JP3959665B2 - Flange mounting type differential pressure measuring device - Google Patents
Flange mounting type differential pressure measuring device Download PDFInfo
- Publication number
- JP3959665B2 JP3959665B2 JP2000203427A JP2000203427A JP3959665B2 JP 3959665 B2 JP3959665 B2 JP 3959665B2 JP 2000203427 A JP2000203427 A JP 2000203427A JP 2000203427 A JP2000203427 A JP 2000203427A JP 3959665 B2 JP3959665 B2 JP 3959665B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure side
- low
- diaphragm chamber
- pressure
- side diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Description
【０００１】
【発明の属する技術分野】
本発明は、温度特性が向上されたフランジ取付け形差圧測定装置に関するものである。
【０００２】
【従来の技術】
図３は、従来より一般に使用されている従来例の構成説明図である。図において、１は、フランジ取付け形差圧測定装置カプセルを構成する本体ボディである。２は、本体ボディ１に内蔵された圧力センサである。
【０００３】
この場合は、静電容量式センサが使用されている。３は、圧力センサ２からの信号を電気信号に変換する変換器である。４は、本体ボディ１に接続された高圧側フランジである。
【０００４】
５は、高圧側フランジ４に設けられ、高圧側フランジ４と高圧側ダイアフラム室６を構成する高圧側ダイアフラムである。７は、圧力センサ２の高圧側と高圧側ダイアフラム室６とを連通する連通孔である。
【０００５】
８は、圧力センサ２の高圧側と高圧側ダイアフラム室６と連通孔７とに封入される封入液である。１１は、本体ボディ１の側面に設けられ、本体ボディ１と低圧側ダイアフラム室１２を構成する低圧側ダイアフラムである。
【０００６】
１３は、圧力センサ２の低圧側と低圧側ダイアフラム室１２とを連通する連通孔である。１４は、圧力センサ２の低圧側と低圧側ダイアフラム室１２と連通孔１３とに封入される封入液である。この場合は、封入液８，１４はシリコンオイルが使用されている。
【０００７】
以上の構成において、フランジ取付け形差圧測定装置は、高圧側フランジ４により、タンク等に取付けられる。高圧側ダイアフラム５により高圧側圧力を受圧し封入液８により、高圧側圧力を圧力センサ２の高圧側へ伝える。
【０００８】
低圧側ダイアフラム１１により低圧側圧力を受圧し、封入液１４により、低圧側圧力を圧力センサ２の低圧側へ伝える。低圧側と高圧側とにより、圧力センサ２へ伝えられた差圧の圧力信号に基づき、変換器３により電気信号に変換され、出力される。
【０００９】
【発明が解決しようとする課題】
しかしながら、このような装置においては、測定流体温度が変化すると、封入液８が膨張あるいは収縮する。この膨張あるいは収縮量は、高圧側ダイアフラム５を膨らませて、吸収するが、この際、高圧側ダイアフラム５のばね強さにより、内圧が上昇あるいは下降し、内圧変化分が測定誤差となって表われる。
【００１０】
このような、接液温度誤差による測定誤差は、小型の高圧側ダイアフラム５の場合には、数Ｋｐａ／１００℃となり、大きな問題となる。ダイアフラムシール形差圧測定装置のように、センサカプセルの高低圧側の両方に、フランジと受圧ダイアフラムとが対称に付いていれば、内圧上昇がキャンセルされ、測定流体に対する接液温度誤差が発生しない。
【００１１】
しかし、図３実施例のように、高圧側片側のみに、受圧ダイアフラム６があり、高圧側のみの内圧が上昇すると、接液温度誤差が発生する。これを防止するためには、受圧部の測定流体温度を測定し、演算して補正する方法等が有るが、補正するための温度校正を必要としたり、補正回路を要したり、防爆構造を必要としたりする。
【００１２】
また、上記の接液温度誤差のために、製品の品質維持が難しい。また、たとえば、バッチ運転等でタンクが空となっても、温度誤差による出力信号が出力され、液位ゼロ信号が出力されず、運転が止まらずに、プロセス装置が破壊されるトラブルが生じていた。
【００１３】
本発明の目的は、上記の課題を解決するもので、温度特性が向上されたフランジ取付け形差圧測定装置を提供することにある。
【００１４】
【課題を解決するための手段】
このような目的を達成するために、本発明では、請求項１記載のフランジ取付け形差圧測定装置においては、
本体ボディに設けられた圧力センサと、高圧側フランジに設けられ前記圧力センサの高圧側に連通される高圧側ダイアフラム室と、前記本体ボディの側面に設けられ前記圧力センサの低圧側に連通される低圧側ダイアフラム室と、前記圧力センサの高圧側と低圧側とにそれぞれ封入される第１，第２の封入液とを具備するフランジ取付け形差圧測定装置において、前記高圧側の測定流体温度と均温になる個所に設けられこの高圧側の測定流体温度に基づく温度誤差を補償する補償封入液溜りと、一面が前記低圧側ダイアフラムの外表面を覆ってこの低圧側ダイアフラムと第２の低圧側ダイアフラム室を構成するベースブロックと、このベースブロックの他面を覆ってこのベースブロックと第３の低圧側ダイアフラム室を構成する第２の低圧側ダイアフラムと、前記第２の低圧側ダイアフラム室と前記第３の低圧側ダイアフラム室と前記補償封入液溜りとを連通する第 2 の連通管と、前記第２の低圧側ダイアフラム室と前記第３の低圧側ダイアフラム室と前記補償封入液溜りと前記第２の連通管とに封入される第３の封入液とを具備したことを特徴とする。
