the furnace wall with a carrier gas introduction path and a vacuum exhaust path. It is characterized in that it is connected to the furnace via a second shut-off gate valve.

なお、脱脂室の入口には、真空排気経路を室壁に接続
した少なくとも1つ以上の準備室を、脱脂室の入口仕切
弁を介して連接してもよい。また、真空ろう付炉の出口
にも、真空排気経路を室壁に接続した少なくとも1つ以
上の取出室を、真空ろう付炉の出口仕切弁を介して連接
してもよい。
It should be noted that at least one or more preparation chambers having a vacuum exhaust path connected to the chamber wall may be connected to the inlet of the degreasing chamber via an inlet gate valve of the degreasing chamber. Further, at least one or more extraction chambers whose vacuum exhaust path is connected to the chamber wall may be connected to the outlet of the vacuum brazing furnace through an outlet sluice valve of the vacuum brazing furnace.

(作用) この発明においては、脱脂室の入口仕切弁を開き、被
処理物(図示せず)を脱脂室に挿入した後、入口仕切弁
を閉じ、脱脂室を真空排気経路で真空排気し、そして、
真空排気を続けながら、キャリアガス導入経路より脱脂
室にキャリアガスを導入し、加熱器で被処理物を一定時
間加熱すると、被処理物に付着していた油は蒸発して、
キャリアガスと共に脱脂室より排気され、真空排気経路
中のオイルトラップでトラップされるようになる。その
後、第1の遮断仕切弁を開き、予備加熱室の真空排気経
路を閉じ、かつキャリアガスを予備加熱室より導入しな
がら、被処理物を予備加熱室に送り、第1の遮断仕切弁
を閉じて排気し、そこで被処理物を加熱器で加熱する。
予備加熱室での被処理物の加熱後、第2の遮断仕切弁を
開くと共に、予備加熱室の真空排気経路を開き、そして
真空ろう付炉の真空排気経路を閉じ、かつ真空ろう付炉
中にキャリアガスを導入しながら、被処理物を予備加熱
室より真空ろう付炉に送る。このとき、真空ろう付炉中
に導入されるキャリアガスは、真空ろう付炉より予備加
熱室に流れ、そして、予備加熱室の真空排気経路を通っ
て排気され、真空ろう付炉における油の汚染が防止され
るようになる。被処理物を真空ろう付炉に送った後、遮
断仕切弁を閉じ、そして、真空ろう付炉を真空排気しな
がら、加熱器で被処理物を加熱すると、被処理物はろう
付されるようになる。
(Operation) In the present invention, the inlet sluice valve of the degreasing chamber is opened, the object to be treated (not shown) is inserted into the degreasing chamber, the inlet sluice valve is closed, and the degreasing chamber is evacuated by the vacuum exhaust path. And
While continuing vacuum evacuation, introducing the carrier gas into the degreasing chamber from the carrier gas introduction path and heating the object to be processed for a certain period of time with the heater, the oil adhering to the object to be evaporated evaporates,
The carrier gas is exhausted from the degreasing chamber and is trapped by an oil trap in the vacuum exhaust path. After that, the first shut-off gate valve is opened, the vacuum exhaust path of the preheating chamber is closed, and while the carrier gas is introduced from the preheating chamber, the object to be processed is sent to the preheating chamber, and the first shut-off gate valve is opened. It is closed and evacuated, whereupon the work piece is heated with a heater.
After heating the object to be processed in the preheating chamber, the second shut-off sluice valve is opened, the vacuum exhaust path of the preheating chamber is opened, and the vacuum exhaust path of the vacuum brazing furnace is closed, and the vacuum brazing furnace is in progress. While introducing the carrier gas into the chamber, the object to be treated is sent from the preheating chamber to the vacuum brazing furnace. At this time, the carrier gas introduced into the vacuum brazing furnace flows from the vacuum brazing furnace to the preheating chamber, and is exhausted through the vacuum exhaust path of the preheating chamber to contaminate the oil in the vacuum brazing furnace. Will be prevented. After sending the work to the vacuum brazing furnace, close the shut-off sluice valve, and heat the work with a heater while evacuating the vacuum brazing furnace, the work will be brazed. become.

