JPH02146326U - - Google Patents
Info
- Publication number
- JPH02146326U JPH02146326U JP5570589U JP5570589U JPH02146326U JP H02146326 U JPH02146326 U JP H02146326U JP 5570589 U JP5570589 U JP 5570589U JP 5570589 U JP5570589 U JP 5570589U JP H02146326 U JPH02146326 U JP H02146326U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- block
- attached
- differential pressure
- sensor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims 5
- 239000012530 fluid Substances 0.000 claims 3
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Description
第１図は本考案の一実施例の要部構成説明図、
第２図は第１図の斜視図、第３図は第１図の要部
詳細図、第４図は従来より一般に使用されている
従来例の構成説明図、第５図は第４図の斜視図、
第６図、第７図は第４図の要部詳細図である。
２……第１のダイアフラムブロツク、２１……
取付けブロツク、２２……凹部、２３……シール
室、２４……シールダイアフラム、２５……連通
孔、３……第２のダイアフラムブロツク、３１…
…取付けブロツク、３２……凹部、３３……シー
ル室、３４……シールダイアフラム、３５……連
通孔、１１……差圧計ブロツク、１１１……取付
けブロツク、１１２……凹部、１１３……シール
室、１１４……シールダイアフラム、１１４……
シール液、１１６……第１の差圧センサ、１１６
１……第１の支持台、１１６２……第１の基板、
１１６３……第１のシリコンセンサチツプ、１１
６４……第１のダイアフラム、１１６５……第１
の凹部、１１６６……第１の歪みゲージ、１１７
……第１の差圧センサ、１１７１……第２の支持
台、１１７２……第２の基板、１１７３……第２
のシリコンセンサチツプ、１１７４……第２のダ
イアフラム、１１７５……第２の凹部、１１７６
……第２の歪みゲージ、１２……第１のキヤピラ
リーチユーブ、１３……第１の封入液、１４……
第２のキヤピラリーチユーブ、１５……第２の封
入液、１６……演算回路。
FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
Fig. 2 is a perspective view of Fig. 1, Fig. 3 is a detailed view of the main part of Fig. 1, Fig. 4 is an explanatory diagram of the configuration of a conventional example commonly used, and Fig. 5 is a diagram of Fig. 4. Perspective view,
6 and 7 are detailed views of the main parts of FIG. 4. 2...first diaphragm block, 21...
Mounting block, 22... recess, 23... seal chamber, 24... seal diaphragm, 25... communicating hole, 3... second diaphragm block, 31...
... Mounting block, 32 ... Recess, 33 ... Seal chamber, 34 ... Seal diaphragm, 35 ... Communication hole, 11 ... Differential pressure gauge block, 111 ... Mounting block, 112 ... Recess, 113 ... Seal chamber , 114... seal diaphragm, 114...
Seal liquid, 116...first differential pressure sensor, 116
1...First support stand, 1162...First substrate,
1163...first silicon sensor chip, 11
64...first diaphragm, 1165...first
recess, 1166...first strain gauge, 117
...First differential pressure sensor, 1171...Second support stand, 1172...Second substrate, 1173...Second
silicon sensor chip, 1174...second diaphragm, 1175...second recess, 1176
... second strain gauge, 12 ... first capillary tube, 13 ... first filled liquid, 14 ...
Second capillary reach tube, 15... second sealed liquid, 16... arithmetic circuit.
