JPH10332274A - Hotpress furnace - Google Patents

Hotpress furnace

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Publication number
JPH10332274A
JPH10332274A JP14526097A JP14526097A JPH10332274A JP H10332274 A JPH10332274 A JP H10332274A JP 14526097 A JP14526097 A JP 14526097A JP 14526097 A JP14526097 A JP 14526097A JP H10332274 A JPH10332274 A JP H10332274A
Authority
JP
Japan
Prior art keywords
furnace
space
gas
cover
discharge system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP14526097A
Other languages
Japanese (ja)
Inventor
Eiji Nakamu
栄治 中務
Ippei Yamauchi
一平 山内
Masao Takeda
正夫 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Mectem Inc
Original Assignee
Shimadzu Mectem Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Mectem Inc filed Critical Shimadzu Mectem Inc
Priority to JP14526097A priority Critical patent/JPH10332274A/en
Publication of JPH10332274A publication Critical patent/JPH10332274A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To prevent vapor or gas leaked into an inner furnace space from adhering to a heat insulation member or a side wall thus avoiding the contamination of the inside of the furnace by covering a gap defined between a die and a punch with a cover, discharging gas present in this inner space to the outside of the furnace directly, and providing means for introducing a carrier gas into the inner furnace space. SOLUTION: A material to be treated W is filled in a treatment space S1, a cover 4 and push rod 12 are set at given positions, and a furnace 1 is closed. A main gas discharge system 7 and an inner gas discharge system 5 are operated. When the degree of vacuum in an inner furnace space S3 and the treatment space S1 reaches a given degree of vacuum, a valve 72 of the main gas discharge system 7 is closed. While continuing the operation of the inner gas discharge system 5, the valve 62 of a gas introduction system is opened to introduce a carrier gas X into the inner furnace space S3 outside the cover 4. While applying a pressing force by way of a push rod 12, electricity is supplied to a heater 10 to start the heat treatment of the material W to be treated. Upon completion of the above-mentioned degassing process, the valve 62 is closed to stop the introduction of the gas, the main gas discharge system 7 is operated, and the supply amount of electricity to the heater 10 is increased to fire the material W to be treated.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ファインセラミッ
クス等の新素材を高い純度で製造する際に特に好適に利
用されるホットプレス炉に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hot press furnace particularly suitably used for producing a new material such as fine ceramics with high purity.

【0002】[0002]

【従来の技術】ホットプレスは、粉体を高温・高圧下に
焼結して高密度・高純度の素材を製造する技術である。
従来のホットプレス炉の一般的構造は、内部に処理空間
を閉成したダイス及びパンチと、ダイスを加熱するヒー
タと、ヒータを包囲する断熱材と、処理空間の外側の炉
内空間にキャリアガスを送り込むガス導入系と、炉内空
間を真空排気する外排気系とを設けてなる。
2. Description of the Related Art Hot pressing is a technique for producing a high-density and high-purity material by sintering powder under high temperature and high pressure.
The general structure of a conventional hot press furnace is as follows: a die and a punch having a closed processing space inside, a heater for heating the die, a heat insulating material surrounding the heater, and a carrier gas in a furnace space outside the processing space. And an external exhaust system for evacuating the furnace space.

【0003】作業工程は、主としてダイス内に充填した
粉体の処理物を加熱することにより、処理物から不純物
を除去する脱ガス工程と、プレス機構により高温下にお
いて押圧をかけて処理物を焼成する工程から成る。脱ガ
ス工程中は、ガス導入系より炉内空間にキャリアガスを
導入し、外排気系より排気を行いつつ加熱を行うこと
で、処理物より発生する蒸気やガスを炉外へ排気させて
いる。
[0003] The work process is mainly a degassing process of removing impurities from the processed material by heating the processed material of the powder filled in the die, and baking the processed material by applying pressure at a high temperature by a press mechanism. The step of performing During the degassing process, the carrier gas is introduced into the furnace space from the gas introduction system, and heating is performed while evacuating from the external exhaust system, thereby exhausting the steam and gas generated from the processed material to the outside of the furnace. .

