JPH0211667B2 - - Google Patents

Info

Publication number
JPH0211667B2
JPH0211667B2 JP3830384A JP3830384A JPH0211667B2 JP H0211667 B2 JPH0211667 B2 JP H0211667B2 JP 3830384 A JP3830384 A JP 3830384A JP 3830384 A JP3830384 A JP 3830384A JP H0211667 B2 JPH0211667 B2 JP H0211667B2
Authority
JP
Japan
Prior art keywords
crucible
heating means
surrounding
metal
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3830384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60181266A (ja
Inventor
Masahiro Hanai
Teruo Ina
Tateo Motoyoshi
Kenichiro Yamanishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3830384A priority Critical patent/JPS60181266A/ja
Publication of JPS60181266A publication Critical patent/JPS60181266A/ja
Publication of JPH0211667B2 publication Critical patent/JPH0211667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
JP3830384A 1984-02-28 1984-02-28 金属溶融装置 Granted JPS60181266A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3830384A JPS60181266A (ja) 1984-02-28 1984-02-28 金属溶融装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3830384A JPS60181266A (ja) 1984-02-28 1984-02-28 金属溶融装置

Publications (2)

Publication Number Publication Date
JPS60181266A JPS60181266A (ja) 1985-09-14
JPH0211667B2 true JPH0211667B2 (enrdf_load_stackoverflow) 1990-03-15

Family

ID=12521530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3830384A Granted JPS60181266A (ja) 1984-02-28 1984-02-28 金属溶融装置

Country Status (1)

Country Link
JP (1) JPS60181266A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS60181266A (ja) 1985-09-14

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