【００１５】
本発明の請求項２記載のフランジ取付け形差圧測定装置において、
本体ボディに設けられた圧力センサと、高圧側フランジに設けられ前記圧力センサの高圧側に実質的に連通される高圧側ダイアフラム室と、前記本体ボディの側面に設けられ前記圧力センサの低圧側に連通される低圧側ダイアフラム室と、前記圧力センサの高圧側と低圧側とにそれぞれ封入される第１，第２の封入液とを具備するフランジ取付け形差圧測定装置において、前記高圧側の測定流体温度と均温になる個所に設けられこの高圧側の測定流体温度に基づく温度誤差を補償する補償封入液溜りと、一面が前記低圧側ダイアフラムの外表面を覆ってこの低圧側ダイアフラムと第２の低圧側ダイアフラム室を構成するベースブロックと、このベースブロックの他面を覆ってこのベースブロックと第３の低圧側ダイアフラム室を構成する第２の低圧側ダイアフラムと、前記第２の低圧側ダイアフラム室と前記第３の低圧側ダイアフラム室と前記補償封入液溜りとを連通する第２の連通管と、前記第２の低圧側ダイアフラム室と前記第３の低圧側ダイアフラム室と前記補償封入液溜りと前記第２の連通管とに封入される第３の封入液と、一面が前記本体ボディの側面を覆ってこの本体ボディと第２の高圧側ダイアフラム室を構成する第２の高圧側ダイアフラムと、一端側がこの第２の高圧側ダイアフラムの他面を覆ってこの第２の高圧側ダイアフラムと第３の高圧側ダイアフラム室を構成し他端が前記高圧側フランジに接続される連通ブロックと、前記高圧側ダイアフラム室と前記第３の高圧側ダイアフラム室とを連通する第３の連通管と、前記高圧側ダイアフラム室と前記第３の高圧側ダイアフラム室と前記第３の連通管とに封入される第４の封入液とを具備したことを特徴とする。
【００１６】
本発明の請求項３においては、請求項１又は請求項２記載のフランジ取付け形差圧測定装置において、
前記補償封入液溜りが前記高圧側フランジに設けられたことを特徴とする。
【００１７】
【発明の実施の形態】
以下図面を用いて本発明を詳しく説明する。
図１は本発明の一実施例の要部構成説明図である。
図において、図３と同一記号の構成は同一機能を表す。
以下、図３と相違部分のみ説明する。
【００１８】
図において、補償封入液溜り２１は、高圧側の測定流体ＦＬの温度と均温になる個所に設けられ、この高圧側の測定流体ＦＬの温度に基づく温度誤差を補償する。
この場合は、補償封入液溜り２１は、高圧側フランジ４に設けられている。
【００１９】
また、この場合は、補償封入液溜り２１の容積が下記の式を満足するように定められている。
Ａ=Ｂ×(Ｃ／Ｄ)
但し、
Ａ：補償封入液溜り２１の容積
【００２０】
Ｂ：高圧側ダイアフラム室６の容積
Ｃ：低圧側ダイアフラム１１の容積変化常数
Ｄ：高圧側ダイアフラム５の容積変化常数
【００２１】
連通管２２は、この補償封入液溜り２１と圧力センサ２の低圧側とを連通する連通管である。
【００２２】
以上の構成において、フランジ取付け形差圧測定装置は、高圧側フランジ４により、タンク等に取付けられる。
高圧側ダイアフラム５により高圧側圧力を受圧し封入液８により、高圧側圧力を圧力センサ２の高圧側へ伝える。
【００２３】
低圧側ダイアフラム１１により低圧側圧力を受圧し、封入液１４により、低圧側圧力を圧力センサ２の低圧側へ伝える。一般には、低圧側圧力としては、大気圧が使用されることが多い。
【００２４】
低圧側と高圧側とにより、圧力センサ２へ伝えられた差圧の圧力信号に基づき、変換器３により電気信号に変換され、出力される。
一方、いま、高圧側測定流体ＦＬ１の温度が上昇するとすると、高圧側は図３従来例と同様に、内圧が上昇する。
【００２５】
同時に、補償封入液溜り２１内の封入液１４も膨張し、この膨張分は、低圧側ダイアフラム１１が膨らむ事により吸収する。
高低圧側共に、封入液８，１４の膨張量を吸収するダイアフラム５，１１のばね強さにより、内圧の大きさが決まる。
【００２６】
高低圧側の内圧が同じ圧力であれば、圧力は打ち消しあい、誤差は発生しない。
従って、
高圧側の発生内圧＝（高圧側ダイアフラム室６封入液量×封入液膨張係数×温度）／高圧側ダイアフラム５容積変化常数
【００２７】
低圧側の発生内圧＝（補償封入液溜り２１封入液量×封入液膨張係数×温度）／低圧側ダイアフラム１１容積変化常数
【００２８】
上式より、高圧側の発生内圧と低圧側の発生内圧とをイクオールにするには、下記の式が成り立つ。
高圧側ダイアフラム室６封入液量／高圧側ダイアフラム５容積変化常数＝補償封入液溜り２１封入液量／低圧側ダイアフラム１１容積変化常数
【００２９】
通常、ダイアフラム５，１１は、測定する差圧、フランジサイズや材質等により定まった値となる。
補償封入液溜りの容積を、上式が成立するように決めることにより、以下の結果が得られる。
【００３０】
（１）高圧側ダイアフラム室６に生じた測定流体温度に基づく温度誤差を、容易に、より正確に補正出来、より温度特性が向上されたフランジ取付け形差圧測定装置が得られる。
【００３１】
（２）高圧側ダイアフラム５と低圧側ダイアフラム１１の直径が異なっても、容易に、補償封入液溜り２１の容積を決定出来、設計の自由度が広げ易いフランジ取付け形差圧測定装置が得られる。
【００３２】
そして、本実施例においては、標準的なフランジ取付け形差圧測定装置を出来るだけ利用しようとするものである。
【００３３】
図において、ベースブロック３１は、一面が低圧側ダイアフラム１１の外表面を覆って、この低圧側ダイアフラム１１と第２の低圧側ダイアフラム室３２を構成する。