なお、脱脂室の入口に準備室を連接した場合には、被
処理物を準備室に入れてから、準備室を真空排気し、そ
して、準備室の真空排気後に、被処理物を準備室より脱
脂室に挿入する。また、真空ろう付炉の出口に取出室を
連接した場合には、取出室を真空排気してから、被処理
物を真空ろう付炉より取出室に挿入し、そして、その挿
入後に、取出室を大気圧に戻して、被処理物を取出室よ
り取出す。
When the preparation chamber is connected to the inlet of the degreasing chamber, the object to be treated is put into the preparation chamber, and then the preparation chamber is evacuated, and after the chamber is evacuated, the object to be treated is removed from the preparation chamber. Insert into the degreasing chamber. If the outlet of the vacuum brazing furnace is connected to the outlet of the vacuum brazing furnace, the outlet chamber should be evacuated, the object to be processed should be inserted into the outlet of the vacuum brazing furnace, and after the insertion, the outlet should be removed. Is returned to atmospheric pressure, and the object to be processed is taken out from the extraction chamber.

(実施例) 以下、この発明の実施例について図面を参照しながら
説明する。
(Example) Hereinafter, an example of the present invention will be described with reference to the drawings.

第1図はこの発明の実施例を示しており、同図におい
て、脱脂室1の室壁1aにはキャリアガス導入経路2と真
空排気経路3とが接続され、キャリアガス導入経路2の
経路中には弁2aが設けられ、真空排気経路3の経路中に
は弁3aとオイルトラップ3bとが設けられている。また、
脱脂室1の入口には入口仕切弁4が設けられ、脱脂室1
の内部には加熱器5が設けられている。更に、脱脂室1
の出口には、遮断仕切弁6を介して、予備加熱室7が連
接されている。予備加熱室7の室壁7aにはキャリアガス
導入経路8と真空排気経路9とが接続され、キャリアガ
ス導入経路8の経路中には弁8aが設けられ、真空排気経
路9の経路中には弁9aが設けられている。予備加熱室7
の内部には加熱器10が設けられている。予備加熱室7の
出口には、遮断仕切弁11を介して、真空ろう付炉12が連
接されている。真空ろう付炉12の炉壁12aにはキャリア
ガス導入経路13と真空排気経路14とが接続され、キャリ
アガス導入経路13の経路中には弁13aが設けられ、真空
排気経路14の経路中には弁14aが設けられている。ま
た、真空ろう付炉12の出口には出口仕切弁15が設けら
れ、真空ろう付炉12の内部には加熱器16が設けられてい
る。
FIG. 1 shows an embodiment of the present invention. In FIG. 1, a carrier gas introduction path 2 and a vacuum exhaust path 3 are connected to a chamber wall 1a of a degreasing chamber 1, and a carrier gas introduction path 2 Is provided with a valve 2a, and a valve 3a and an oil trap 3b are provided in the vacuum exhaust path 3. Also,
An inlet sluice valve 4 is provided at the entrance of the degreasing chamber 1,
A heater 5 is provided inside the. Furthermore, the degreasing chamber 1
The pre-heating chamber 7 is connected to the outlet of the through a shut-off sluice valve 6. A carrier gas introduction path 8 and a vacuum exhaust path 9 are connected to a chamber wall 7a of the preheating chamber 7, a valve 8a is provided in the path of the carrier gas introduction path 8, and a vacuum exhaust path 9 is provided in the path of the vacuum exhaust path 9. A valve 9a is provided. Preheating chamber 7
A heater 10 is provided inside. A vacuum brazing furnace 12 is connected to the outlet of the preheating chamber 7 via a shutoff sluice valve 11. A carrier gas introduction path 13 and a vacuum exhaust path 14 are connected to the furnace wall 12a of the vacuum brazing furnace 12, a valve 13a is provided in the path of the carrier gas introduction path 13, and a vacuum exhaust path 14 is provided in the path. Is provided with a valve 14a. Further, an outlet sluice valve 15 is provided at the outlet of the vacuum brazing furnace 12, and a heater 16 is provided inside the vacuum brazing furnace 12.

