JPH02125331U - - Google Patents
Info
- Publication number
- JPH02125331U JPH02125331U JP3421989U JP3421989U JPH02125331U JP H02125331 U JPH02125331 U JP H02125331U JP 3421989 U JP3421989 U JP 3421989U JP 3421989 U JP3421989 U JP 3421989U JP H02125331 U JPH02125331 U JP H02125331U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust means
- plasma generation
- chamber
- electromagnetic coil
- generation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3421989U JPH02125331U (en:Method) | 1989-03-24 | 1989-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3421989U JPH02125331U (en:Method) | 1989-03-24 | 1989-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02125331U true JPH02125331U (en:Method) | 1990-10-16 |
Family
ID=31538498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3421989U Pending JPH02125331U (en:Method) | 1989-03-24 | 1989-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02125331U (en:Method) |
-
1989
- 1989-03-24 JP JP3421989U patent/JPH02125331U/ja active Pending