【００３４】
第２の低圧側ダイアフラム３３は、このベースブロック３１の他面を覆って、このベースブロック３１と第３の低圧側ダイアフラム室３４を構成する。
第２の連通管３５は、第２の低圧側ダイアフラム室３２と第３の低圧側ダイアフラム室３４と補償封入液溜り２１とを連通する。
【００３５】
第３の封入液３６は、第２の低圧側ダイアフラム室３２と第３の低圧側ダイアフラム室３４と補償封入液溜り２１と第２の連通管３５とに封入される。
【００３６】
この結果、
高圧側の測定流体温度と均温になる個所に設けられ高圧側の測定流体温度に基づく温度誤差を補償する補償封入液溜り２１が設けられたので、高圧側ダイアフラム室６に生じた測定流体温度に基づく膨張収縮による内圧の変化を相殺し、温度特性が向上されたフランジ取付け形差圧測定装置が得られる。
【００３７】
補償封入液溜り２１が高圧側フランジ４に設けられので、補償封入液溜り２１が高圧側フランジ４内に内蔵出来、コンパクトなフランジ取付け形差圧測定装置が得られる。
【００３８】
標準的なフランジ取付け形差圧測定装置にユニット的に、部品を追加し、僅かの加工で済むので安価なフランジ取付け形差圧測定装置が得られる。
【００３９】
図２は本発明の他の実施例の要部構成説明図である。本実施例においては、標準的なフランジ取付け形差圧測定装置でなく、更に、一般な、差圧測定装置を出来るだけ利用しようとするものである。
【００４０】
図において、ベースブロック３１は、一面が低圧側ダイアフラム１１の外表面を覆って、この低圧側ダイアフラム１１と第２の低圧側ダイアフラム室３２を構成する。
【００４１】
第２の低圧側ダイアフラム３３は、このベースブロック３１の他面を覆って、このベースブロック３１と第３の低圧側ダイアフラム室３４を構成する。
第２の連通管３５は、第２の低圧側ダイアフラム室３２と第３の低圧側ダイアフラム室３４と補償封入液溜り２１とを連通する。
【００４２】
第３の封入液２６は、第２の低圧側ダイアフラム室３２と第３の低圧側ダイアフラム室３４と補償封入液溜り２１と第2の連通管３５とに封入される。
【００４３】
第２の高圧側ダイアフラム４１は、一面が本体ボディ１の側面を覆って、この本体ボディ１と第２の高圧側ダイアフラム室４２を構成する。
連通ブロック４３は、一端側がこの第２の高圧側ダイアフラム４１の他面を覆って、この第２の高圧側ダイアフラム４１と第３の高圧側ダイアフラム室４４を構成し、他端が高圧側フランジ４に接続される。
【００４４】
第３の連通管４５は、高圧側ダイアフラム室５と第３の高圧側ダイアフラム室４４とを連通する。
第４の封入液４６は、高圧側ダイアフラム室５と第３の高圧側ダイアフラム室４４と第３の連通管４５とに封入される。
【００４５】
この結果、標準的なフランジ取付け形差圧測定装置でなく、更に、一般的な、差圧測定装置にユニット的に、部品を追加し、加工すれば良いので、更に、安価なフランジ取付け形差圧測定装置が得られる。
【００４６】
なお、以上の説明は、本発明の説明および例示を目的として特定の好適な実施例を示したに過ぎない。したがって本発明は、上記実施例に限定されることなく、その本質から逸脱しない範囲で更に多くの変更、変形をも含むものである。
【００４７】
【発明の効果】
以上説明したように、本発明の請求項１によれば、次のような効果がある。
高圧側の測定流体温度と均温になる個所に設けられ高圧側の測定流体温度に基づく温度誤差を補償する補償封入液溜りが設けられたので、高圧側ダイアフラム室に生じた測定流体温度に基づく膨張収縮による内圧の変化を相殺し、温度特性が向上されたフランジ取付け形差圧測定装置が得られる。
【００４８】
標準的なフランジ取付け形差圧測定装置にユニット的に、部品を追加し、僅かの加工で済むので安価なフランジ取付け形差圧測定装置が得られる。
【００４９】
本発明の請求項２によれば、次のような効果がある。
標準的なフランジ取付け形差圧測定装置でなく、更に、一般的な、差圧測定装置にユニット的に、部品を追加し、加工すれば良いので、更に、安価なフランジ取付け形差圧測定装置が得られる。
【００５０】
本発明の請求項３によれば、次のような効果がある。
補償封入液溜りが高圧側フランジに設けられので、補償封入液溜りが高圧側フランジ内に内蔵出来、コンパクトなフランジ取付け形差圧測定装置が得られる。
【００５１】
従って、本発明によれば、温度特性が向上されたフランジ取付け形差圧測定装置を実現することが出来る。
【図面の簡単な説明】
【図１】 本発明の一実施例の要部構成説明図である。
【図２】 本発明の他の実施例の要部構成説明図である。
【図３】 従来より一般に使用されている従来例の要部構成説明図である。
【符号の説明】
１ 本体ボディ
２ 圧力センサ
３ 変換器
４ 高圧側フランジ
５ 高圧側ダイアフラム
６ 高圧側ダイアフラム室
７ 連通孔
８ 封入液
１１ 低圧側ダイアフラム
１２ 低圧側ダイアフラム室
１３ 連通孔
１４ 封入液
２１ 補償封入液溜り
２２ 連通管
３１ ベースブロック
３２ 第２の低圧側ダイアフラム室
３３ 第２の低圧側ダイアフラム
３４ 第３の低圧側ダイアフラム室
３５ 第２の連通管
３６ 第３の封入液
４１ 第２の高圧側ダイアフラム
４２ 第２の高圧側ダイアフラム室
４３ 連通ブロック
４４ 第３の高圧側ダイアフラム室
４５ 第３の連通管
４６ 第４の封入液[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a flange-mounted differential pressure measuring device with improved temperature characteristics.