【0004】[0004]

【発明が解決しようとする課題】ところが、処理空間は
炉内空間に対して、ダイス及びパンチによってのみ区切
られており、また、パンチは摺動可能に取り付けられて
いるため多くの摺動隙間がある。これにより、蒸気やガ
ス等は前記処理空間内より前記隙間を通り炉内空間に漏
出すると共に、漏出した蒸気やガスの該処理空間内への
逆流を許してしまう。また、従来のキャリアガスの流れ
では、炉内空間に漏出した蒸気やガスが断熱材や炉壁に
付着して炉内を汚染し、次回の処理時に再蒸発して処理
物に悪影響を及ぼす。その上、炉内汚染によってヒータ
や断熱材などの炉内各部品の劣化等も引き起こす。
However, the processing space is separated from the furnace space only by dies and punches, and since the punches are slidably mounted, many sliding gaps are formed. is there. As a result, steam, gas, and the like leak from the processing space through the gap into the furnace space, and allow the leaked steam or gas to flow back into the processing space. Further, in the flow of the conventional carrier gas, the vapor or gas leaked into the furnace space adheres to the heat insulating material and the furnace wall and contaminates the inside of the furnace. In addition, the inside of the furnace causes deterioration of each part in the furnace such as a heater and a heat insulating material.

【0005】[0005]

【課題を解決するための手段】上記の問題点を解決する
ために、本発明は、炉内にダイスとパンチによって閉成
される処理空間を有するホットプレス炉において、ダイ
スとパンチの間の隙間をカバーで覆い、カバーの内側空
間を直接炉外へ排気する排気系と共に、カバー外側の炉
内空間にキャリアガスを導入するためのガス導入手段を
設けた事を特徴とする。
SUMMARY OF THE INVENTION In order to solve the above problems, the present invention provides a hot press furnace having a processing space closed by a die and a punch in a furnace. And a gas introducing means for introducing a carrier gas into the furnace space outside the cover, as well as an exhaust system for directly exhausting the space inside the cover to the outside of the furnace.

【0006】以上により、処理空間内で発生する蒸気や
ガスは、処理空間の隙間より入るキャリアガスと共に炉
内空間を経ることなく直接炉外へ排気することが可能と
なる。これにより、炉内汚染を防いで炉内空間がクリー
ンな状態で処理を継続することができ、また、炉内部品
の劣化を防ぐことができる。
[0006] As described above, the steam and gas generated in the processing space can be directly exhausted to the outside of the furnace without passing through the furnace space together with the carrier gas entering from the gap in the processing space. Thereby, it is possible to prevent the inside of the furnace from being contaminated, to continue the process in a state where the inside of the furnace is clean, and to prevent the deterioration of the parts in the furnace.

【0007】[0007]

【実施例】以下、本発明の一実施例を、図面を参照して
説明する。この実施例におけるホットプレス炉1は、粉
体を高温・押圧下に焼結して高密度・高純度の素材を製
造するため用いられるもので、パンチ2及びダイス3に
よって閉成された処理空間S1を有した炉1と、パンチ
2とダイス3の隙間を覆うカバー4と、カバー4の内側
空間S2に通じる内排気系5と、カバー4の外側の炉内
空間S3にキャリアガスXを導入するためのガス導入手
段6と、炉内空間S3を排気する主排気系7から成る。
An embodiment of the present invention will be described below with reference to the drawings. The hot press furnace 1 in this embodiment is used for producing a high-density and high-purity material by sintering powder under high temperature and pressure, and a processing space closed by a punch 2 and a die 3. The furnace 1 having S1, the cover 4 covering the gap between the punch 2 and the die 3, the inner exhaust system 5 communicating with the inner space S2 of the cover 4, and the carrier gas X introduced into the furnace space S3 outside the cover 4. And a main exhaust system 7 for exhausting the furnace space S3.

