JPS60140762U - 気相成長装置の平板状サセプタ清掃用真空掃除機 - Google Patents

気相成長装置の平板状サセプタ清掃用真空掃除機

Info

Publication number
JPS60140762U
JPS60140762U JP2540584U JP2540584U JPS60140762U JP S60140762 U JPS60140762 U JP S60140762U JP 2540584 U JP2540584 U JP 2540584U JP 2540584 U JP2540584 U JP 2540584U JP S60140762 U JPS60140762 U JP S60140762U
Authority
JP
Japan
Prior art keywords
tube
vacuum cleaner
suction
susceptors
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2540584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0213118Y2 (enrdf_load_stackoverflow
Inventor
内山　武吉
敏郎 加藤
敏 坂内
和弘 杉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP2540584U priority Critical patent/JPS60140762U/ja
Publication of JPS60140762U publication Critical patent/JPS60140762U/ja
Application granted granted Critical
Publication of JPH0213118Y2 publication Critical patent/JPH0213118Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Cleaning In General (AREA)
JP2540584U 1984-02-24 1984-02-24 気相成長装置の平板状サセプタ清掃用真空掃除機 Granted JPS60140762U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2540584U JPS60140762U (ja) 1984-02-24 1984-02-24 気相成長装置の平板状サセプタ清掃用真空掃除機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2540584U JPS60140762U (ja) 1984-02-24 1984-02-24 気相成長装置の平板状サセプタ清掃用真空掃除機

Publications (2)

Publication Number Publication Date
JPS60140762U true JPS60140762U (ja) 1985-09-18
JPH0213118Y2 JPH0213118Y2 (enrdf_load_stackoverflow) 1990-04-11

Family

ID=30520439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2540584U Granted JPS60140762U (ja) 1984-02-24 1984-02-24 気相成長装置の平板状サセプタ清掃用真空掃除機

Country Status (1)

Country Link
JP (1) JPS60140762U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53150977U (enrdf_load_stackoverflow) * 1977-05-06 1978-11-28
JPS572184U (enrdf_load_stackoverflow) * 1980-06-06 1982-01-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53150977U (enrdf_load_stackoverflow) * 1977-05-06 1978-11-28
JPS572184U (enrdf_load_stackoverflow) * 1980-06-06 1982-01-07

Also Published As

Publication number Publication date
JPH0213118Y2 (enrdf_load_stackoverflow) 1990-04-11

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