[0002]
[Prior art]
FIG. 3 is a diagram illustrating the configuration of a conventional example that is generally used. In the figure, reference numeral 1 denotes a main body constituting a flange-mounted differential pressure measuring device capsule. Reference numeral 2 denotes a pressure sensor built in the main body 1.
[0003]
In this case, a capacitive sensor is used. Reference numeral 3 denotes a converter that converts a signal from the pressure sensor 2 into an electric signal. Reference numeral 4 denotes a high-pressure side flange connected to the main body 1.
[0004]
Reference numeral 5 denotes a high-pressure diaphragm that is provided on the high-pressure flange 4 and constitutes the high-pressure flange 4 and the high-pressure diaphragm chamber 6. A communication hole 7 communicates the high pressure side of the pressure sensor 2 with the high pressure side diaphragm chamber 6.
[0005]
Reference numeral 8 denotes a sealing liquid sealed in the high pressure side, the high pressure side diaphragm chamber 6 and the communication hole 7 of the pressure sensor 2. Reference numeral 11 denotes a low-pressure diaphragm that is provided on a side surface of the main body 1 and constitutes the main body 1 and the low-pressure diaphragm chamber 12.
[0006]
A communication hole 13 communicates the low pressure side of the pressure sensor 2 with the low pressure side diaphragm chamber 12. Reference numeral 14 denotes a sealing liquid which is sealed in the low pressure side, the low pressure side diaphragm chamber 12 and the communication hole 13 of the pressure sensor 2. In this case, silicone oil is used for the sealing liquids 8 and 14.
[0007]
In the above configuration, the flange-mounted differential pressure measuring device is attached to a tank or the like by the high-pressure side flange 4. The high pressure side diaphragm 5 receives the high pressure side pressure, and the sealed liquid 8 transmits the high pressure side pressure to the high pressure side of the pressure sensor 2.
[0008]
The low pressure side diaphragm 11 receives the low pressure side pressure, and the sealing liquid 14 transmits the low pressure side pressure to the low pressure side of the pressure sensor 2. Based on the pressure signal of the differential pressure transmitted to the pressure sensor 2 by the low pressure side and the high pressure side, it is converted into an electrical signal by the converter 3 and output.
[0009]
[Problems to be solved by the invention]
However, in such a device, when the measurement fluid temperature changes, the sealing liquid 8 expands or contracts. The amount of expansion or contraction is absorbed by inflating the high-pressure side diaphragm 5. At this time, the internal pressure increases or decreases depending on the spring strength of the high-pressure side diaphragm 5, and the change in internal pressure appears as a measurement error. .
[0010]
Such a measurement error due to a liquid contact temperature error is several Kpa / 100 ° C. in the case of a small high-pressure diaphragm 5, which is a big problem. If the flange and the pressure-receiving diaphragm are symmetrically attached to both the high and low pressure sides of the sensor capsule as in the diaphragm seal type differential pressure measuring device, the increase in internal pressure is canceled and no wetted temperature error with respect to the measured fluid occurs.
[0011]
However, as in the embodiment of FIG. 3, there is a pressure receiving diaphragm 6 only on one side of the high pressure side, and when the internal pressure on only the high pressure side rises, a wetted temperature error occurs. In order to prevent this, there is a method of measuring the fluid temperature of the pressure receiving part, calculating it, and correcting it, but it requires temperature calibration to correct it, requires a correction circuit, or has an explosion-proof structure. I need it.
[0012]
In addition, it is difficult to maintain the quality of the product due to the liquid contact temperature error. In addition, for example, even if the tank is emptied in batch operation, an output signal due to temperature error is output, the liquid level zero signal is not output, operation does not stop, and there is a problem that the process equipment is destroyed. It was.
[0013]
An object of the present invention is to solve the above-described problems and to provide a flange-mounted differential pressure measuring device with improved temperature characteristics.