Claims (1)
密閉タンクの液面より上の気体圧力を受圧する第
１のダイアフラムブロツクと、 密閉タンクの側面の液面より下側に取付けられ
測定流体の測定圧を受圧する第２のダイアフラム
ブロツクと、 密閉タンクの側面の底面側に取付けられた取付
けブロツクと 該取付けブロツクに設けられた凹部と 前記取付けブロツクに取付けられた該受圧凹部
とシール室を構成し外表面が測定流体に接するシ
ールダイアフラムと 前記シール室に満たされるシール液と 前記取付けブロツクに一端が取付けられた第１
の支持台と該第１の支持台の他端に一面が取付け
られた第１の基板と該第１の基板の他面に取付け
られ前記シール室に配置された第１のシリコンセ
ンサチツプと該第１のシリコンセンサチツプに設
けられ該第１のシリコンセンサチツプに第１のダ
イアフラムを構成し前記第１のダイアフラムブロ
ツクの測定圧が導入される第１の凹部と前記第１
のダイアフラムに設けられた第１の歪みゲージと
を有する第１の差圧センサと 前記取付けブロツクに一端が取付けられた第２
の支持台と該第２の支持台の他端に一面が取付け
られた第２の基板と該第２の基板の他面に取付け
られ前記シール室に配置された第２のシリコンセ
ンサチツプと該第２のシリコンセンサチツプに設
けられ該第２のシリコンセンサチツプに第２のダ
イアフラムを構成し前記第２のダイアフラムブロ
ツクの測定圧が導入される第２の凹部と前記第２
のダイアフラムに設けられた第２の歪みゲージと
を有する第２の差圧センサと からなる差圧計ブロツクと、 前記第１のダイアフラムブロツクと前記第１の
凹部とを連通する第１のキヤピラリーチユーブと
、 前記第２のダイアフラムブロツクと前記第２の
凹部とを連通する第２のキヤピラリーチユーブと
、 前記第１のキヤピラリーチユーブに封入された
第１の封入液と、 前記第２のキヤピラリーチユーブに封入された
第２の封入液と、 該第１、第２のキヤピラリーチユーブの封入液
の比重量と前記差圧計ブロツクと前記第１のダイ
アフラムブロツク間の距離と前記差圧計ブロツク
と前記第２のダイアフラムブロツク間の距離と前
記第１、第２差圧センサの測定信号とにより測定
流体の密度を使用することなく密閉タンク内のレ
ベルを演算する演算回路とを 具備してなるレベル計。[Scope of Claim for Utility Model Registration] A first diaphragm block that is installed above the liquid level on the side of a sealed tank and receives gas pressure above the liquid level in the sealed tank, and a first diaphragm block below the liquid level on the side of the sealed tank. a second diaphragm block that is attached to the diaphragm block and receives the measurement pressure of the measurement fluid; a mounting block that is attached to the bottom side of the side surface of the sealed tank; a recess provided in the mounting block; and the pressure receiving block that is attached to the mounting block. a seal diaphragm that forms a recess and a seal chamber and whose outer surface is in contact with the fluid to be measured; a seal liquid that fills the seal chamber; and a first diaphragm that has one end attached to the mounting block.
a support stand; a first substrate having one side attached to the other end of the first support stand; a first silicon sensor chip attached to the other side of the first substrate and disposed in the seal chamber; a first recess provided in the first silicon sensor chip, which constitutes a first diaphragm in the first silicon sensor chip, and into which the measurement pressure of the first diaphragm block is introduced;
a first differential pressure sensor having a first strain gauge mounted on the diaphragm of the sensor; and a second differential pressure sensor having one end mounted to the mounting block.
a second substrate having one surface attached to the other end of the second substrate; a second silicon sensor chip attached to the other surface of the second substrate and disposed in the sealing chamber; a second recess provided in the second silicon sensor chip and forming a second diaphragm in the second silicon sensor chip, into which the measurement pressure of the second diaphragm block is introduced;
a differential pressure gauge block comprising a second differential pressure sensor having a second strain gauge provided on a diaphragm; a first capillary reach tube communicating the first diaphragm block and the first recess; a second capillary reach tube that communicates the second diaphragm block and the second recess; a first filled liquid sealed in the first capillary reach tube; and a second capillary. The second filled liquid sealed in the tube, the specific weight of the filled liquid in the first and second capillary reach tubes, the distance between the differential pressure gauge block and the first diaphragm block, and the distance between the differential pressure gauge block and the first diaphragm block. A level meter comprising an arithmetic circuit that calculates the level in the sealed tank without using the density of the fluid to be measured based on the distance between the second diaphragm blocks and the measurement signals of the first and second differential pressure sensors. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5570589U JPH02146326U (en) | 1989-05-15 | 1989-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5570589U JPH02146326U (en) | 1989-05-15 | 1989-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146326U true JPH02146326U (en) | 1990-12-12 |
Family
ID=31578897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5570589U Pending JPH02146326U (en) | 1989-05-15 | 1989-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146326U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188059A (en) * | 1975-01-30 | 1976-08-02 | ||
| JPS5439161A (en) * | 1977-09-02 | 1979-03-26 | Hitachi Ltd | Liquid level meter of differential pressure type |
-
1989
- 1989-05-15 JP JP5570589U patent/JPH02146326U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188059A (en) * | 1975-01-30 | 1976-08-02 | ||
| JPS5439161A (en) * | 1977-09-02 | 1979-03-26 | Hitachi Ltd | Liquid level meter of differential pressure type |
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