JPH0214513B2 - - Google Patents

Info

Publication number
JPH0214513B2
JPH0214513B2 JP10625284A JP10625284A JPH0214513B2 JP H0214513 B2 JPH0214513 B2 JP H0214513B2 JP 10625284 A JP10625284 A JP 10625284A JP 10625284 A JP10625284 A JP 10625284A JP H0214513 B2 JPH0214513 B2 JP H0214513B2
Authority
JP
Japan
Prior art keywords
vibration
feed screw
controller
drive motor
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10625284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60250168A (ja
Inventor
Kazuhiko Yoshida
Yasushi Maruyama
Hideo Tashiro
Nobuo Kamei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10625284A priority Critical patent/JPS60250168A/ja
Publication of JPS60250168A publication Critical patent/JPS60250168A/ja
Publication of JPH0214513B2 publication Critical patent/JPH0214513B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Buildings Adapted To Withstand Abnormal External Influences (AREA)
  • Vibration Prevention Devices (AREA)
JP10625284A 1984-05-25 1984-05-25 振動制御装置 Granted JPS60250168A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10625284A JPS60250168A (ja) 1984-05-25 1984-05-25 振動制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10625284A JPS60250168A (ja) 1984-05-25 1984-05-25 振動制御装置

Publications (2)

Publication Number Publication Date
JPS60250168A JPS60250168A (ja) 1985-12-10
JPH0214513B2 true JPH0214513B2 (enrdf_load_stackoverflow) 1990-04-09

Family

ID=14428906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10625284A Granted JPS60250168A (ja) 1984-05-25 1984-05-25 振動制御装置

Country Status (1)

Country Link
JP (1) JPS60250168A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7085616B2 (en) 2001-07-27 2006-08-01 Applied Materials, Inc. Atomic layer deposition apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH089472Y2 (ja) * 1988-12-05 1996-03-21 現代重工業株式会社 自動調節動的吸収器
JPH02300478A (ja) * 1989-05-15 1990-12-12 Ohbayashi Corp 構造物の制振装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7085616B2 (en) 2001-07-27 2006-08-01 Applied Materials, Inc. Atomic layer deposition apparatus

Also Published As

Publication number Publication date
JPS60250168A (ja) 1985-12-10

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