したがって、上記のような装置を用いて、油の付着し
た被処理物を脱脂する場合には、遮断仕切弁6を閉じ
て、脱脂室1の入口仕切弁4を開き、被処理物(図示せ
ず)を脱脂室1に挿入する。挿入後、入口仕切弁4を閉
じ、脱脂室1を真空排気経路3で真空排気し、そして、
真空排気を続けながら、キャリアガス導入経路2より脱
脂室1にキャリアガスを導入すると共に、加熱器5で被
処理物を一定時間加熱する。被処理物を減圧下で加熱す
ると、被処理物に付着していた油は蒸発して、キャリア
ガスと共に脱脂室1より排気され、真空排気経路3中の
オイルトラップ3bでトラップされるようになる。その
後、遮断仕切弁6を開いて、付着していた油の脱脂され
た被処理物は、脱脂室1より予備加熱室7に送られる。
このとき、予備加熱室7の真空排気経路9中の弁9aを閉
じて、キャリアガス導入経路8中の弁8aを開き、予備加
熱室7中にキャリアガスを導入すると、そのキャリアガ
スは、予備加熱室7より脱脂室1に流れ、そして真空排
気経路3を通って排気される。そのため、被処理物に付
着していた油の蒸発は脱脂室1より予備加熱室7に流れ
なくなる。被処理物を予備加熱室7に送った後、遮断仕
切弁6を閉じると共に、真空排気経路9中の弁9aを開
き、加熱器10で加熱する。予備加熱室7での被処理物の
加熱後、第2の遮断仕切弁11を開くと共に真空ろう付炉
12の真空排気経路14中の弁14aを閉じ、かつキャリアガ
ス導入経路13中の弁13aを開き、真空ろう付炉12中にキ
ャリアガスを導入しながら、被処理物を予備加熱室7よ
り真空ろう付炉12に送る。このとき、真空ろう付炉12中
に導入されるキャリアガスは、真空ろう付炉12より予備
加熱室7に流れ、そして、予備加熱室7の真空排気経路
9を通って排気され、真空ろう付炉12における油の汚染
が防止されるようになる。被処理物を真空ろう付炉12に
送った後、遮断仕切弁11を閉じ、そして、真空排気経路
14中の弁14aを開き、真空ろう付け炉12を真空排気しな
がら、加熱器16で被処理物を加熱すると、被処理物はろ
う付けされる。
Therefore, when degreasing an object to be treated with oil using the apparatus as described above, the shut-off sluice valve 6 is closed, the inlet sluice valve 4 of the degreasing chamber 1 is opened, and the object to be treated (not shown) is shown. No.) is inserted into the degreasing chamber 1. After the insertion, the inlet sluice valve 4 is closed, the degreasing chamber 1 is evacuated through the vacuum exhaust path 3, and
While evacuation is continued, the carrier gas is introduced into the degreasing chamber 1 through the carrier gas introduction path 2 and the object to be treated is heated by the heater 5 for a certain period of time. When the object to be processed is heated under reduced pressure, the oil attached to the object to be processed evaporates, is exhausted from the degreasing chamber 1 together with the carrier gas, and is trapped by the oil trap 3b in the vacuum exhaust path 3. . After that, the shut-off sluice valve 6 is opened, and the degreased object to be treated that has adhered oil is sent from the degreasing chamber 1 to the preheating chamber 7.
At this time, when the valve 9a in the vacuum exhaust path 9 of the preheating chamber 7 is closed and the valve 8a in the carrier gas introduction path 8 is opened to introduce the carrier gas into the preheating chamber 7, the carrier gas is It flows from the heating chamber 7 to the degreasing chamber 1 and is exhausted through the vacuum exhaust path 3. Therefore, the evaporation of the oil attached to the object to be processed does not flow from the degreasing chamber 1 to the preheating chamber 7. After the object to be processed is sent to the preheating chamber 7, the shut-off sluice valve 6 is closed, the valve 9a in the vacuum exhaust path 9 is opened, and the heater 10 heats it. After heating the object to be processed in the preheating chamber 7, the second shutoff sluice valve 11 is opened and the vacuum brazing furnace is opened.
The valve 14a in the vacuum evacuation path 14 of 12 is closed, and the valve 13a in the carrier gas introduction path 13 is opened to introduce the carrier gas into the vacuum brazing furnace 12 while vacuuming the workpiece from the preheating chamber 7. Send to the brazing furnace 12. At this time, the carrier gas introduced into the vacuum brazing furnace 12 flows from the vacuum brazing furnace 12 into the preheating chamber 7 and is exhausted through the vacuum exhaust path 9 of the preheating chamber 7 to be vacuum brazed. Oil contamination in the furnace 12 is prevented. After sending the workpiece to the vacuum brazing furnace 12, the shut-off sluice valve 11 is closed, and the vacuum exhaust path
The object to be treated is brazed by heating the object to be treated with the heater 16 while opening the valve 14a in 14 and evacuating the vacuum brazing furnace 12.