【0008】詳述すると、炉1は、炉内底部1bにダイ
ス3を着脱可能に支持するダイス受台8を設け、このダ
イス受台8上に内側にスリーブ3aを有したダイス3を
載置し、内部に処理空間S1を形成している。パンチ2
の下端はこのダイス3の処理空間S1内に挿入されて処
理空間S1の蓋部を成し、上端はカバー4を貫通して外
部に延出するプッシュロッド12に接続し、処理物Wに
押圧を加えるようにしている。炉1内には他に処理空間
S1を加熱するヒータ10と、このヒータ10を包囲す
る断熱材11を具備しており、処理空間S1は、ダイス
3とパンチ2との隙間等を通じて炉内空間S3との間で
ある程度のガスの流通を許容し得るものである。
More specifically, the furnace 1 is provided with a die receiving stand 8 for detachably supporting the die 3 on the furnace bottom 1b, and the die 3 having the sleeve 3a inside is placed on the die receiving stand 8. In addition, a processing space S1 is formed inside. Punch 2
The lower end is inserted into the processing space S1 of the die 3 to form a lid of the processing space S1, and the upper end is connected to a push rod 12 penetrating through the cover 4 and extending to the outside, and pressed against the processing object W. Is added. The furnace 1 further includes a heater 10 for heating the processing space S1 and a heat insulating material 11 surrounding the heater 10. The processing space S1 is provided in the furnace space through a gap between the die 3 and the punch 2. A certain amount of gas flow with S3 can be allowed.

【0009】カバー4は、ダイス3の上部にパンチ2と
ダイス3の隙間を覆う様に取り付けられ、処理空間S1
と連通するカバー内側空間S2を形成している。上端の
所定位置には、プッシュロッド12を摺動可能にする孔
4aが設けられており、下端には、内排気管取り付け口
4bが開口している。カバー4とダイス3間及びカバー
4とプッシュロッド12間は多少の隙間を残している。
The cover 4 is attached to the upper part of the die 3 so as to cover the gap between the punch 2 and the die 3, and a processing space S1 is provided.
And a cover inner space S2 communicating with the cover. A hole 4a that allows the push rod 12 to slide is provided at a predetermined position at the upper end, and an inner exhaust pipe attachment port 4b is opened at the lower end. Some clearance is left between the cover 4 and the die 3 and between the cover 4 and the push rod 12.

【0010】内排気系5は、一端を炉胴1a及び断熱材
11を貫通して内排気管取り付け口4bよりカバー内側
空間S2に接続され、内排気管5bの上端に取り付けら
れたフローティングワッシャ5aでシールされている。
他端は主排気系7を構成するメカニカルブースタポンプ
71の吸込側にトラップ51及びバルブ52を介して接
続されている。炉1内へのセットは、内排気管5bの下
端を炉底部1bに設けられた内排気管受け部5c内に挿
入することで行う。取り付け時のずれは、フローティン
グワッシャ5aのカバー4に対する動きの許容範囲内で
解消される。また、挿入部を球面座にすることによりさ
らに密着した取り付けも可能である。
The internal exhaust system 5 has one end penetrating through the furnace body 1a and the heat insulating material 11, is connected to the cover inner space S2 through the internal exhaust pipe mounting port 4b, and has a floating washer 5a attached to the upper end of the internal exhaust pipe 5b. Sealed with.
The other end is connected to a suction side of a mechanical booster pump 71 constituting the main exhaust system 7 via a trap 51 and a valve 52. The setting in the furnace 1 is performed by inserting the lower end of the inner exhaust pipe 5b into the inner exhaust pipe receiving part 5c provided in the furnace bottom 1b. The displacement at the time of attachment is eliminated within the allowable range of the movement of the floating washer 5a with respect to the cover 4. Further, by making the insertion portion a spherical seat, it is possible to mount the device more closely.

【0011】ガス導入系6は、一端を前記炉胴1a及び
断熱材11を貫通してカバーの外側の炉内空間S3に接
続され、他端をガス供給源61にバルブ62を介して接
続されたもので、このガス供給源61にはN2 やAr
等のキャリアガスXが充填されている。主排気系7は、
一端を炉1を貫通して炉内空間S3に接続され、他端を
バルブ72を介してメカニカルブースタポンプ71を経
てロータリーポンプPに取り付けられる。
The gas introduction system 6 has one end connected to the furnace space S3 outside the cover through the furnace body 1a and the heat insulating material 11, and the other end connected to a gas supply source 61 via a valve 62. The gas supply source 61 includes N2 and Ar
And the like. The main exhaust system 7 is
One end is connected to the furnace space S3 through the furnace 1, and the other end is attached to a rotary pump P via a mechanical booster pump 71 via a valve 72.