[0014]
[Means for Solving the Problems]
In order to achieve such an object, according to the present invention, in the flange-mounted differential pressure measuring device according to claim 1,
A pressure sensor provided on the main body, a high-pressure diaphragm chamber provided on the high-pressure side flange and communicated with the high-pressure side of the pressure sensor, and provided on a side surface of the main body and communicated with the low-pressure side of the pressure sensor. In a flange-mounted differential pressure measuring device comprising a low-pressure side diaphragm chamber and first and second sealed liquids respectively sealed on the high-pressure side and the low-pressure side of the pressure sensor, the measured fluid temperature on the high-pressure side Compensated sealed liquid reservoir that is provided at a location where the temperature is equalized and compensates for a temperature error based on the measured fluid temperature on the high pressure side, one surface covers the outer surface of the low pressure side diaphragm, and the low pressure side diaphragm and the second low pressure side A base block constituting the diaphragm chamber, and a second low pressure side covering the other surface of the base block and constituting a third low pressure side diaphragm chamber And diaphragm and the second communicating pipe and the second low-pressure side diaphragm chamber and the third low-pressure side diaphragm chamber and said compensation sealed liquid reservoir communicating, the second low-pressure side diaphragm chamber and the third A low-pressure side diaphragm chamber, a compensation sealed liquid reservoir, and a third sealed liquid sealed in the second communication pipe are provided.
[0015]
In the flange-mounted differential pressure measuring device according to claim 2 of the present invention,
A pressure sensor provided on the main body, a high pressure side diaphragm chamber provided on the high pressure side flange and substantially communicated with the high pressure side of the pressure sensor, and provided on a side surface of the main body body on the low pressure side of the pressure sensor. In a flange-mounted differential pressure measuring device comprising a low pressure side diaphragm chamber communicated, and first and second sealed liquids respectively sealed on a high pressure side and a low pressure side of the pressure sensor, measurement on the high pressure side Compensating sealed liquid reservoir provided at a location equal to the fluid temperature and compensating for a temperature error based on the measured fluid temperature on the high pressure side, one surface covering the outer surface of the low pressure side diaphragm, and the low pressure side diaphragm and the second A base block that constitutes the low pressure side diaphragm chamber of the second base, and a second that constitutes the base block and the third low pressure side diaphragm chamber covering the other surface of the base block. A low-pressure side diaphragm, a second communication pipe communicating the second low-pressure side diaphragm chamber, the third low-pressure side diaphragm chamber, and the compensation sealed liquid reservoir, the second low-pressure side diaphragm chamber, and the second 3 low pressure side diaphragm chamber, the third sealed liquid sealed in the compensation sealed liquid reservoir and the second communication pipe, one surface covers the side surface of the main body body and the main body body and the second high pressure side A second high-pressure side diaphragm constituting the diaphragm chamber, one end side covering the other surface of the second high-pressure side diaphragm to constitute the second high-pressure side diaphragm and the third high-pressure side diaphragm chamber, and the other end thereof A communication block connected to the high pressure side flange, a third communication pipe communicating the high pressure side diaphragm chamber and the third high pressure side diaphragm chamber, the high pressure side diaphragm chamber and the third height Characterized by comprising a fourth sealed liquid sealed in the side diaphragm chamber and the third communicating tube.
[0016]
In claim 3 of the present invention, in the flange-mounted differential pressure measuring device according to claim 1 or 2 ,
The compensation sealed liquid reservoir is provided in the high-pressure side flange.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is an explanatory view of the main part configuration of an embodiment of the present invention.
In the figure, configurations with the same symbols as in FIG. 3 represent the same functions.
Only the differences from FIG. 3 will be described below.
[0018]
In the figure, a compensation sealed liquid reservoir 21 is provided at a temperature equal to the temperature of the measurement fluid FL on the high pressure side, and compensates for a temperature error based on the temperature of the measurement fluid FL on the high pressure side.
In this case, the compensation sealed liquid reservoir 21 is provided on the high-pressure side flange 4.
[0019]
In this case, the volume of the compensation sealed liquid reservoir 21 is determined so as to satisfy the following expression.
A = B × (C / D)
However,
A: Volume of compensation sealed liquid reservoir 21 [0020]
B: Volume of the high pressure side diaphragm chamber 6 C: Volume change constant of the low pressure side diaphragm 11 D: Volume change constant of the high pressure side diaphragm 5
The communication pipe 22 is a communication pipe that communicates the compensation sealed liquid reservoir 21 with the low pressure side of the pressure sensor 2.
[0022]
In the above configuration, the flange-mounted differential pressure measuring device is attached to a tank or the like by the high-pressure side flange 4.
The high pressure side diaphragm 5 receives the high pressure side pressure, and the sealed liquid 8 transmits the high pressure side pressure to the high pressure side of the pressure sensor 2.
[0023]
The low pressure side diaphragm 11 receives the low pressure side pressure, and the sealing liquid 14 transmits the low pressure side pressure to the low pressure side of the pressure sensor 2. In general, atmospheric pressure is often used as the low-pressure side pressure.
[0024]
Based on the pressure signal of the differential pressure transmitted to the pressure sensor 2 by the low pressure side and the high pressure side, it is converted into an electrical signal by the converter 3 and output.
On the other hand, now, when the temperature of the high-pressure side measuring fluid FL1 is increased, the high-pressure side as in FIG. 3 prior art, the internal pressure is increased.
[0025]
At the same time, the filling liquid 14 in the compensation filling liquid reservoir 21 expands, and this expansion is absorbed by the expansion of the low-pressure diaphragm 11.
