JPS60140762U - Vacuum cleaner for cleaning flat susceptors of vapor phase growth equipment - Google Patents
Vacuum cleaner for cleaning flat susceptors of vapor phase growth equipmentInfo
- Publication number
- JPS60140762U JPS60140762U JP2540584U JP2540584U JPS60140762U JP S60140762 U JPS60140762 U JP S60140762U JP 2540584 U JP2540584 U JP 2540584U JP 2540584 U JP2540584 U JP 2540584U JP S60140762 U JPS60140762 U JP S60140762U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- vacuum cleaner
- suction
- susceptors
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning In General (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例の真空掃除機の本体部を示す
断面図である。
１・・・・・・サセプタ、２・・・・・・吸引筒、３・
・・・・・吸引口、４，５・・・・・・０リング、６・
・・・・・上下動ホルダ、７・・・・・・調節リング、
８・・・・・・管体、９・・・・・・回転ホルダ、１０
，１１・・・・・・ベアリング、１２．１４・・・・・
・固定用ビス、１３・・・・・・回転レバー、１５・・
・・・・支持台ミ １６・・・・・・接続管、１６Ａ・
・・・・・管口。FIG. 1 is a sectional view showing the main body of a vacuum cleaner according to an embodiment of the present invention. 1... Susceptor, 2... Suction tube, 3.
...Suction port, 4,5...0 ring, 6.
...Vertical movement holder, 7...Adjustment ring,
8... Tube body, 9... Rotating holder, 10
, 11...Bearing, 12.14...
・Fixing screw, 13...Rotary lever, 15...
...Support stand Mi 16...Connection pipe, 16A.
...Tube mouth.
Claims (1)
筒が設けられ、この吸引筒の一端側先端が封止されてい
るとともに、この吸引筒の一端側下部にスリット状の吸
引口が吸引筒の長手方向に設けられ、上記吸引筒の他端
側端部が上下動ホルダおよび回転ホルダを介して管体の
一端部に接続７・４ され、この管体の他端部は支持
台に固定されているとともに、該他端部はこの支持台に
より封止され、上記管体の側部に管体と連通ずる接続管
が設けられ、上下動および回転可能な上記吸引筒と連通
したこの接続管の管口が真空ポンプに接続されているこ
とを特徴とする真空掃除機。A suction cylinder is provided with one end extending horizontally and the other end bent downward at right angles, the tip of one end of this suction cylinder is sealed, and a slit-shaped suction port is provided at the bottom of one end of this suction cylinder. The suction tube is provided in the longitudinal direction, and the other end of the suction tube is connected to one end of the tube via a vertically movable holder and a rotating holder, and the other end of the tube is connected to a support base. At the same time, the other end is sealed by the support base, and a connecting tube communicating with the tube body is provided on the side of the tube body, and communicating with the suction cylinder which can move up and down and rotate. A vacuum cleaner characterized in that the pipe opening of this connecting pipe is connected to a vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2540584U JPS60140762U (en) | 1984-02-24 | 1984-02-24 | Vacuum cleaner for cleaning flat susceptors of vapor phase growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2540584U JPS60140762U (en) | 1984-02-24 | 1984-02-24 | Vacuum cleaner for cleaning flat susceptors of vapor phase growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60140762U true JPS60140762U (en) | 1985-09-18 |
| JPH0213118Y2 JPH0213118Y2 (en) | 1990-04-11 |
Family
ID=30520439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2540584U Granted JPS60140762U (en) | 1984-02-24 | 1984-02-24 | Vacuum cleaner for cleaning flat susceptors of vapor phase growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60140762U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53150977U (en) * | 1977-05-06 | 1978-11-28 | ||
| JPS572184U (en) * | 1980-06-06 | 1982-01-07 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS572184B2 (en) * | 1974-04-16 | 1982-01-14 |
-
1984
- 1984-02-24 JP JP2540584U patent/JPS60140762U/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53150977U (en) * | 1977-05-06 | 1978-11-28 | ||
| JPS572184U (en) * | 1980-06-06 | 1982-01-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0213118Y2 (en) | 1990-04-11 |
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