【0012】以上のような構成により、本実施例の使用
方法を説明する。先ず、処理空間S1内に処理物Wを充
填し、カバー4及びプッシュロッド12を所定位置にセ
ットして炉1を閉める。主排気系7及び内排気系5を作
動させ、炉内空間S3及び処理空間S1が所定真空度に
達したなら、主排気系7のバルブ72を閉じ、内排気系
5を作動させたままの状態で、今度はガス導入系6のバ
ルブ62を開いてカバー4の外側の炉内空間S3にキャ
リアガスXを導入する。また、プッシュロッド12を介
して押圧を加えつつ、ヒータ10に通電して処理物Wに
対する熱処理を開始する。これにより、炉1内には、カ
バー外側の炉内空間S3に導入されたキャリアガスXが
図中矢印で示すようにダイス3とカバー4の隙間及びカ
バー4とプッシュロッド12の隙間を通って処理空間S
1及びカバー内側空間S2に達し、更に内排気系5を通
って炉1外に排出されるというキャリアガスXの流れが
形成される。したがって、処理物Wから発生する蒸気や
ガスは、このキャリアガスXの流れに乗って逐次炉1外
に直接排出される。そして、これらのガスはトラップ5
1において有害分を捕獲された後、ロータリーポンプP
を通じて放出される。
With the above configuration, a method of using the present embodiment will be described. First, the processing space W is filled with the processing object W, the cover 4 and the push rod 12 are set at predetermined positions, and the furnace 1 is closed. The main exhaust system 7 and the internal exhaust system 5 are operated, and when the furnace space S3 and the processing space S1 reach a predetermined degree of vacuum, the valve 72 of the main exhaust system 7 is closed, and the internal exhaust system 5 is operated. In this state, the valve 62 of the gas introduction system 6 is opened, and the carrier gas X is introduced into the furnace space S3 outside the cover 4. In addition, while applying pressure through the push rod 12, the heater 10 is energized to start the heat treatment on the workpiece W. As a result, the carrier gas X introduced into the furnace space S3 outside the cover passes through the gap between the die 3 and the cover 4 and the gap between the cover 4 and the push rod 12, as indicated by arrows in the drawing. Processing space S
1 and the cover inner space S2, and a flow of the carrier gas X is formed, which is further discharged to the outside of the furnace 1 through the internal exhaust system 5. Therefore, the steam and gas generated from the processing object W are sequentially discharged directly out of the furnace 1 along with the flow of the carrier gas X. And these gases are trap 5
After the harmful substances are captured in step 1, the rotary pump P
Released through.

【0013】次に、以上の脱ガス工程終了後ガス導入系
6のバルブ62を閉めてガス導入を止め、主排気系7を
作動させ、炉1内を真空引きする。同時にヒータ10へ
の通電量を増やして炉1内を高温加熱し、プッシュロッ
ド12により処理物Wに押圧をかけつつ焼成を行う。以
上によって、処理物Wから発生した蒸気やガスなどの不
純物は、炉1内に拡散することがないため、炉1内が汚
染されることはない。これにより、炉1内の各部品の劣
化等も惹起せずクリーンな炉内雰囲気を保った状態で、
処理が行える。また、カバー4の脱着は簡単で、且つ、
炉1内が汚染されないので接合を始めとする他用途との
兼用が容易になる。
Next, after the above-described degassing step, the valve 62 of the gas introduction system 6 is closed to stop gas introduction, the main exhaust system 7 is operated, and the inside of the furnace 1 is evacuated. At the same time, the inside of the furnace 1 is heated to a high temperature by increasing the amount of electricity to the heater 10, and firing is performed while pressing the workpiece W with the push rod 12. As described above, since impurities such as steam and gas generated from the processing object W do not diffuse into the furnace 1, the inside of the furnace 1 is not contaminated. As a result, while maintaining the clean furnace atmosphere without causing the deterioration of each part in the furnace 1 and the like,
Processing can be performed. Also, the attachment and detachment of the cover 4 is easy, and
Since the inside of the furnace 1 is not contaminated, it can be easily used for other purposes such as joining.

