JPH02138420U - - Google Patents
Info
- Publication number
- JPH02138420U JPH02138420U JP4758189U JP4758189U JPH02138420U JP H02138420 U JPH02138420 U JP H02138420U JP 4758189 U JP4758189 U JP 4758189U JP 4758189 U JP4758189 U JP 4758189U JP H02138420 U JPH02138420 U JP H02138420U
- Authority
- JP
- Japan
- Prior art keywords
- transfer chamber
- gate valve
- vapor phase
- phase growth
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000000638 solvent extraction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 230000007547 defect Effects 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4758189U JPH02138420U (ko) | 1989-04-21 | 1989-04-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4758189U JPH02138420U (ko) | 1989-04-21 | 1989-04-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02138420U true JPH02138420U (ko) | 1990-11-19 |
Family
ID=31563634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4758189U Pending JPH02138420U (ko) | 1989-04-21 | 1989-04-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02138420U (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006216710A (ja) * | 2005-02-02 | 2006-08-17 | Hitachi High-Technologies Corp | 半導体製造装置 |
JP2016535940A (ja) * | 2013-09-30 | 2016-11-17 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 移送チャンバガスパージ装置、電子デバイス処理システム、及びパージ方法。 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6247118B2 (ko) * | 1982-05-12 | 1987-10-06 | Kobe Steel Ltd |
-
1989
- 1989-04-21 JP JP4758189U patent/JPH02138420U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6247118B2 (ko) * | 1982-05-12 | 1987-10-06 | Kobe Steel Ltd |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006216710A (ja) * | 2005-02-02 | 2006-08-17 | Hitachi High-Technologies Corp | 半導体製造装置 |
JP2016535940A (ja) * | 2013-09-30 | 2016-11-17 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 移送チャンバガスパージ装置、電子デバイス処理システム、及びパージ方法。 |
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