なお、上記実施例では、脱脂室1に予備加熱室7と真
空ろう付炉12とを順次連接したものを示しているが、こ
れに限定されることなく、第2図に示すように、脱脂室
1の入口側に準備室21を入口仕切弁4を介して連接して
もよい。準備室21を連接すれば、その準備室21を真空排
気又は大気圧に戻すことにより、脱脂室1を常に減圧し
ておくことができ、被処理物の処理効率を向上させるこ
とができるようになる。第2図において、22は真空排気
経路、22aは弁、23は入口仕切弁である。また、第3図
に示すように、真空ろう付炉12の出口側に取出室31を、
出口仕切弁15を介して連接してもよい。取出室31を連接
すれば、その取出室31を真空排気又は大気圧に戻すこと
により、真空ろう付炉12を常に減圧しておくことがで
き、被処理物の処理効率を向上させることができるよう
になる。第3図において、32は真空排気経路、32aは
弁、33は出口仕切弁である。更に、第4図に示すよう
に、脱脂室1の入口側に準備室21を連接し、真空ろう付
炉12の出口側に取出室31を連接してもよい。準備室21と
取出室31とを連接すれば、準備室21と取出室31とを真空
排気又は大気圧に戻すことにより、脱脂室1と真空ろう
付炉12とを常に減圧しておくことができ、被処理物の処
理効率を向上させることができるようになる。第4図に
おいて、22は真空排気経路、22aは弁、23は入口仕切弁
であり、32は真空排気経路、32aは弁、33は出口仕切弁
である。更にその上、第5図に示すように、脱脂室1の
入口にもう1つの脱脂室51を連接すると共に、真空ろう
付炉12の出口側に取出室31を連接してもよい。第5図に
おいて、52は真空排気経路、52aは弁、52bはオイルトラ
ップ、53はキャリアガス導入経路、53aは弁、54は加熱
器、55は入口仕切弁である。また、第6図に示すように
脱脂室1の入口側にもう1つの脱脂室51と準備室21とを
連接し、真空ろう付炉12の出口側に取出室31を連接して
もよい。更に、第7図に示すように脱脂室1の入口側に
もう1つの脱脂室51を連接し、予備加熱室を2つにし、
真空ろう付炉12の出口側に取出室31を連接してもよい。
第7図において、71は予備加熱室、72は真空排気経路、
72aは弁、73はキャリアガス導入経路、73aは弁、74は入
口仕切弁、75は加熱器である。更にその上、第8図に示
すように脱脂室1の入口側に準備室21を連接し、予備加
熱室を2つにし、真空ろう付炉12の出口側に取出室31を
連接してもよい。また、第9図に示すように、脱脂室1
の入口側に準備室21を連接し、予備加熱室を2つにし、
真空ろう付炉12の出口側に2つの取出室31を連接しても
よい。また、第10図に示すように、脱脂室1の入口側に
もう1つの脱脂室51と準備室21とを連接し、真空ろう付
炉12の出口側に2つの取出室31を連接してもよい。
In the above embodiment, the preheating chamber 7 and the vacuum brazing furnace 12 are sequentially connected to the degreasing chamber 1, but the degreasing chamber 1 is not limited to this, and as shown in FIG. The preparation chamber 21 may be connected to the inlet side of the chamber 1 via the inlet gate valve 4. When the preparation chamber 21 is connected, the degreasing chamber 1 can be constantly depressurized by returning the preparation chamber 21 to vacuum exhaust or returning to atmospheric pressure, so that the processing efficiency of the object to be processed can be improved. Become. In FIG. 2, 22 is a vacuum exhaust path, 22a is a valve, and 23 is an inlet gate valve. Further, as shown in FIG. 3, an extraction chamber 31 is provided on the outlet side of the vacuum brazing furnace 12,
It may be connected through the outlet sluice valve 15. When the extraction chamber 31 is connected, the vacuum brazing furnace 12 can be constantly depressurized by returning the extraction chamber 31 to vacuum exhaust or to atmospheric pressure, and the processing efficiency of the object to be processed can be improved. Like In FIG. 3, 32 is a vacuum exhaust path, 32a is a valve, and 33 is an outlet sluice valve. Further, as shown in FIG. 4, the preparation chamber 21 may be connected to the inlet side of the degreasing chamber 1 and the extraction chamber 31 may be connected to the outlet side of the vacuum brazing furnace 12. If the preparation chamber 21 and the extraction chamber 31 are connected to each other, the degreasing chamber 1 and the vacuum brazing furnace 12 can be constantly depressurized by returning the preparation chamber 21 and the extraction chamber 31 to vacuum exhaust or atmospheric pressure. Therefore, the processing efficiency of the object to be processed can be improved. In FIG. 4, 22 is a vacuum exhaust path, 22a is a valve, 23 is an inlet gate valve, 32 is a vacuum exhaust path, 32a is a valve, and 33 is an outlet gate valve. Furthermore, as shown in FIG. 5, another degreasing chamber 51 may be connected to the inlet of the degreasing chamber 1 and an outlet chamber 31 may be connected to the outlet side of the vacuum brazing furnace 12. In FIG. 5, 52 is a vacuum exhaust path, 52a is a valve, 52b is an oil trap, 53 is a carrier gas introduction path, 53a is a valve, 54 is a heater, and 55 is an inlet gate valve. Further, as shown in FIG. 6, another degreasing chamber 51 and the preparation chamber 21 may be connected to the inlet side of the degreasing chamber 1, and the extraction chamber 31 may be connected to the outlet side of the vacuum brazing furnace 12. Further, as shown in FIG. 7, another degreasing chamber 51 is connected to the inlet side of the degreasing chamber 1 to make two preheating chambers,
The extraction chamber 31 may be connected to the outlet side of the vacuum brazing furnace 12.
In FIG. 7, 71 is a preheating chamber, 72 is a vacuum exhaust path,
72a is a valve, 73 is a carrier gas introduction path, 73a is a valve, 74 is an inlet gate valve, and 75 is a heater. Furthermore, as shown in FIG. 8, even if the preparation chamber 21 is connected to the inlet side of the degreasing chamber 1, two preheating chambers are provided, and the extraction chamber 31 is connected to the outlet side of the vacuum brazing furnace 12. Good. Further, as shown in FIG. 9, the degreasing chamber 1
The preparation room 21 is connected to the entrance side of the
The two extraction chambers 31 may be connected to the outlet side of the vacuum brazing furnace 12. In addition, as shown in FIG. 10, another degreasing chamber 51 and a preparation chamber 21 are connected to the inlet side of the degreasing chamber 1, and two extraction chambers 31 are connected to the outlet side of the vacuum brazing furnace 12. Good.