【0014】なお、各部の具体的な構成は、図示実施例
のものに限定されるものではなく、本発明の趣旨を逸脱
しない範囲で種々変形が可能である。例えば、内導入系
9とバルブ91を設け、処理空間S1に炉1外から直接
内排気系5を通り処理ガスYを導入することも可能であ
る。これにより、導入されたガスYは処理物Wに接触し
やすくなり処理物Wに対する反応を促進する作用を営
み、しかる後、外排気系7により排出される。また、こ
の時パルス状にガスYを導入すると、より効果的であ
る。なお、押圧の制御には油圧ハンドポンプを減速機付
モータとカム機構を用いて駆動したり、油圧ポンプと圧
力制御弁を用いることができる。
The specific configuration of each section is not limited to the illustrated embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, it is also possible to provide the internal introduction system 9 and the valve 91, and to introduce the processing gas Y from the outside of the furnace 1 directly into the processing space S1 through the internal exhaust system 5. Thereby, the introduced gas Y easily comes into contact with the processing object W and acts to promote a reaction to the processing object W, and thereafter is discharged by the external exhaust system 7. At this time, it is more effective to introduce the gas Y in a pulse form. For controlling the pressing, a hydraulic hand pump can be driven using a motor with a speed reducer and a cam mechanism, or a hydraulic pump and a pressure control valve can be used.

【0015】[0015]

【発明の効果】本発明は、以上説明したような形態で実
施され、以下に記載される効果を奏する。すなわち、本
発明のホットプレス炉は、炉内にパンチとダイスによっ
て閉成される処理空間を有するホットプレス炉におい
て、パンチとダイスの間の隙間をカバーで覆い、カバー
外側の炉内空間にガス導入手段よりキャリアガスを導入
し、カバーの内側空間に通じる内排気系より排気するこ
とで蒸気やガスを炉内空間を経ることなく処理空間より
直接炉外へ排気可能にしたものである。
The present invention is embodied in the form described above and has the following effects. That is, in the hot press furnace of the present invention, in a hot press furnace having a processing space closed by a punch and a die in the furnace, a gap between the punch and the die is covered with a cover, and a gas in a furnace space outside the cover is provided. The carrier gas is introduced from the introduction means and exhausted from the internal exhaust system communicating with the inside space of the cover, so that steam and gas can be directly exhausted from the processing space to the outside of the furnace without passing through the furnace internal space.

【0016】このため、炉内汚染を防止でき、これによ
り、純度の高い処理物の精製を可能とし、炉内各部品の
劣化等も惹起せず、また、ホットプレス炉の他用途との
兼用を容易にする等の優れた効果が奏される。
Therefore, contamination in the furnace can be prevented, thereby making it possible to purify a high-purity processed product, without causing deterioration of each part in the furnace, and also for other uses of the hot press furnace. Excellent effects, such as facilitating the operation, are achieved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示す模式的な構成図。FIG. 1 is a schematic configuration diagram showing one embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…ホットプレス炉 2…パンチ 3…ダイス 4…カバ− 5…内排気系 6…ガス導入手段(ガス導入系) S1…処理空間 S2…カバー内側空間 S3…炉内空間 X…キャリアガス DESCRIPTION OF SYMBOLS 1 ... Hot press furnace 2 ... Punch 3 ... Die 4 ... Cover 5 ... Internal exhaust system 6 ... Gas introduction means (gas introduction system) S1 ... Processing space S2 ... Cover inner space S3 ... Furnace space X ... Carrier gas

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】炉内にダイスとパンチによって閉成される
処理空間を有するホットプレス炉において、ダイスとパ
ンチの間の隙間をカバーで覆い、カバーの内側空間を直
接炉外へ排気する内排気系と共に、カバーの外側の炉内
空間にキャリアガスを導入するためのガス導入手段を設
けた事を特徴とするホットプレス炉。
In a hot press furnace having a processing space closed by a die and a punch in a furnace, an inner exhaust in which a gap between the die and a punch is covered with a cover and an inner space of the cover is directly discharged to the outside of the furnace. A hot press furnace characterized by comprising gas introduction means for introducing a carrier gas into the furnace space outside the cover together with the system.
JP14526097A 1997-06-03 1997-06-03 Hotpress furnace Withdrawn JPH10332274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14526097A JPH10332274A (en) 1997-06-03 1997-06-03 Hotpress furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14526097A JPH10332274A (en) 1997-06-03 1997-06-03 Hotpress furnace

Publications (1)

Publication Number Publication Date
JPH10332274A true JPH10332274A (en) 1998-12-15

Family

ID=15381024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14526097A Withdrawn JPH10332274A (en) 1997-06-03 1997-06-03 Hotpress furnace

Country Status (1)

Country Link
JP (1) JPH10332274A (en)

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