JPH0213118Y2 - - Google Patents

Info

Publication number
JPH0213118Y2
JPH0213118Y2 JP1984025405U JP2540584U JPH0213118Y2 JP H0213118 Y2 JPH0213118 Y2 JP H0213118Y2 JP 1984025405 U JP1984025405 U JP 1984025405U JP 2540584 U JP2540584 U JP 2540584U JP H0213118 Y2 JPH0213118 Y2 JP H0213118Y2
Authority
JP
Japan
Prior art keywords
tube
suction
susceptor
holder
suction cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984025405U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60140762U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2540584U priority Critical patent/JPS60140762U/ja
Publication of JPS60140762U publication Critical patent/JPS60140762U/ja
Application granted granted Critical
Publication of JPH0213118Y2 publication Critical patent/JPH0213118Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Chemical Vapour Deposition (AREA)
JP2540584U 1984-02-24 1984-02-24 気相成長装置の平板状サセプタ清掃用真空掃除機 Granted JPS60140762U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2540584U JPS60140762U (ja) 1984-02-24 1984-02-24 気相成長装置の平板状サセプタ清掃用真空掃除機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2540584U JPS60140762U (ja) 1984-02-24 1984-02-24 気相成長装置の平板状サセプタ清掃用真空掃除機

Publications (2)

Publication Number Publication Date
JPS60140762U JPS60140762U (ja) 1985-09-18
JPH0213118Y2 true JPH0213118Y2 (enrdf_load_stackoverflow) 1990-04-11

Family

ID=30520439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2540584U Granted JPS60140762U (ja) 1984-02-24 1984-02-24 気相成長装置の平板状サセプタ清掃用真空掃除機

Country Status (1)

Country Link
JP (1) JPS60140762U (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53150977U (enrdf_load_stackoverflow) * 1977-05-06 1978-11-28
JPS572184U (enrdf_load_stackoverflow) * 1980-06-06 1982-01-07

Also Published As

Publication number Publication date
JPS60140762U (ja) 1985-09-18

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