JPH02122496U - - Google Patents
Info
- Publication number
- JPH02122496U JPH02122496U JP3111189U JP3111189U JPH02122496U JP H02122496 U JPH02122496 U JP H02122496U JP 3111189 U JP3111189 U JP 3111189U JP 3111189 U JP3111189 U JP 3111189U JP H02122496 U JPH02122496 U JP H02122496U
- Authority
- JP
- Japan
- Prior art keywords
- heat dissipation
- dissipation sheet
- diamond
- silicon
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000017525 heat dissipation Effects 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3111189U JPH02122496U (de) | 1989-03-17 | 1989-03-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3111189U JPH02122496U (de) | 1989-03-17 | 1989-03-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02122496U true JPH02122496U (de) | 1990-10-08 |
Family
ID=31256727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3111189U Pending JPH02122496U (de) | 1989-03-17 | 1989-03-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02122496U (de) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59137686A (ja) * | 1982-09-22 | 1984-08-07 | ダンフオス・エ−・エス | 空気力式の調整装置 |
-
1989
- 1989-03-17 JP JP3111189U patent/JPH02122496U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59137686A (ja) * | 1982-09-22 | 1984-08-07 | ダンフオス・エ−・エス | 空気力式の調整装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0964433B1 (de) | Keramisches Mehrschichtheizelement | |
KR950021343A (ko) | 정전척크 부착 세라믹 히터 | |
EP0658066B1 (de) | Diamant Heizkörper | |
JPH02122496U (de) | ||
JP2002146540A (ja) | 基板加熱装置 | |
JP3914377B2 (ja) | 静電吸着機能を有するウエーハ加熱装置 | |
KR970009470A (ko) | 박막형 전열기 | |
JPH09283609A (ja) | 静電吸着装置 | |
JPH04160788A (ja) | カーボンヒータ | |
JPH0561754B2 (de) | ||
JPH0864874A (ja) | 熱電素子 | |
JPH0845651A (ja) | 複層セラミックヒーター | |
JPH036862U (de) | ||
JPH01214194A (ja) | 熱伝導性基板 | |
JPH021556U (de) | ||
JP3812600B2 (ja) | 静電吸着機能を有するウエハ加熱装置 | |
JPH0745918Y2 (ja) | 調理用セラミックヒーター | |
JPH0374636U (de) | ||
KR950021341A (ko) | 정전척크 부착 세라믹 히터 | |
JPS63108256A (ja) | センサ基板 | |
JPS61147275U (de) | ||
JPS60119743U (ja) | 化学的気相付着装置 | |
JPH10335321A (ja) | ホットプレート装置 | |
JPS61114840U (de) | ||
JPH08227882A (ja) | ウエハの焼付装置 |