(発明の効果) この発明は、上記のように脱脂室、予備加熱室真空ろ
う付炉の順に連接されており、脱脂室と真空ろう付炉と
の間には予備加熱室があるので、脱脂室で蒸発した油が
決して真空ろう付炉に流れることがなく、真空ろう付炉
の汚染及びろう付け不良を防止することができる。すな
わち、長時間、操業しても真空ろう付炉が汚染されるこ
とがない。また真空ろう付炉でろう付けされる前に、予
備加熱室によって加熱されるので、真空ろう付炉におけ
る加熱時間を短時間にできると共に、真空ポンプの性能
を劣化させないので、真空ろう付炉の加熱器の負担を少
なくして、被処理物の処理効率を向上させることができ
る。
(Effect of the invention) As described above, according to the present invention, the degreasing chamber and the preheating chamber vacuum brazing furnace are connected in this order, and the preheating chamber is provided between the degreasing chamber and the vacuum brazing furnace. The oil vaporized in the chamber never flows into the vacuum brazing furnace, which prevents contamination of the vacuum brazing furnace and poor brazing. That is, the vacuum brazing furnace is not contaminated even if it is operated for a long time. Further, since it is heated in the preheating chamber before being brazed in the vacuum brazing furnace, the heating time in the vacuum brazing furnace can be shortened and the performance of the vacuum pump is not deteriorated. It is possible to reduce the burden on the heater and improve the processing efficiency of the object to be processed.

