JPH021224B2 - - Google Patents

Info

Publication number
JPH021224B2
JPH021224B2 JP5404881A JP5404881A JPH021224B2 JP H021224 B2 JPH021224 B2 JP H021224B2 JP 5404881 A JP5404881 A JP 5404881A JP 5404881 A JP5404881 A JP 5404881A JP H021224 B2 JPH021224 B2 JP H021224B2
Authority
JP
Japan
Prior art keywords
crystal
evaporation
vapor deposition
hole
adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5404881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57169085A (en
Inventor
Yasuo Nomura
Toshio Hayashi
Toshiki Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP5404881A priority Critical patent/JPS57169085A/ja
Publication of JPS57169085A publication Critical patent/JPS57169085A/ja
Publication of JPH021224B2 publication Critical patent/JPH021224B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP5404881A 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator Granted JPS57169085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5404881A JPS57169085A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5404881A JPS57169085A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Publications (2)

Publication Number Publication Date
JPS57169085A JPS57169085A (en) 1982-10-18
JPH021224B2 true JPH021224B2 (cs) 1990-01-10

Family

ID=12959715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5404881A Granted JPS57169085A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Country Status (1)

Country Link
JP (1) JPS57169085A (cs)

Also Published As

Publication number Publication date
JPS57169085A (en) 1982-10-18

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