JPH0213870Y2 - - Google Patents
Info
- Publication number
- JPH0213870Y2 JPH0213870Y2 JP8801985U JP8801985U JPH0213870Y2 JP H0213870 Y2 JPH0213870 Y2 JP H0213870Y2 JP 8801985 U JP8801985 U JP 8801985U JP 8801985 U JP8801985 U JP 8801985U JP H0213870 Y2 JPH0213870 Y2 JP H0213870Y2
- Authority
- JP
- Japan
- Prior art keywords
- blower
- core tube
- pass box
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 27
- 238000009792 diffusion process Methods 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000004080 punching Methods 0.000 claims description 3
- 238000011045 prefiltration Methods 0.000 claims description 2
- 238000011109 contamination Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8801985U JPH0213870Y2 (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8801985U JPH0213870Y2 (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61203246U JPS61203246U (enrdf_load_stackoverflow) | 1986-12-20 |
| JPH0213870Y2 true JPH0213870Y2 (enrdf_load_stackoverflow) | 1990-04-17 |
Family
ID=30640767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8801985U Expired JPH0213870Y2 (enrdf_load_stackoverflow) | 1985-06-11 | 1985-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213870Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-06-11 JP JP8801985U patent/JPH0213870Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61203246U (enrdf_load_stackoverflow) | 1986-12-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0213870Y2 (enrdf_load_stackoverflow) | ||
| JPH01288342A (ja) | 清浄キャビネット | |
| JP2003130413A (ja) | クリーンルーム装置 | |
| JP3861534B2 (ja) | クリーンルーム用無人搬送車 | |
| CN209985902U (zh) | 膜、口管传送快速落地密闭升降门风淋室 | |
| JP4169939B2 (ja) | ダムウェータのかご | |
| JP2585091B2 (ja) | クリーンルーム間の搬送装置 | |
| JPH0627866U (ja) | クリーンルーム用天井走行車 | |
| CN217908239U (zh) | 一种采样亭 | |
| JP3086910B2 (ja) | 半導体処理装置 | |
| JP3620591B2 (ja) | 浴室用ドア | |
| JPH0212513Y2 (enrdf_load_stackoverflow) | ||
| JPH0920479A (ja) | 多層階工場に於ける室内出入り時の塵埃除去方法及び 該工場で使用されるエレベータ装置 | |
| JPH07225Y2 (ja) | クリーンユニット | |
| JPS62108384U (enrdf_load_stackoverflow) | ||
| JPH0236584Y2 (enrdf_load_stackoverflow) | ||
| JPS6334287U (en) | Shutter device | |
| JPH0229166Y2 (enrdf_load_stackoverflow) | ||
| JP2548081Y2 (ja) | クリーン搬送システム | |
| JPH0357018B2 (enrdf_load_stackoverflow) | ||
| JPS61237951A (ja) | エアカ−テン装置 | |
| JP2548274Y2 (ja) | サッシュ窓 | |
| JPH0647115Y2 (ja) | コ−ルドドラフト除去用の窓サツシ | |
| JP3598359B2 (ja) | 葉たばこ乾燥用吊込・取卸装置のレール補助装置 | |
| JPS63131941A (ja) | 移動式クリ−ンユニツト |