【図面の簡単な説明】[Brief description of the drawings]

第1図はこの発明の実施例を示す説明図である。第2
図、第3図、第4図、第5図、第6図、第7図,第8
図、第9図及び第10図はこの発明のその他の実施例を示
す説明図である。 図中、 1……脱脂室 1a……室壁 2……キャリアガス導入経路 3……真空排気経路 3b……オイルトラップ 4……入口仕切弁 5……加熱器 6……遮断仕切弁 7……予備加熱室 7a……室壁 8……キャリアガス導入経路 9……真空排気経路 10……加熱器 12……真空ろう付炉 13……キャリアガス導入経路 14……真空排気経路 15……出口仕切弁 16……加熱器 21……準備室 22……真空排気経路 31……取出室 32……真空排気経路 71……予備加熱室 72……真空排気経路 73……キャリアガス導入経路 なお、図中、同一符号は同一又は相当部分を示してい
る。
FIG. 1 is an explanatory view showing an embodiment of the present invention. Second
Figure 3, Figure 3, Figure 4, Figure 5, Figure 6, Figure 7, and Figure 8
FIGS. 9, 9 and 10 are explanatory views showing other embodiments of the present invention. In the figure, 1 ... Degreasing chamber 1a ... Chamber wall 2 ... Carrier gas introduction path 3 ... Vacuum exhaust path 3b ... Oil trap 4 ... Inlet gate valve 5 ... Heater 6 ... Shut-off valve 7 ... … Pre-heating chamber 7a …… Chamber wall 8 …… Carrier gas introduction path 9 …… Vacuum exhaust path 10 …… Heater 12 …… Vacuum brazing furnace 13 …… Carrier gas introduction path 14 …… Vacuum exhaust path 15 …… Outlet sluice valve 16 …… Heater 21 …… Preparation room 22 …… Vacuum exhaust path 31 …… Ejection room 32 …… Vacuum exhaust path 71 …… Preheating chamber 72 …… Vacuum exhaust path 73 …… Carrier gas introduction path In the drawings, the same reference numerals indicate the same or corresponding parts.

