JPH02138675A - パターンの良否検査装置における基準位置決め方法 - Google Patents

パターンの良否検査装置における基準位置決め方法

Info

Publication number
JPH02138675A
JPH02138675A JP1078233A JP7823389A JPH02138675A JP H02138675 A JPH02138675 A JP H02138675A JP 1078233 A JP1078233 A JP 1078233A JP 7823389 A JP7823389 A JP 7823389A JP H02138675 A JPH02138675 A JP H02138675A
Authority
JP
Japan
Prior art keywords
character
pattern
data
inspection
characters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1078233A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410114B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Seiji Kashioka
誠治 柏岡
Yoshihiro Shima
嶋　好博
Riichi Yasue
利一 安江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1078233A priority Critical patent/JPH02138675A/ja
Publication of JPH02138675A publication Critical patent/JPH02138675A/ja
Publication of JPH0410114B2 publication Critical patent/JPH0410114B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
JP1078233A 1989-03-31 1989-03-31 パターンの良否検査装置における基準位置決め方法 Granted JPH02138675A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1078233A JPH02138675A (ja) 1989-03-31 1989-03-31 パターンの良否検査装置における基準位置決め方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1078233A JPH02138675A (ja) 1989-03-31 1989-03-31 パターンの良否検査装置における基準位置決め方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55121154A Division JPS5748163A (en) 1980-09-03 1980-09-03 Method and device for inspection of pattern

Publications (2)

Publication Number Publication Date
JPH02138675A true JPH02138675A (ja) 1990-05-28
JPH0410114B2 JPH0410114B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-24

Family

ID=13656325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1078233A Granted JPH02138675A (ja) 1989-03-31 1989-03-31 パターンの良否検査装置における基準位置決め方法

Country Status (1)

Country Link
JP (1) JPH02138675A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997005565A1 (fr) * 1995-07-25 1997-02-13 Komatsu Ltd. Procede et dispositif pour enregistrer un standard d'inspection d'un dispositif d'inspection de caracteres
JP2013234862A (ja) * 2012-05-07 2013-11-21 Bridgestone Corp 検査方法及び検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997005565A1 (fr) * 1995-07-25 1997-02-13 Komatsu Ltd. Procede et dispositif pour enregistrer un standard d'inspection d'un dispositif d'inspection de caracteres
JP2013234862A (ja) * 2012-05-07 2013-11-21 Bridgestone Corp 検査方法及び検査装置

Also Published As

Publication number Publication date
JPH0410114B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-24

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