JPH0214198Y2 - - Google Patents
Info
- Publication number
- JPH0214198Y2 JPH0214198Y2 JP1861981U JP1861981U JPH0214198Y2 JP H0214198 Y2 JPH0214198 Y2 JP H0214198Y2 JP 1861981 U JP1861981 U JP 1861981U JP 1861981 U JP1861981 U JP 1861981U JP H0214198 Y2 JPH0214198 Y2 JP H0214198Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- introduction hole
- shaft
- guide tube
- exposure chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 47
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1861981U JPH0214198Y2 (zh) | 1981-02-12 | 1981-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1861981U JPH0214198Y2 (zh) | 1981-02-12 | 1981-02-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57132442U JPS57132442U (zh) | 1982-08-18 |
| JPH0214198Y2 true JPH0214198Y2 (zh) | 1990-04-18 |
Family
ID=29816579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1861981U Expired JPH0214198Y2 (zh) | 1981-02-12 | 1981-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214198Y2 (zh) |
-
1981
- 1981-02-12 JP JP1861981U patent/JPH0214198Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57132442U (zh) | 1982-08-18 |
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