On both the high and low pressure sides, the magnitude of the internal pressure is determined by the spring strength of the diaphragms 5 and 11 that absorb the expansion amount of the sealed liquids 8 and 14.
[0026]
If the internal pressures on the high and low pressure sides are the same, the pressures cancel out and no error occurs.
Therefore,
Generated internal pressure on the high pressure side = (high pressure side diaphragm chamber 6 enclosed liquid amount × enclosed liquid expansion coefficient × temperature) / high pressure side diaphragm 5 volume change constant [0027]
Generated internal pressure on the low pressure side = (compensated sealed liquid reservoir 21 filled liquid amount × filled liquid expansion coefficient × temperature) / low pressure side diaphragm 11 volume change constant [0028]
From the above equation, the following equation is established to equalize the generated internal pressure on the high pressure side and the generated internal pressure on the low pressure side.
High-pressure side diaphragm chamber 6 filled liquid amount / high-pressure side diaphragm 5 volume change constant = compensated sealed liquid reservoir 21 filled liquid amount / low-pressure side diaphragm 11 volume change constant
Usually, the diaphragms 5 and 11 have values determined by the differential pressure to be measured, the flange size, the material, and the like.
By determining the volume of the compensation sealing liquid reservoir so that the above equation is satisfied, the following results are obtained.
[0030]
(1) A flange-mounted differential pressure measuring device that can easily and more accurately correct a temperature error based on the measured fluid temperature generated in the high-pressure side diaphragm chamber 6 and has improved temperature characteristics can be obtained.
[0031]
(2) Even if the high-pressure side diaphragm 5 and the low-pressure side diaphragm 11 are different in diameter, it is possible to easily determine the volume of the compensation sealed liquid reservoir 21 and obtain a flange-mounted differential pressure measuring device that allows easy design freedom. .
[0032]
In this embodiment, a standard flange-mounted differential pressure measuring device is to be used as much as possible.
[0033]
In the figure, one surface of the base block 31 covers the outer surface of the low pressure side diaphragm 11 and constitutes the low pressure side diaphragm 11 and the second low pressure side diaphragm chamber 32.
[0034]
The second low pressure side diaphragm 33 covers the other surface of the base block 31 and constitutes the base block 31 and a third low pressure side diaphragm chamber 34.
The second communication pipe 35 communicates the second low pressure side diaphragm chamber 32, the third low pressure side diaphragm chamber 34, and the compensation sealed liquid reservoir 21.
[0035]
The third sealed liquid 36 is sealed in the second low pressure side diaphragm chamber 32, the third low pressure side diaphragm chamber 34, the compensation sealed liquid reservoir 21, and the second communication pipe 35.
[0036]
As a result,
Since the compensation sealed liquid reservoir 21 is provided in a place where the temperature is equal to the measurement fluid temperature on the high pressure side and compensates for the temperature error based on the measurement fluid temperature on the high pressure side, the measurement fluid temperature generated in the high pressure side diaphragm chamber 6 is provided. Therefore, a flange-mounted differential pressure measuring device with improved temperature characteristics can be obtained by offsetting the change in internal pressure due to expansion and contraction based on the above.
[0037]
Since the compensation sealed liquid reservoir 21 is provided in the high pressure side flange 4, the compensation sealed liquid reservoir 21 can be built in the high pressure side flange 4, and a compact flange-mounted differential pressure measuring device can be obtained.
[0038]
Since parts are added to a standard flange-mounted differential pressure measuring device as a unit and only a few processes are required, an inexpensive flange-mounted differential pressure measuring device can be obtained.
[0039]
FIG. 2 is an explanatory view showing the construction of the main part of another embodiment of the present invention. In this embodiment, a general differential pressure measuring device is used as much as possible instead of a standard flange-mounted differential pressure measuring device.
[0040]
In the figure, one surface of the base block 31 covers the outer surface of the low pressure side diaphragm 11 and constitutes the low pressure side diaphragm 11 and the second low pressure side diaphragm chamber 32.
[0041]
The second low pressure side diaphragm 33 covers the other surface of the base block 31 and constitutes the base block 31 and a third low pressure side diaphragm chamber 34.
The second communication pipe 35 communicates the second low pressure side diaphragm chamber 32, the third low pressure side diaphragm chamber 34, and the compensation sealed liquid reservoir 21.
[0042]
The third sealed liquid 26 is sealed in the second low pressure side diaphragm chamber 32, the third low pressure side diaphragm chamber 34, the compensation sealed liquid reservoir 21, and the second communication pipe 35.
[0043]
One surface of the second high-pressure side diaphragm 41 covers the side surface of the main body 1 and constitutes the main body 1 and the second high-pressure side diaphragm chamber 42.
One end side of the communication block 43 covers the other surface of the second high-pressure side diaphragm 41 to form the second high-pressure side diaphragm 41 and the third high-pressure side diaphragm chamber 44, and the other end thereof is the high-pressure side flange 4. Connected to.
[0044]
The third communication pipe 45 communicates the high pressure side diaphragm chamber 5 with the third high pressure side diaphragm chamber 44.
The fourth sealing liquid 46 is sealed in the high pressure side diaphragm chamber 5, the third high pressure side diaphragm chamber 44, and the third communication pipe 45.
[0045]
As a result, instead of a standard flange-mounted differential pressure measuring device, it is only necessary to add and process parts in a general differential pressure measuring device as a unit. A pressure measuring device is obtained.