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】室壁に、キャリアガス導入経路とオイルト
ラップを経路中に有する真空排気経路とを接続し、室入
口に入口仕切弁を設け、室内部に加熱器を備えた少なく
とも1つ以上の脱脂室と、同じく室壁にキャリアガス導
入経路と真空排気経路とを接続し、室内部に加熱器を備
えた少なくとも1つ以上の予備加熱室とを第1の遮断仕
切弁を介して連接すると共に、前記予備加熱室と、炉壁
にキャリアガス導入経路と真空排気経路とを接続した真
空ろう付炉とを第2の遮断仕切弁を介して連接したこと
を特徴とする連続式真空ろう付装置。
1. At least one or more of a chamber wall which is connected to a carrier gas introduction path and a vacuum exhaust path having an oil trap in the path, an inlet sluice valve is provided at the chamber inlet, and a heater is provided inside the chamber. The degreasing chamber and the carrier gas introduction path and the vacuum exhaust path are also connected to the chamber wall, and at least one preheating chamber provided with a heater inside the chamber is connected via the first shut-off gate valve. In addition, the preheating chamber and a vacuum brazing furnace in which a carrier gas introduction path and a vacuum exhaust path are connected to the furnace wall are connected via a second shut-off sluice valve. Attached device.
【請求項2】前記脱脂室の入口に、真空排気経路を室壁
に接続した少なくとも1つ以上の準備室を、脱脂室の入
口仕切弁を介して連接したことを特徴とする請求項1記
載の連続式真空ろう付装置。
2. The inlet of the degreasing chamber is connected to at least one preparatory chamber having a vacuum exhaust path connected to the chamber wall via an inlet gate valve of the degreasing chamber. Continuous vacuum brazing equipment.
【請求項3】前記真空ろう付炉の出口に、真空排気経路
を室壁に接続した少なくとも1つ以上の取出室を、前記
真空ろう付炉の出口仕切弁を介して連接したことを特徴
とする請求項1又は2に記載の連続式真空ろう付装置。
3. The outlet of the vacuum brazing furnace is connected to at least one or more extraction chambers whose vacuum exhaust path is connected to a chamber wall via an outlet sluice valve of the vacuum brazing furnace. The continuous vacuum brazing apparatus according to claim 1 or 2.
JP63309567A 1988-12-07 1988-12-07 Continuous vacuum brazing device Expired - Fee Related JP2686798B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63309567A JP2686798B2 (en) 1988-12-07 1988-12-07 Continuous vacuum brazing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63309567A JP2686798B2 (en) 1988-12-07 1988-12-07 Continuous vacuum brazing device

Publications (2)

Publication Number Publication Date
JPH02155564A JPH02155564A (en) 1990-06-14
JP2686798B2 true JP2686798B2 (en) 1997-12-08

Family

ID=17994580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63309567A Expired - Fee Related JP2686798B2 (en) 1988-12-07 1988-12-07 Continuous vacuum brazing device

Country Status (1)

Country Link
JP (1) JP2686798B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04262865A (en) * 1991-01-22 1992-09-18 Kenji Kondo Soldering device
CN113245654B (en) * 2021-06-22 2021-12-31 广东钜兴电子科技有限公司 Automatic chip welding process and welding device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532368A (en) * 1976-06-29 1978-01-11 Chugai Ro Kogyo Kaisha Ltd Continuous aluminum vacuum brazing furnace
JPS54118358A (en) * 1978-03-07 1979-09-13 Toyo Radiator Kk Production of aluminum heat exchanger
JPS55149774A (en) * 1980-04-28 1980-11-21 Toyo Radiator Kk Production of heat exchanger made of aluminum
JPS63199071A (en) * 1987-02-14 1988-08-17 Ulvac Corp Vacuum brazing device
JPS62199259U (en) * 1987-06-02 1987-12-18

Also Published As

Publication number Publication date
JPH02155564A (en) 1990-06-14

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