JPH02122741U - - Google Patents
Info
- Publication number
- JPH02122741U JPH02122741U JP3078189U JP3078189U JPH02122741U JP H02122741 U JPH02122741 U JP H02122741U JP 3078189 U JP3078189 U JP 3078189U JP 3078189 U JP3078189 U JP 3078189U JP H02122741 U JPH02122741 U JP H02122741U
- Authority
- JP
- Japan
- Prior art keywords
- force
- conductor
- applying
- detachment
- electrostatic chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3078189U JPH02122741U (zh) | 1989-03-16 | 1989-03-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3078189U JPH02122741U (zh) | 1989-03-16 | 1989-03-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02122741U true JPH02122741U (zh) | 1990-10-09 |
Family
ID=31256149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3078189U Pending JPH02122741U (zh) | 1989-03-16 | 1989-03-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02122741U (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007073833A (ja) * | 2005-09-08 | 2007-03-22 | Dainippon Screen Mfg Co Ltd | 減圧乾燥装置及び基板乾燥方法 |
JP2008060285A (ja) * | 2006-08-31 | 2008-03-13 | Tokyo Electron Ltd | 基板載置機構および基板受け渡し方法 |
WO2009144938A1 (ja) * | 2008-05-30 | 2009-12-03 | パナソニック株式会社 | プラズマ処理装置および方法 |
JP2010226039A (ja) * | 2009-03-25 | 2010-10-07 | Oki Semiconductor Co Ltd | ウエハ保持装置、半導体製造装置およびウエハ吸着方法 |
JP2016157883A (ja) * | 2015-02-26 | 2016-09-01 | 株式会社東京精密 | プローバ及びウェーハ剥離方法 |
JP2019004168A (ja) * | 2018-08-22 | 2019-01-10 | 株式会社東京精密 | プローバ及びウェーハ剥離方法 |
-
1989
- 1989-03-16 JP JP3078189U patent/JPH02122741U/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007073833A (ja) * | 2005-09-08 | 2007-03-22 | Dainippon Screen Mfg Co Ltd | 減圧乾燥装置及び基板乾燥方法 |
JP2008060285A (ja) * | 2006-08-31 | 2008-03-13 | Tokyo Electron Ltd | 基板載置機構および基板受け渡し方法 |
WO2009144938A1 (ja) * | 2008-05-30 | 2009-12-03 | パナソニック株式会社 | プラズマ処理装置および方法 |
JP2010226039A (ja) * | 2009-03-25 | 2010-10-07 | Oki Semiconductor Co Ltd | ウエハ保持装置、半導体製造装置およびウエハ吸着方法 |
JP2016157883A (ja) * | 2015-02-26 | 2016-09-01 | 株式会社東京精密 | プローバ及びウェーハ剥離方法 |
JP2019004168A (ja) * | 2018-08-22 | 2019-01-10 | 株式会社東京精密 | プローバ及びウェーハ剥離方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH02122741U (zh) | ||
WO2004033365A3 (en) | Method of forming a sensor for detecting motion | |
JP2005520220A5 (zh) | ||
JPS61184216U (zh) | ||
JPS6347364U (zh) | ||
JPH0248145A (ja) | 静電チャック | |
JPS6120909U (ja) | ナツト等の構造部品 | |
JPH0369173U (zh) | ||
JPS6411542U (zh) | ||
JPS61177702U (zh) | ||
JPS6231008U (zh) | ||
JPH01123495U (zh) | ||
JPH0585360B2 (zh) | ||
JPH0236438U (zh) | ||
JPH0171073U (zh) | ||
JPS6435767U (zh) | ||
JPH02135139U (zh) | ||
JPS6080890U (ja) | マグネツト式物品把持装置 | |
JPS6016151A (ja) | 直流電動機のブラシ保持装置 | |
JPS61203754U (zh) | ||
JPS6258421U (zh) | ||
JPS62174362U (zh) | ||
JPH0318689U (zh) | ||
JPH02104715U (zh) | ||
JPS6241662U (zh) |