[0046]
The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention. Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.
[0047]
【The invention's effect】
As described above, according to the first aspect of the present invention, the following effects can be obtained.
A compensation sealed liquid reservoir is provided to compensate the temperature error based on the measured fluid temperature on the high-pressure side, where the temperature is equalized with the measured fluid temperature on the high-pressure side, so that it is based on the measured fluid temperature generated in the high-pressure side diaphragm chamber. A flange-mounted differential pressure measuring device with improved temperature characteristics can be obtained by offsetting changes in internal pressure due to expansion and contraction.
[0048]
Since parts are added to a standard flange-mounted differential pressure measuring device as a unit and only a few processes are required, an inexpensive flange-mounted differential pressure measuring device can be obtained.
[0049]
According to claim 2 of the present invention, there are the following effects.
In addition to the standard flange-mounted differential pressure measuring device, it is only necessary to add and process parts as a unit to a general differential pressure measuring device. Is obtained.
[0050]
According to claim 3 of the present invention, there are the following effects.
Since the compensation sealed liquid pool is provided in the high pressure side flange, the compensation sealed liquid pool can be built in the high pressure side flange, and a compact flange-mounted differential pressure measuring device can be obtained.
[0051]
Therefore, according to the present invention, a flange-mounted differential pressure measuring device with improved temperature characteristics can be realized.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of a main part configuration of an embodiment of the present invention.
FIG. 2 is an explanatory diagram of a main part configuration of another embodiment of the present invention.
FIG. 3 is an explanatory diagram of a main part configuration of a conventional example generally used conventionally.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Main body 2 Pressure sensor 3 Converter 4 High pressure side flange 5 High pressure side diaphragm 6 High pressure side diaphragm chamber 7 Communication hole 8 Filled liquid 11 Low pressure side diaphragm 12 Low pressure side diaphragm chamber 13 Communication hole 14 Filled liquid 21 Compensation sealed liquid reservoir 22 Communication Pipe 31 Base block 32 Second low-pressure side diaphragm chamber 33 Second low-pressure side diaphragm 34 Third low-pressure side diaphragm chamber 35 Second communication pipe 36 Third sealed liquid 41 Second high-pressure side diaphragm 42 Second High pressure side diaphragm chamber 43 Communication block 44 Third high pressure side diaphragm chamber 45 Third communication pipe 46 Fourth sealing liquid
Claims (3)
前記高圧側の測定流体温度と均温になる個所に設けられこの高圧側の測定流体温度に基づく温度誤差を補償する補償封入液溜りと、
一面が前記低圧側ダイアフラムの外表面を覆ってこの低圧側ダイアフラムと第２の低圧側ダイアフラム室を構成するベースブロックと、
このベースブロックの他面を覆ってこのベースブロックと第３の低圧側ダイアフラム室を構成する第２の低圧側ダイアフラムと、
前記第２の低圧側ダイアフラム室と前記第３の低圧側ダイアフラム室と前記補償封入液溜りとを連通する第 2 の連通管と、
前記第２の低圧側ダイアフラム室と前記第３の低圧側ダイアフラム室と前記補償封入液溜りと前記第２の連通管とに封入される第３の封入液と
を具備したことを特徴とするフランジ取付け形差圧測定装置。 A pressure sensor provided on the main body, a high-pressure diaphragm chamber provided on the high-pressure side flange and communicated with the high-pressure side of the pressure sensor, and provided on a side surface of the main body and communicated with the low-pressure side of the pressure sensor. In a flange-mounted differential pressure measuring device comprising a low-pressure side diaphragm chamber and first and second sealed liquids sealed on the high-pressure side and the low-pressure side of the pressure sensor,
A compensation sealed liquid reservoir which is provided at a location where the measured fluid temperature on the high pressure side is equal to the temperature, and compensates for a temperature error based on the measured fluid temperature on the high pressure side;
A base block whose one surface covers the outer surface of the low pressure side diaphragm and constitutes the low pressure side diaphragm and the second low pressure side diaphragm chamber;
A second low-pressure diaphragm that covers the other surface of the base block and forms a third low-pressure diaphragm chamber;
A second communicating pipe that communicates the said second low-pressure side diaphragm chamber the third low-pressure side diaphragm chamber and the compensating sealed liquid reservoir,
A flange comprising the second low-pressure side diaphragm chamber, the third low-pressure side diaphragm chamber, the compensation sealed liquid reservoir, and a third sealed liquid sealed in the second communication pipe. Mounting type differential pressure measuring device.
前記高圧側の測定流体温度と均温になる個所に設けられこの高圧側の測定流体温度に基づく温度誤差を補償する補償封入液溜りと、
一面が前記低圧側ダイアフラムの外表面を覆ってこの低圧側ダイアフラムと第２の低圧側ダイアフラム室を構成するベースブロックと、
このベースブロックの他面を覆ってこのベースブロックと第３の低圧側ダイアフラム室を構成する第２の低圧側ダイアフラムと、
前記第２の低圧側ダイアフラム室と前記第３の低圧側ダイアフラム室と前記補償封入液溜りとを連通する第２の連通管と、
前記第２の低圧側ダイアフラム室と前記第３の低圧側ダイアフラム室と前記補償封入液溜りと前記第２の連通管とに封入される第３の封入液と、
一面が前記本体ボディの側面を覆ってこの本体ボディと第２の高圧側ダイアフラム室を構成する第２の高圧側ダイアフラムと、
一端側がこの第２の高圧側ダイアフラムの他面を覆ってこの第２の高圧側ダイアフラムと第３の高圧側ダイアフラム室を構成し他端が前記高圧側フランジに接続される連通ブロックと、
前記高圧側ダイアフラム室と前記第３の高圧側ダイアフラム室とを連通する第３の連通管と、
前記高圧側ダイアフラム室と前記第３の高圧側ダイアフラム室と前記第３の連通管とに封入される第４の封入液と
を具備したことを特徴とするフランジ取付け形差圧測定装置。 A pressure sensor provided on the main body, a high pressure side diaphragm chamber provided on the high pressure side flange and substantially communicated with the high pressure side of the pressure sensor, and provided on a side surface of the main body body on the low pressure side of the pressure sensor. In a flange-mounted differential pressure measuring device comprising: a low-pressure side diaphragm chamber communicated; and first and second sealed liquids respectively sealed on a high-pressure side and a low-pressure side of the pressure sensor.
A compensation sealed liquid reservoir which is provided at a location where the measured fluid temperature on the high pressure side is equal to the temperature, and compensates for a temperature error based on the measured fluid temperature on the high pressure side;
A base block whose one surface covers the outer surface of the low pressure side diaphragm and constitutes the low pressure side diaphragm and the second low pressure side diaphragm chamber;
A second low-pressure diaphragm that covers the other surface of the base block and forms a third low-pressure diaphragm chamber;
A second communication pipe communicating the second low pressure side diaphragm chamber, the third low pressure side diaphragm chamber, and the compensation sealed liquid reservoir;
A third sealed liquid sealed in the second low pressure side diaphragm chamber, the third low pressure side diaphragm chamber, the compensation sealed liquid reservoir, and the second communication pipe;
A second high-pressure side diaphragm that forms a second high-pressure side diaphragm chamber with one surface covering a side surface of the main body,
A communication block having one end side covering the other surface of the second high pressure side diaphragm to form the second high pressure side diaphragm and the third high pressure side diaphragm chamber, and the other end connected to the high pressure side flange;
A third communication pipe communicating the high pressure side diaphragm chamber and the third high pressure side diaphragm chamber;
A flange-mounted differential pressure measuring device comprising a fourth sealed liquid sealed in the high-pressure side diaphragm chamber, the third high-pressure side diaphragm chamber, and the third communication pipe .
を特徴とする請求項１又は請求項２記載のフランジ取付け形差圧測定装置。 3. A flange-mounted differential pressure measuring device according to claim 1 or 2, wherein:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000203427A JP3959665B2 (en) | 2000-07-05 | 2000-07-05 | Flange mounting type differential pressure measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000203427A JP3959665B2 (en) | 2000-07-05 | 2000-07-05 | Flange mounting type differential pressure measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002022585A JP2002022585A (en) | 2002-01-23 |
| JP3959665B2 true JP3959665B2 (en) | 2007-08-15 |
Family
ID=18700835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000203427A Expired - Fee Related JP3959665B2 (en) | 2000-07-05 | 2000-07-05 | Flange mounting type differential pressure measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3959665B2 (en) |
-
2000
- 2000-07-05 JP JP2000203427A patent/JP3959665B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002022585A (en) | 2002-01-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2325903C (en) | Pressure sensor | |
| JP5416967B2 (en) | Pressure sensor assembly, pressure sensor and line pressure measuring method | |
| FI100361B (en) | Apparatus for measuring pressure difference | |
| US7062974B2 (en) | Pressure transmitter | |
| EP0574409A1 (en) | Isolator for pressure transmitter. | |
| US9109937B2 (en) | Level measurement of process fluid using a remote seal | |
| CN107192498B (en) | Fluid-filled elongate pressure sensor | |
| US20090293628A1 (en) | Pressure-sensor apparatus | |
| CA2313313C (en) | Relative pressure sensor | |
| JP3959665B2 (en) | Flange mounting type differential pressure measuring device | |
| JPH0629821B2 (en) | Multi-function differential pressure sensor | |
| JP2000337983A (en) | Pressure detector and its manufacturing method | |
| JPH1114483A (en) | Diaphragm seal type differential pressure measuring device | |
| JP2929159B2 (en) | Pressure type liquid level measuring device | |
| US6425291B1 (en) | Relative-pressure sensor having a gas-filled bellows | |
| JP3127431B2 (en) | Calibration method of remote seal type differential pressure / pressure transmitter | |
| JPS6136610B2 (en) | ||
| JPH11118645A (en) | Diaphragm seal-type differential pressure measuring device | |
| JPH0752601Y2 (en) | Differential pressure transmitter | |
| JPH11281511A (en) | Diaphragm seal type differential pressure measuring device | |
| JPS5850300Y2 (en) | pressure transmitter | |
| JPS63314431A (en) | Electrostatic capacitance type differential pressure transmitter | |
| JPH0749397Y2 (en) | Differential pressure transmitter | |
| JPH0662344U (en) | Semiconductor pressure gauge | |
| JP2002286572A (en) | Temperature compensation type pressure gage |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20041122 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20061006 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061012 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061211 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061222 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070419 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070502 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 3959665 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100525 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110525 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130525 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130525 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140525 Year of fee payment: 7 |
|
| LAPS | Cancellation because of no payment of annual fees |